Method and apparatus for end point detection

• US 5,045,149 A
• Filed: 06/22/1990
• Issued: 09/03/1991
• Est. Priority Date: 10/24/1988
• Status: Expired due to Term

• Current Assignee: VLSI Technology, Inc. (Koninklijke Philips N.V.)
• Original Assignee: VLSI Technology, Inc. (Koninklijke Philips N.V.)
• Inventors: Nulty, James E.
• Primary Examiner(s): Simmons, David A.
• Assistant Examiner(s): DANG, THI D
• Application Number:
  US07/542,811
• Time in Patent Office: 438 Days
• Field of Search: 156/627, 156/626, 156/345, 156/653, 156/657, 156/662, 204/192.33, 204/298.32, 356/222, 356/437
• US Class Current: 438/16
• CPC Class Codes: G01N 21/62 Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge

Abstract

A method and an apparatus for detecting the endpoint in a plasma etching process is disclosed. The invention uses a positive filter and a negative filter simultaneously to generate a first and a second signal respectively. The first and second signals are combined to form a combined signal. A change in the combined signal is indicative of the endpoint.

Claims

1. A method of determining a time at which a radio frequency powered plasma etching process, etching a first material over a second different material, should be terminated when the first material is etched away exposing the second different material, wherein the method comprising the steps of:

monitoring an optical emission intensity of said plasma etch process by a positive filter, a filter which generates a signal which increases in signal amplitude upon the detection of the first material being etched away, generating a first signal in response thereto, said first signal varying in intensity depending upon the etching process;

simultaneously monitoring the optical emission intensity of said plasma etch process by a negative filter, a filter which generates a signal which decreases in signal amplitude upon the detection of the first material being etched away, generating a second signal in response thereto, said second signal varying in intensity depending upon the etching process;

combining said first signal with said second signal to produce a combined signal; and

detecting a change in said combined signal, wherein said change is indicative of said first material being etched away exposing said second different material.

2. The method of claim 1 wherein said first material is a polysilicon.

3. The method of claim 1 wherein said second different material is silicon dioxide.

4. The method of claim 1, wherein said positive filter monitors said emission intensity in the frequency range of approximately 280±

15 nm.

5. The method of claim 1, wherein said negative filter monitors said emission intensity in the frequency range of approximately 477±

135 nm.

6. The method of claim 1, wherein said combining step comprises the first signal subtracting the second signal.

8. The apparatus of claim 4 wherein said positive filter means is adapted to generate a signal in response to the detection of optical emission intensity in the frequency range of approximately 280±

15 nm.

9. The apparatus of claim 4 wherein said negative filter means is adapted to generate a signal in response to the detection of optional emission intensity in the frequency range of approximately 477±

135 nm.

7. An apparatus for determining a time at which a plasma etching process, etching a first material over a second different material, should be terminated when the first material is etched away exposing the second different material, said apparatus having means for generating said plasma, wherein the improvement comprising

positive filter means for monitoring an optical emission intensity of said plasma etch process, and for generating a first signal in response thereto, said first signal varying in intensity depending upon the etching process and increasing in signal amplitude upon the detection of the first material being etched away;

negative filter means for simultaneously monitoring the optical emission intensity of said plasma etch process, and for generating a second signal in response thereto, said second signal varying in intensity depending upon the etching process and decreasing in signal amplitude upon the detection of the first material being etched away;

means for combining said first and second signals to produce a combined signal; and

means for detecting a change in said combined signal, wherein said change is indicative of said first material being etched away exposing said second different material.

10. The method of determining a time at which a radio frequency powered plasma etching apparatus, etching a first material over a second different material, should be terminated when the first material is etched away exposing the second different material wherein the radio frequency powered plasma etching apparatus has two settings for generating substantially the same amount of power output, wherein the method comprising the steps of:

monitoring an optical emission intensity of said plasma etching process by a first filter generating a first output signal therefrom, said first output signal varying in intensity depending upon the etching process, wherein upon the exposure of the second material, said first output signal increases in signal amplitude and is a first detectable signal at said first setting of said apparatus, and said first output signal is a substantially undetectable signal at said second setting of said apparatus;

simultaneously monitoring the optical emission intensity of said plasma etching process by a second filter generating a second output signal therefrom, said second output signal varying in intensity upon the etching process wherein upon the exposure of the second material, said second output signal decreases in signal amplitude and is a second detectable signal at said second setting of said apparatus, and said second output signal is a substantially undetectable signal at said first setting of said apparatus;

combining said first and second output signals of said first and second filters; and

detecting a change in said combined signal, wherein said change is indicative of said first material being etched away exposing said second different material.