Method for controlling the sensitivity and linearity of capacitive transducer systems

• US 5,048,165 A
• Filed: 01/26/1990
• Issued: 09/17/1991
• Est. Priority Date: 01/30/1989
• Status: Expired due to Fees

• Current Assignee: Dresser-Nagano Incorporated (GE Aerospace)
• Original Assignee: Dresser Industries Incorporated (Halliburton Company)
• Inventors: Cadwell, Robert M.
• Primary Examiner(s): Hall, Carl E.
• Application Number:
  US07/471,205
• Time in Patent Office: 599 Days
• Field of Search: 29/25.41, 29/593, 340/870.37, 73/715, 73/717, 73/718, 361/283, 338/4
• US Class Current: 29/25.41
• CPC Class Codes: G01L 9/0042 Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms details about the integration or bonding of piezoresistor in or on the diaphragm G01L9/0052 and G01L9/0057 respectively
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm
• CPC Class Codes: Y10T 29/43 Electric condenser making
• CPC Class Codes: Y10T 29/49004 including measuring or testing of device or component part

Abstract

Inherent capacitive-type nonlinearities in a capacitive displacement transducer can be eliminated or reduced by the introduction of an oppositely-sensed nonlinearity. The oppositely sensed nonlinearity is introduced by selecting a diaphragm thickness to define a stiffness such that there is an increased resistance to deflection. The increased resistance to deflection generates a nonlinearity which decreases with increasing input to offset an oppositely sensed inherent nonlinearly which increases with increasing input, thereby balancing the nonlinearities and achieving an overall linear output.

Claims

1. A method for controlling nonlinearities in a transducer having a movable member responsive to an input stimulus and in which nonlinearities of a first type degrade performance of the transducer, comprising the step of introducing into the transducer during manufacture thereof a nonlinearity of a second type defined by a stiffness which changes with an input, said nonlinearity being introduced into a constraining member attached to the movable member so as to offset the linearities of the first type and thereby control the overall nonlinearity of the transducer.

2. The method of claim 1, further including balancing the nonlinearities of said first type and said second type by selecting a thickness of the constraining member so that the nonlinearities of said first type are substantially offset.

3. The method of claim 2, further including selecting a gap dimension between said movable member and a capacitive plate for defining an output of the transducer.

4. The method of claim 3, further including imparting a predefined prestrain to said constraining member to adjust overall nonlinearity of the transducer.

5. The method of claim 1, further including reducing the overall nonlinearities of a capacitive transducer having a capacitance between a plate and the movable member by selecting a desired capacitive plate to movable member gap spacing and a thickness of said constraining member.

6. The method of claim 5, further including reducing the overall nonlinearity substantially to zero by selecting a particular gap spacing and constraining member thickness.

7. The method of claim 5, further including selecting said gap spacing to define a nonlinearity to said first type.

8. A method for controlling nonlinearities in a transducer having a movable member responsive to an input stimulus, and in which first type nonlinearities degrade performance of the transducer, comprising the steps of:

attaching said movable member to a fixed frame with a constraining support; and

constructing said constraining support with a material having a predefined thickness such that with changes in movement of said movable member said constraining support provides changes in resistance to said movement, said change in resistance defining a second type nonlinearity which offsets said first type nonlinearities to thereby control overall nonlinearities.

9. The method of claim 8, further including constructing said movable member and said constraining support as a clamped diaphragm.

10. The method of claim 9, further including constructing said diaphragm to provide a capacitive change in response to a change in an input stimulus to said transducer.

11. The method of claim 10, further including selecting a diaphragm thickness and a capacitive gap parameter so as to reduce said overall nonlinearities.

12. The method of claim 8, wherein the extent of said first type nonlinearities change with changing input stimulus, and further including constructing said constraining support and said movable member as a clamped diaphragm, and forming said diaphragm with a thickness to introduce the second type nonlinearity of an opposite sense which substantially tracks said first type nonlinearity with changing input.

13. The method of claim 12, further including constructing said diaphragm as a thin silicon membrane.

14. A method for controlling nonlinearities in a transducer having a member which is movable in response to an input stimulus, and in which there is an increase in sensitivity with an increase in the input stimulus, comprising the steps of:

selecting a parameter of said transducer which decreases said sensitivity with increasing input such that an overall nonlinearity can be controlled, and selecting said parameter as a change in resistance of movement of said movable member with a change in input stimulus; and

fabricating a transducer having the selected resistance of the movable member to control overall nonlinearity.

15. The method of claim 14, further including forming a connection of said movable member such that deflection thereof is enhanced, and thus there is an increased resistance to said deflection.

16. The method of claim 14, further including constructing said transducer with a thin clamped silicon diaphragm.

17. The method of claim 14, further including balancing third order nonlinearities of one sense by selecting transducer parameters which result in third order nonlinearities of a different sense.

18. The method of claim 17, further including selecting a capacitive gap spacing of said transducer to define the nonlinearity of said one sense, and selecting a stiffness of said movable member to define the nonlinearity of the different sense.

19. The method of claim 17, further including selecting a gap spacing and stiffness parameters so that the nonlinearity of said one sense and said different sense are balanced.

28. The method of claim 17, further including reducing said overall nonlinearities to substantially zero.

20. A method for constructing a transducer of the type having a member deflectable in response to an input stimulus to produce a change in output capacitance, comprising the steps of:

selecting a gap spacing associated with said capacitance and constructing said movable member such that with increasing member deflection there is increased resistance to deflection so that a sensitivity of said transducer is made substantially independent of said input stimulus.

21. The method of claim 20, further including constructing said movable member as a clamped diaphragm.

22. The method of claim 21, wherein said gap spacing and a thickness of said diaphragm are selected to control nonlinearity of the transducer.

23. A method for reducing nonlinearities in a capacitive transducer of the type having an element movable in response to an input stimulus, comprising the steps of:

selecting a parameter ratio comprising a displacement parameter of the movable member and a thickness parameter of a support structure which supports said movable member; and

fabricating the support structure that supports the movable member to conform to said parameter ratio to thereby introduce a nonlinearity into the transducer for controlling the overall nonlinearity of said transducer.

24. The method of claim 23, further including selecting said thickness to provide said support structure with a defined variation of stiffnesses with deflection.

25. The method of claim 23, further including fabricating said movable member and said support structure as a clamped diaphragm.

26. The method of claim 23, further including selecting a capacitive gap parameter to achieve a desired nonlinearity for balancing with said introduced nonlinearity to achieve a desired output of said transducer.

27. A method for constructing a capacitive displacement transducer, comprising the steps of:

forming a thin diaphragm;

supporting said diaphragm at edges thereof so that said diaphragm is spaced apart from a capacitor plate by a gap to thereby define a capacitance; and

selecting the gap spacing and the thickness of the diaphragm to substantially reduce an overall nonlinearity of said transducer.

29. The method of claim 27, further including supporting said diaphragm between a pair of plates to define a pair of capacitances, and further including connecting said transducer to an electrical circuit which converts capacitance to an electrical signal, an algorithm of said circuit comprising a ratio of reciprocal capacitive differences and a reciprocal summation to the pair of capacitances.

30. A method for defining dimensions affecting performance of a capacitive pressure transducer system, said system being of the type having a clamped diaphragm movable in response to a pressure and at least one fixed capacitance plate, comprising the steps of:

a) for a given set of transducer dimensions and a given input pressure, determining the deflection of a large number of regions of said diaphragm;

b) determining the capacitance(s) between said diaphragm and said capacitance plate(s) by summing the capacitance(s) between said diaphragm regions and said capacitance plate(s);

c) determining the electrical output of the transducer system based upon a given capacitance-to-electrical output conversion algorithm;

d) repeating steps a) through c) for a range of said pressures to determine the sensitivity and nonlinearity of said transducer system;

e) repeating steps a) through d) for a range of said transducer dimensions to determine the effect of said transducer dimensions on sensitivity and nonlinearity; and

f) selecting transducer dimensions to achieve a desired nonlinearity.

31. The method of claim 30, wherein said transducer dimensions that are varied are the thickness of said clamped diaphragm and the spacing between said clamped diaphragm and said capacitance plate(s).

32. The method of claim 30, wherein said transducer dimensions are varied to produce positive and negative nonlinearity values and a transition therebetween which passes through a zero nonlinearity.

33. The method of claim 30, wherein said transducer dimensions are varied to produce a desired sensitivity and a desired nonlinearity.

34. A method for reducing nonlinearity of a capacitive displacement transducer of the type having a movable member which is movable in response to an input physical stimulus, and at least one fixed capacitance plate, comprising the steps of:

selecting a capacitive gap spacing between said fixed capacitance plate and said movable member to define a nonlinearity having a sense which increases sensitivity with increasing input;

selecting a thickness of a support element connected to said movable member to define a nonlinearity having a sense which decreases sensitivity with increasing input; and

selecting said capacitive gap and said support element thickness so that the nonlinearity associated with the capacitive gap is substantially offset by the nonlinearity associated with said support element.

35. The method of claim 34, further including selecting a capacitive gap and support element thickness such that said overall nonlinearity is substantially constant over the operating range of the physical stimulus.

36. The method of claim 34, further including selecting said gap spacing and said thickness so that said increasing and decreasing sensitivities track substantially over the operating range of the transducer.

37. The method of claim 34, further including forming said support element and said movable member as a clamped diaphragm.

38. The method of claim 37, further including forming the thickness of said support element to comprise the thickness of said diaphragm.