Force transducer etched from silicon

• US 5,045,152 A
• Filed: 06/29/1990
• Issued: 09/03/1991
• Est. Priority Date: 03/06/1989
• Status: Expired due to Term

• Current Assignee: University of Michigan
• Original Assignee: Ford Motor Company
• Inventors: Sickafus, Edward N.
• Primary Examiner(s): Simmons, David A.
• Assistant Examiner(s): DANG, THI D
• Application Number:
  US07/528,389
• Time in Patent Office: 431 Days
• Field of Search: 156/653, 156/657, 156/662, 156/647, 156/630, 73/862.59, 73/517 AV, 73/DIG. 1
• US Class Current: 438/53
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/097 by vibratory elements
• CPC Class Codes: G01P 15/132 with electromagnetic counterbalancing means

Abstract

An accelerometer fabricated by silicon etching techniques. A first suspended beam is formed having a first conductive portion, the beam being deflectable in response to an acceleration force. A second beam having second and third conductive portions is suspended over the first beam. Phased lock loop circuitry oscillates the second beam at resonance and provides an electrical signal proportional to the acceleration force.

Claims

1. A method for fabricating an accelerometer from silicon, comprising the steps of:

etching a pair of cavities through a silicon substrate from an exposed surface of said silicon substrate to define a first suspended beam therebetween, said first suspended beam being deflectable in response to acceleration;

forming a first conductive portion on said first suspended beam;

bonding a silicon based material to an opposite surface of said silicon substrate;

etching a pair of cavities through said silicon based material bonded to said substrate to define a second suspended beam suspended opposite said first suspended beam;

forming second and third conductive portions on said second suspended beam opposite said first conductive portion;

coupling an electrical oscillator circuit between said first and second conductive portions for oscillating said second suspended beam; and

coupling an electrical detector circuit between said first and third conductive portions for sampling electrical power between said first and third conductive portions at sample times provided by said oscillation of said second beam.

2. The method recited in claim 1 wherein said step of forming said first conductive portion comprises doping said first suspended beam.

3. The method recited in claim 1 wherein said silicon based material is comprised of polysilicon and said step of forming said second and third conductive portions comprises doping said polysilicon.

4. A method for fabricating an accelerometer from silicon, comprising the steps of:

forming a sacrificial layer of a silicon based material reactive to an etchant over one planar surface of a silicon substrate;

forming a layer of polysilicon over said sacrificial layer;

etching a pair of cavities from a surface opposite to said planar surface through said silicon substrate to define a first suspended beam therebetween, said first suspended beam being suspended opposite said first suspended beam and deflectable in response to acceleration;

forming a second beam by selectively etching parallel cavities through said polysilicon layer to define said second beam between said cavities;

etching away said sacrificial layer to suspend said second beam over said first suspended beam;

forming a first conductive portion on said first beam;

forming second and third conductive portions on said second beam;

coupling an electrical oscillator between said first and second conductive portions for oscillating said second beam; and

coupling sensing circuitry between said second and third conductive portions for sensing the applied force by sensing capacitive changes between said conductive portions at sample times determined by said oscillation of said second beam.

5. The method recited in claim 4 further comprising the step of forming flexible members between said first suspended beam and said substrate.