Control valve utilizing mechanical beam buckling
First Claim
1. A valve apparatus for controlling fluid flow comprising:
- first substrate means having a first aperture extending therethrough for defining a first fluid flow path;
beam means having first and second terminal end portions mounted in fixed relationship with said substrate means and having a bucklingly displaceable intermediate portion positioned in overlying relationship with said aperture for covering and uncovering said aperture for preventing or enabling fluid flow through said aperture;
temperature control means for selectively controlling the temperature of said beam means for selectively bucklingly displacing said intermediate portion of said beam means for controlling fluid flow through said aperture;
said aperture extending between a first face surface and a second face surface of said substrate means;
said beam means first and second terminal end portions being attached to said first face surface of said substrate means;
said beam means comprising a first surface which is positioned remote from said substrate means and a second surface disposed generally parallel to said first surface and positioned proximate to said substrate means;
said beam means further comprising;
an inwardly buckled position wherein said intermediate portion is positioned in sealed covering relationship with said aperture and wherein said first surface of said beam means has a generally concave contour;
an outwardly buckled position wherein said intermediate portion is positioned in relatively widely spaced apart, uncovering relationship with said aperture and wherein said first surface of said beam means has a generally convex contour; and
a neutral position wherein said intermediate portion is positioned in relatively narrowly spaced apart, uncovering relationship with said aperture and wherein said first surface of said beam means has a relatively flat contour.
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Accused Products
Abstract
A valve apparatus for controlling fluid flow comprising a substrate having a first aperture extending therethrough for defining a first fluid flow path; a beam having first and second terminal end portions mounted in fixed relationship with the substrate and having a bucklingly displaceable intermediate portion positioned in overlying relationship with the aperture for covering and uncovering the aperture for preventing or enabling fluid flow through the aperture; and a temperature control assembly for selectively controlling the temperature of the beam for selectively bucklingly displacing the intermediate portion of the beam for controlling fluid flow through the aperture.
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Citations
14 Claims
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1. A valve apparatus for controlling fluid flow comprising:
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first substrate means having a first aperture extending therethrough for defining a first fluid flow path; beam means having first and second terminal end portions mounted in fixed relationship with said substrate means and having a bucklingly displaceable intermediate portion positioned in overlying relationship with said aperture for covering and uncovering said aperture for preventing or enabling fluid flow through said aperture; temperature control means for selectively controlling the temperature of said beam means for selectively bucklingly displacing said intermediate portion of said beam means for controlling fluid flow through said aperture; said aperture extending between a first face surface and a second face surface of said substrate means; said beam means first and second terminal end portions being attached to said first face surface of said substrate means; said beam means comprising a first surface which is positioned remote from said substrate means and a second surface disposed generally parallel to said first surface and positioned proximate to said substrate means;
said beam means further comprising;an inwardly buckled position wherein said intermediate portion is positioned in sealed covering relationship with said aperture and wherein said first surface of said beam means has a generally concave contour; an outwardly buckled position wherein said intermediate portion is positioned in relatively widely spaced apart, uncovering relationship with said aperture and wherein said first surface of said beam means has a generally convex contour; and a neutral position wherein said intermediate portion is positioned in relatively narrowly spaced apart, uncovering relationship with said aperture and wherein said first surface of said beam means has a relatively flat contour. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of controlling fluid flow comprising the steps of:
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coating a substrate with at least one layer of coating material; forming a beam from a portion of said coating layer, leaving opposite end portions of said beam integrally attached to said substrate; forming an orifice extending through said substrate layer which is positioned below a midportion of said beam; mounting said substrate with said integrally attached beam in a fluid flow line with fluid communication between upstream and downstream portions of the fluid flow line provided only by said orifice formed in said substrate; and controlling the temperature of the beam so as to selectively deform the beam so as to selectively cover or uncover the orifice.
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13. A method of making a control valve comprising the steps of:
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coating a substrate with at least one layer of coating material; forming a beam from a portion said coating layer, leaving opposite end portions of said beam integrally attached to said substrate; forming an orifice extending through said substrate layer which is positioned below a midportion of said beam; and providing an assembly for controllably heating the beam member.
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14. A microvalve comprising:
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a) a composite wafer comprising; i) a substrate; ii) at least one coating layer integrally bonded to said substrate; b) said at least one coating layer being patterned to define a beam having end portions integrally bonded to said substrate and having a midportion which is deformably displaceable relative said substrate; c) said substrate comprising an aperture extending therethrough positioned in alignment with said midportion of said beam; d) said beam being selectively thermally deformable for covering and uncovering said aperture for terminating and initiating fluid flow through said aperture.
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Specification