Transducer glass bonding technique

• US 5,049,421 A
• Filed: 01/30/1989
• Issued: 09/17/1991
• Est. Priority Date: 01/30/1989
• Status: Expired due to Fees

• Current Assignee: Dresser-Nagano Incorporated (GE Aerospace)
• Original Assignee: Dresser Industries Incorporated (Halliburton Company)
• Inventors: Kosh, William S.
• Primary Examiner(s): Gallagher, John J.
• Application Number:
  US07/304,358
• Time in Patent Office: 960 Days
• Field of Search: 156/307.3, 156/330.9, 156/153, 156/286, 156/331.1, 156/295, 156/87, 428/473.5, 428/34.4, 428/34.7, 428/435, 73/718, 116/268, 29/595, 108/150
• US Class Current: 428/34.4
• CPC Class Codes: A47G 19/2255 Details related to the connection between the liquid containing part and the supporting part
• CPC Class Codes: G01L 19/147 Details about the mounting of the sensor to support or covering means
• CPC Class Codes: G01L 9/0042 Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms details about the integration or bonding of piezoresistor in or on the diaphragm G01L9/0052 and G01L9/0057 respectively
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm
• CPC Class Codes: Y10T 29/49007 Indicating transducer
• CPC Class Codes: Y10T 428/131 Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]
• CPC Class Codes: Y10T 428/1321 Polymer or resin containing [i.e., natural or synthetic]
• CPC Class Codes: Y10T 428/31623 Next to polyamide or polyimide
• CPC Class Codes: Y10T 428/31721 Of polyimide

Abstract

A polyimide adhesive is applied in liquid form between surfaces of a pressure transducer glass surface and a glass pedestal tube and maintained at room temperature, or below, for a period of 10-15 hours to allow the adhesive solvent to evaporate. After such time, the temperature of the transducer and attached pedestal tube is elevated over a period of time to about 320° C. to completely imidize the polyimide adhesive. The pedestal is then fixed within an opening in a base portion of a case, and electrical conductors are connected between pins in the case and transducer contacts. A cover is hermetically sealed to the case to thereby encase the transducer.

Claims

1. A method for bonding a glass tube to a glass surface of a transducer, comprising the steps of:

applying a solvent-containing polyimide adhesive to a surface of said glass tube, said polyimide adhesive being at room temperature, or below when applied;

placing the adhesive applied surface of said glass tube onto the glass surface of said transducer to form a composite structure;

maintaining said composite structure at about room temperature or below, for a sufficiently long period of time to allow substantially all of the solvent to escape; and

thereafter raising the temperature of the composite structure to a temperature sufficient to cure the polyimide adhesive to realize a substantially void-free thermosetting bond.

2. The method of claim 1, wherein a polyimide resin composition composed of the reaction product of 3, 3'"'"' -diaminobenzophenone and 3, 3'"'"', 4, 4'"'"' benzophenone tetracarboxylic acid dianhydride is employed as said adhesive.

3. The method of claim 1, further including maintaining said composite structure at a temperature of 5°

-10°

C. for about 10-15 hours for allowing escape of said solvent.

4. The method of claim 3, wherein the temperature raising step is carried out by raising the temperature of said composite structure in a vacuum oven at a low vacuum.

5. The method of claim 1, wherein after the solvent has substantially escaped, the temperature of said composite structure is raised over a period of about 3-8 hours to about 320°

C. to cure the bond to a thermoplastic state.

6. The method of claim 1, further including bonding the glass tube to a transducer glass surface having a portion thereof covered with a metal conductor.

7. A method for bonding a transducer having an apertured glass layer, to a glass tube, comprising the steps of:

coating a surface of the glass tube for the transducer glass layer with a liquid polyimide adhesive;

applying a predetermined pressure between the glass tube and the transducer glass layer so that a thin layer of said adhesive is formed;

maintaining the thin polyimide layer at room temperature, or below, for a period of time sufficient to allow substantially all of an adhesive solvent to evaporate; and

elevating a temperature of the transducer and attached glass tube such that complete imidizing of the polyimide adhesive occurs.

8. The method of claim 7, further including bonding said transducer to said glass tube with an adhesive composition composed of the reaction product of 3, 3'"'"' -diaminobenzophenone and 3, 3'"'"', 4, 4'"'"' benzophenone tetracarboxylic acid dianhydride.

9. The method of claim 8, further including employing said adhesive with an adhesion promoter.

10. The method of claim 7, further including allowing the thin layer of adhesive to remain at a temperature of about 5°

-10°

C. for about 10-15 hours to achieve said solvent evaporation.

11. The method of claim 7, further including elevating the temperature of said transducer and attached glass tube for a period of about 3-8 hours to a final temperature greater than about 300°

C.

12. The method of claim 7, further including forming a thin layer of said adhesive of less than about 0.3 mil thickness.

13. A composite glass structure bonded in accordance with the method of claim 7.

14. A method for fabricating a transducer device, comprising the steps of:

coating at least one surface of a transducer assembly or a glass pedestal with an adhesive composition composed of the reaction product of 3, 3'"'"' -diaminobenzophenone and 3, 3'"'"', 4, 4'"'"' benzophenone tetra-carboxylic acid dianhydride;

resting the pedestal upon the transducer assembly so that a thin layer of said adhesive is formed therebetween;

maintaining the temperature of said adhesive at less than about 10°

C. for a period of about 10-15 hours for allowing substantially all of an adhesive solvent to evaporate from said polyimide adhesive;

elevating the temperature of said transducer assembly and attached glass pedestal for a period of about 3-8 hours to a final temperature of greater than about 300°

C.;

fixing said pedestal and attached transducer assembly to a base of a case;

forming at least one fluid inlet to said case;

bonding conductors between pins of said case and contact surfaces of said transducer assembly; and

hermetically sealing a cover to the base of said transducer case.

15. The method of claim 14, further including elevating said temperature by predefined increments over predefined intervals of time.

16. The method of claim 15, further including elevating said temperature to about 50°

C. for about one and one half hours, then to about 150°

C. for about one hour, then to about 200°

C. for about one half hour, and then to about 270°

C. for about one half hour.

17. The method of claim 15, further including linearly elevating said temperature over a period of about 3-8 hours.

18. A transducer structure bonded in accordance with the method of claim 14.

19. A method for assembling a transducer structure, comprising the steps of:

bonding a pedestal tube to a transducer assembly such that a channel is defined for communicating fluids to said transducer assembly;

fixing the pedestal tube in a base portion of a case having electrical feed through pins;

connecting conductors between said feed through pins and contact surfaces of said transducer assembly; and

hermetically sealing a cover to said case for encasing said transducer assembly.

20. The method of claim 19, further including connecting said conductors only to upper surface contacts of said transducer assembly.

21. The method of claim 19, further including bonding said transducer assembly to said pedestal tube, utilizing a polyimide adhesive composition composed of the reaction product of 3, 3'"'"' -diaminobenzophenone and 3, 3'"'"', 4, 4'"'"' benzophenone tetra-carboxylic acid dianhydride.

22. The method of claim 21, further including precuring said adhesive at room temperature, or below, for a period of time sufficient to allow solvent thereof to evaporate from said adhesive.

23. The method of claim 19, further including bonding said pedestal tube to a base portion of said case with an RTV material.

24. The method of claim 19, further including forming a second fluid communication conduit in said base for allowing said transducer assembly to operate in response to external differential fluid pressures.

25. The method of claim 19, further including sealing said cover on said base so that said transducer is encased within a predefined pressure.

26. The method of claim 19, further including pressing said pedestal tube against said transducer assembly to form an adhesive layer with a thickness of less than about 0.3 mil.

27. The method of claim 26, further including forming said adhesive layer thickness by resting said pedestal tube on said transducer assembly and allowing the weight of said pedestal tube to squeeze said adhesive to said thickness.

28. A transducer structure assembled in accordance with the method of claim 19.

29. A method for bonding a transducer assembly to a pedestal tube, comprising the steps of:

applying a polyimide adhesive at room temperature or below, to a surface of said transducer assembly or to said pedestal tube;

resting said pedestal tube on said transducer assembly to form a thin layer of said adhesive therebetween;

maintaining said polyimide adhesive layer at said low room temperature or below until substantially all of an adhesive solvent has evaporated therefrom; and

elevating the temperature of said adhesive layer sufficient to imidize said polyimide adhesive and securely bond said pedestal tube to said transducer assembly.

30. The method of claim 29, further including maintaining said thin layer of polyimide adhesive at a temperature below about 10°

C.

31. The method of claim 30, further including refrigerating said transducer assembly, pedestal tube and thin layer of polyimide adhesive at a temperature of about 5°

C.

32. The method of claim 29, further including forming a thin layer of adhesive of less than about 0.3 mil between said pedestal tube and said transducer assembly.

33. A transducer structure bonded according to the method of claim 29.

34. A method for assembling transducer parts together, comprising the steps of:

applying a liquid polyimide adhesive to one or the other of a transducer chip and one end of a pedestal tube;

placing the parts together by butting the one end of the pedestal tube against a planar surface of the transducer chip while the polyimide adhesive is yet a liquid so that a fillet of the adhesive is formed on a sidewall of the other of the chip or tube;

allowing the polyimide adhesive to remain at a low temperature until a solvent therein is substantially removed; and

elevating the temperature so that imidizing of the polyimide occurs.

35. The method of claim 34, further including applying a force to the parts while the adhesive is in a liquid form to define a thin layer of said adhesive.

36. The method of claim 34, further including adhering the transducer chip to a pedestal tube so that fillets of said adhesive form on said pedestal tube.

37. The method of claim 34, further including allowing the weight of one said part to press on the liquid adhesive to form a desired thickness thereof.

38. The method of claim 34, further including adhering the other end of the pedestal tube to a casing header so that the transducer is supported within an encased part of a casing by the pedestal tube.

39. A transducer structure, comprising:

a transducer assembly having an apertured face;

a pedestal tube mounted to said transducer assembly face so as to provide a fluid channel to said aperture; and

a polyimide adhesive film between said pedestal tube and said transducer assembly, said adhesive film being less than about 0.3 mil in thickness.

40. The transducer structure of claim 39, further including fillets of said adhesive formed on sidewall surfaces of said pedestal tube.

41. The transducer structure of claim 39, wherein said pedestal tube and a surface of said transducer assembly which contacts said adhesive film are both made of glass.