Pressure sensor and method of manufacturing same
First Claim
1. Pressure sensor comprising a substrate and a diaphragm which are joined together, particularly in a defined spaced relationship and parallel to each other, forming a chamber sealed at least at the edge, whereinthe substrate and/or the diaphragm are made of ceramic, glass, or a single-crystal material,the side of the diaphragm facing the substrate is covered with a layer of silicon carbide, niobium, or tantalum which, in turn, is covered with a protective layer and serves as one capacitor electrode,the side of the substrate facing the diaphragm is covered within the chamber with at least one additional layer of any one of said materials which, in turn, is covered with an additional protective layer and serves as the second capacitor electrode, andthe substrate and the diaphragm are soldered together by a formed part of active solder which also serves as a spacer.
1 Assignment
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Accused Products
Abstract
The substrate (12) and/or the diaphragm (11) of the pressure sensor (10) are made of ceramic, glass, or a single-crystal material. The side of the diaphragm (11) facing the substrate (12) is covered with a layer of silicon carbide, niobium, or tantalum which, in turn, is covered with a protective layer (21) and serves as one capacitor electrode (14). The side of the substrate (12) facing the diaphragm (11) is covered with at least one additional layer of any one of said materials which, in turn, is covered with an additional protective layer (22) and serves as the second capacitor electrode (15). Substrate (12) and diaphragm (11) are soldered together by a formed part of active solder (20) which also serves as a spacer.
This pressure sensor can be manufactured in a single soldering step. The maximum load capacity of the diaphragm is determined not by the strength of the joint, but only by the strength of the diaphragm material. The pressure sensor can be used at higher temperatures than pressure sensors with glass-frit joints.
78 Citations
7 Claims
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1. Pressure sensor comprising a substrate and a diaphragm which are joined together, particularly in a defined spaced relationship and parallel to each other, forming a chamber sealed at least at the edge, wherein
the substrate and/or the diaphragm are made of ceramic, glass, or a single-crystal material, the side of the diaphragm facing the substrate is covered with a layer of silicon carbide, niobium, or tantalum which, in turn, is covered with a protective layer and serves as one capacitor electrode, the side of the substrate facing the diaphragm is covered within the chamber with at least one additional layer of any one of said materials which, in turn, is covered with an additional protective layer and serves as the second capacitor electrode, and the substrate and the diaphragm are soldered together by a formed part of active solder which also serves as a spacer.
Specification