Method of and apparatus for detecting pattern defects by means of a plurality of inspecting units each operating in accordance with a respective inspecting principle

• US 5,046,113 A
• Filed: 01/12/1989
• Issued: 09/03/1991
• Est. Priority Date: 01/12/1988
• Status: Expired due to Term

• Current Assignee: Dainippon Screen Manufacturing Company Limited (SCREEN Holdings Co., Ltd.)
• Original Assignee: Dainippon Screen Manufacturing Company Limited (SCREEN Holdings Co., Ltd.)
• Inventors: Hoki, Tetsuo
• Primary Examiner(s): Moore, David K.
• Assistant Examiner(s): Couso, Jose L.
• Application Number:
  US07/296,435
• Time in Patent Office: 964 Days
• Field of Search: 382/8, 382/41, 382/48, 382/49, 358/101, 358/106, 358/107
• US Class Current: 382/147
• CPC Class Codes: G01N 21/956 Inspecting patterns on the surface of objects contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: G06T 2207/20036 Morphological image processing
• CPC Class Codes: G06T 2207/30148 Semiconductor; IC; Wafer
• CPC Class Codes: G06T 7/0006 using a design-rule based approach
• CPC Class Codes: G06T 7/001 using an image reference approach

Abstract

An apparatus for inspecting pattern defects in circuit board conductors or other images has inspecting units which perform inspection operations based on various pattern matching approaches, which include design rule checking and expansion/contraction processing. Each of the inspecting units inspects a part of the pattern of an object. The part of a pattern is defined by a respective inspection and inhibition domain defining signals. The domain signals are formed with the aid of a scanning device and a binarizing circuit, a CAD system and a converter, a digitizer and a converter and the like. The apparatus then displays inspection decisions derived from each inspecting unit on a display unit, with respect to the different domains.

Claims

1. A method of inspecting an object to detect pattern defects thereof, comprising the steps of:

(a) providing a plurality of inspecting units each of which operates in accordance with a respective inspecting principle;

(b) defining, in a defining means, an inspection domain which forms a source of the inspection signals and an inhibition domain which forms a source of the inhibition signals, said inspection and inhibition domains being defined for each inspecting unit on the object;

(c) obtaining groups of domain signals on the basis of each image of the defining means, each said group of domain signals comprising inspection signals and inhibition signals;

(d) storing groups of domain signals in a memory in addresses thereof which correspond to positions on the object, each said group of domain signals having a particular relation to a respective one of the inspecting units;

(e) binarizing an image of the object;

(f) reading out the domain signals of every group of the domain signals from the memory according to inspection position addresses on the object;

(g) controlling the operation of each inspecting unit according to the type of domain signals read out therefor from the memory; and

(h) forming an inspection decision according to an output signal of the inspecting units.

2. A method in accordance with claim 1, wherein said groups of domain signals are obtained by scanning and binarizing each image of the defining means.

3. A method in accordance with claim 2, wherein the defining means is a film on which at least one of the inspection domain is formed and the inhibition domain.

4. A method in accordance with claim 2, wherein the defining means is a plate with a punched hole which forms either the inspection domain or the inhibition domain.

5. A method in accordance with claim 1, wherein the groups of domain signals are stored in the memory by receiving groups of binary signals, each said group of binary signals comprising an inspection domain and an inhibition domain.

6. A method in accordance with claim 5, wherein the group of the binary signals is obtained by converting CAD data created with a CAD system into the binary signals.

7. A method in accordance with claim 5, wherein the group of the binary signals is obtained by converting digitized signals generated with a digitizer into the binary signals.

8. A method in accordance with claim 1, wherein the operation of the inspecting unit is inhibited when the inhibition signal of the inspecting unit is read out from the memory.

9. A method in accordance with claim 8, wherein an output signal of the inspecting unit is nullified by a gate means according to the state of an inhibition signal read out from the memory.

10. A method in accordance with claim 8, wherein an input signal of the inspecting unit is nullified by a gate means according to the state of an inhibition signal read out from the memory.

17. The method of claim 1, further comprising displaying an indication whenever a defect has been located.

18. A method in accordance with claim 17, further comprising displaying additionally the location of the defect and the type of inspecting unit which has detected it.

19. A method in accordance with claim 1, wherein said binarizing of an image is carried out by scanning the image of the object.

11. An apparatus for inspecting and finding pattern defects of an object to be inspected, comprising:

image signal generating means for generating image signals of the object;

a plurality of inspecting units for inspecting and finding pattern defects, if any, on the object by using the image signals of the object, each said inspecting unit operating in accordance with a respective inspecting principle;

domain signal generating means for generating domain signals expressing an image pattern defined on the object, said image pattern having an inspection domain and an inhibition domain;

a memory for storing groups of the domain signals, each said group of domain signals having a particular relation to a respective one of the inspecting units;

an access controller for controlling reading and writing of the domain signals in the memory according to positions of the image pattern;

an inspection controller for controlling the operation of each inspecting unit in response to the respective domain signals read out from the memory; and

forming means for forming an inspection decision in response to output signals of the inspecting units.

12. An apparatus in accordance with claim 11, wherein the domain signal generating means comprises a CAD system which creates CAD data forming an inspection domain and an inhibition domain, and converting means for converting the CAD data into the domain signals.

13. An apparatus in accordance with claim 11, wherein the domain signal generating means comprises a digitizer which generates digitized signals forming an inspection domain and an inhibition domain, and converting means for converting the digitized signals into the domain signals.

14. An apparatus in accordance with claim 11, wherein the inspection controller is effective for inhibiting the operation of the inspecting unit in response to the inhibition signal read out from the memory.

15. An apparatus in accordance with claim 14, further comprising gate means and wherein operation of the inspecting unit is inhibited by nullifying an output signal of the inspecting unit with the gate means.

16. An apparatus in accordance with the claim 14, further comprising gate means and wherein the operation of the inspecting unit is inhibited by nullifying an input signal of the inspecting unit with the gate means.