Gaseous component identification with polymeric film sensor

• US 5,045,285 A
• Filed: 09/05/1989
• Issued: 09/03/1991
• Est. Priority Date: 09/05/1989
• Status: Expired due to Fees

• Current Assignee: United States Of America As Represented By The Secretary Of The Air Force
• Original Assignee: United States Of America As Represented By The Secretary Of The Air Force
• Inventors: Kolesar, Edward S. Jr.
• Primary Examiner(s): Warden, Robert J.
• Assistant Examiner(s): EDWARDS, LAURA ESTELLE
• Application Number:
  US07/405,824
• Time in Patent Office: 728 Days
• Field of Search: 436/149, 422/83, 422/90, 422/98, 204/406, 204/400
• US Class Current: 422/98
• CPC Class Codes: G01N 27/4141 specially adapted for gases

Abstract

A sensor having an interdigitated gate electrode field effect transistor (IGEFET) coupled to an electron beam evaporated copper phthalocyanine thin film is used to selectively detect parts-per-billion concentration levels of atmosphere contaminants such as nitrogen dioxide (NO₂) and diisopropyl methylphosphonate (DIMP). The sensor is excited with a voltage pulse, and its time- and frequency-domain response are examined. The envelopes of the magnitude of the normalized difference frequency spectrums reveal features which unambiguously distinguish the NO₂ and DIMP exposures.

Claims

1. Electronic gaseous component detecting and measuring apparatus comprising the combination of:

a first array of electrical conductors disposed over the surface of an electrically insulating substrate member and connected to a first electrical terminal;

a second array of electrical conductors disposed intermediate of said first array conductors on said electrically insulating substrate member and connected to a second electrical terminal;

a chemically reactive gaseous component responsive polymeric thin film membrane member disposed over the surface of said substrate member and the conductors of said first and second arrays, the resistivity of said membrane member being determinative of the electrical conductivity between said first and second electrical terminals;

a source of pulsed electrical energy series coupled with said electrical terminals and generating a pulsed conductivity modulated output signal from said membrane member;

amplifying means series connected with said pulsed electrical energy source and said electrical terminals for enhancing said membrane member conductivity modulated pulsed electrical signal;

Fourier transform means connected with the pulsed output signal of said amplifying means for spectral comparison identification and concentration quantification of unknown gaseous components.

2. The detecting and measuring apparatus of claim 1 wherein said first array and second array conductors are disposed in an interdigitated matrix across a planar surface of said substrate member.

3. The detecting and measuring apparatus of claim 1 wherein said amplifying means includes a field effect transistor disposed physically adjacent said conductor arrays and wherein the gate electrode of said transistor is connected with said second array second electrical terminal.

4. The detecting and measuring apparatus of claim 3 wherein said field effect transistor is a metal oxide semiconductor field effect transistor.

5. The detecting and measuring apparatus of claim 1 wherein said polymeric thin film membrane is comprised of a metal-doped phthalocyanine semiconducting polymer.

6. The detecting and measuring apparatus of claim 5 wherein said metal-doped phthalocyanine includes a dopant metal taken from the group consisting of silver, copper, cobalt, iron, magnesium, manganese, nickel, palladium, platinum, lead, sodium, and zinc.

7. The detecting and measuring apparatus of claim 5 wherein said polymeric thin film membrane has a thickness between seventy and one thousand angstroms.

8. The detecting and measuring apparatus of claim 1 further including temperature controlled heating means for maintaining the operating temperature of said thin film membrane in the range of one hundred twenty to one hundred fifty degrees centigrade.

9. The detecting and measuring apparatus of claim 8 wherein said operating temperature is one hundred twenty five degrees centigrade.

10. The detecting and measuring apparatus of claim 1 wherein said first and second arrays of electrical conductors are comprised of metallic gold.

11. The detecting and measuring apparatus of claim 1 wherein said first and second arrays of electrical conductors are comprised of metallic aluminum.

12. The detecting and measuring apparatus of claim 1 wherein said Fourier transform means includes means for calculating the frequency-spectrum of the pulsed electrical excitation signal connected with said first electrical terminal and of the pulsed output signals from said amplifying means.

13. The detecting and measuring apparatus of claim 1 wherein said Fourier transform means also includes means for calculating the normalized difference between said pulsed frequency spectrums.

14. The detecting and measuring apparatus of claim 1 wherein said pulsed electrical energy has a waveform of the impulse function type.

15. The detecting and measuring apparatus of claim 1 wherein said Fourier transform means include a memory of gaseous compound normalized difference Fourier transform spectra data and means for comparing said memory spectra data with the normalized difference Fourier transform spectra data of an unknown gaseous component.

16. Apparatus for monitoring gaseous concentrations in a challenge gas comprising the combination of:

a gaseous sensor member having first and second interposed electrical conductors and an overlying chemically active polymeric thin film membrane member in electrical contact therewith, the instantaneous electrical impedance between said conductors being determined by the conductivity of said thin film membrane member;

means for exposing said thin film membrane member to said challenge gas mixture;

pulsed excitation voltage source means having a rich harmonic waveform content for energizing said sensor member;

waveform analysis means including normalized difference Fourier transformation means for determining the spectral distribution of sensor member conductivity variation imposed modifications of said sourcing means signal in response to unknown challenge gas mixture exposure.

17. The apparatus of claim 16 wherein said waveform analysis means includes an electronic amplifier circuit having a high impedance input port connected to receive said conductivity variation signals;

whereby signal current flow in said membrane member is limited to the microampere and sub-microampere current range.

18. The apparatus of claim 17 wherein said waveform analysis means includes an electronic amplifier circuit having a field effect transistor amplifier circuit that is located physically adjacent said gaseous sensor member.

19. The apparatus of claim 16 wherein said pulsed excitation voltage source means output waveform is of the impulse function type.

20. The apparatus of claim 19 wherein said pulsed excitation voltage source means waveform has an on duty cycle in the range between one and two percent.

21. The apparatus of claim 16 wherein said Fourier transformation means includes means for determining the normalized Fourier transformation of said pulsed excitation voltage source means output signal, means for determining the normalized Fourier transformation of said conductivity variation signal and means for subtracting the normalized spectral components of said Fourier transformations to generate a Fourier difference spectra.

22. The apparatus of claim 21 wherein said waveform analysis means includes means for comparing and matching said Fourier difference spectra with a library of said spectra.

23. The apparatus of claim 16 wherein said gaseous sensor member conductors are comprised of interdigitated metallic finger electrodes spread across a planar substrate member.

24. The apparatus of claim 16 wherein said chemically active polymeric thin film is comprised of copper doped phthalocyanine polymer.

25. Apparatus for identifying gaseous components comprising the combination of:

a polymeric thin film chemical reaction modulated electrical resistance detecting element;

means for exposing said detecting element to said gaseous components and to a preliminary sequence of purging and conditioning gases;

electrical impulse emulating signal excitation means connected with said detecting element for generating a chemical reaction modulated sequence of output signals therefrom;

Fourier transformation means for generating the normalized difference Fourier transform spectra of said electrical impulse signals and said chemical reaction modulated output signals;

means for comparing said normalized difference Fourier transform spectra with the entries in a library of said normalized difference spectra and for identifying predetermined degrees of spectral match therein.

26. The apparatus of claim 25 wherein said means for comparing further includes means responsive to the area beneath the plotted curve of said normalized difference Fourier transform spectra for determining the concentration of said gaseous component.

27. The apparatus of claim 25 further including high-input impedance amplifier means disposed adjacent said detecting element and connected with said chemical reaction modulated sequence of output signals therefrom.