Surface analysis method and apparatus

• US 5,055,679 A
• Filed: 01/03/1990
• Issued: 10/08/1991
• Est. Priority Date: 01/06/1989
• Status: Expired due to Fees

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Suzuki, Keizo, Ninomiya, Ken
• Primary Examiner(s): Anderson, Bruce C.
• Application Number:
  US07/460,373
• Time in Patent Office: 643 Days
• Field of Search: 250/306, 250/307, 250/310, 250/397
• US Class Current: 850/56
• CPC Class Codes: G01N 2021/178 Methods for obtaining spatial resolution of the property being measured
• CPC Class Codes: G01N 21/1702 with opto-acoustic detection, e.g. for gases or analysing solids
• CPC Class Codes: G01N 21/63 optically excited
• CPC Class Codes: G01N 2201/1035 3D motion
• CPC Class Codes: G01N 2223/10 Different kinds of radiation or particles
• CPC Class Codes: G01N 2223/33 scanning, i.e. relative motion for measurement of successive object-parts
• CPC Class Codes: G01N 2223/345 mathematical transformations on beams or signals, e.g. Fourier
• CPC Class Codes: G01N 23/22 by measuring secondary emission from the material
• CPC Class Codes: G01N 23/2209 using wavelength dispersive spectroscopy [WDS]

Abstract

A method of and an apparatus for analyzing a surface are disclosed, in which the intensity profile of a probe beam at the surface of a sample is measured, the intensity distribution of a detection signal along the surface of the sample is measured by scanning the surface of the sample with the probe beam, and mathematical transformation is carried out for each of the measured intensity profile and the measured signal-intensity distribution, to make surface analysis with high resolution.

Claims

1. A method of analyzing a surface by using a probe beam, comprising the steps of:

measuring the intensity profile of a probe beam at the surface of a sample;

measuring the distribution of a detected signal along the surface of the sample by scanning the surface of the sample with the probe beam; and

carrying out mathematic transformation for each of the intensity profile and the distribution of the detected signal.

2. A method of analyzing a surface as claimed in claim 1, wherein the probe beam is an electron beam.

3. A method of analyzing a surface as claimed in claim 1, wherein the probe beam is an ion beam.

4. A method of analyzing a surface as claimed in claim 1, wherein the probe beam is a neutral particle beam.

5. A method of analyzing a surface as claimed in claim 1, wherein the probe beam is a light beam.

6. A method of analyzing a surface as claimed in claim 1, wherein the probe beam are focused on the surface of the sample.

7. A method of analyzing surface as claimed in claim 6, wherein the detected signal is obtained by detecting electrons which are generated by irradiating the surface of the sample with the probe beam.

8. A method of analyzing a surface as claimed in claim 6, wherein the detected signal is obtained by detecting ions which are generated by irradiating the surface of the sample with the probe beam.

9. A method of analyzing a surface as claimed in claim 6, wherein the detected signal is obtained by detecting neutral particles which are generated by irradiating the surface of the sample with the probe beam.

10. A method of analyzing a surface as claimed in claim 6, wherein the detected signal is obtained by detecting light which is generated by irradiating the surface of the sample with the probe beam.

11. A method of analyzing a surface as claimed in claim 6, wherein the detected signal is obtained by detecting the probe beam which has passed through the sample.

12. A method of analyzing a surface as claimed in claim 6, wherein the detected signal is obtained by detecting the probe beam which has been reflected or scattered from the surface of the sample.

13. A method of analyzing a surface as claimed in claim 6, wherein the detected signal is obtained by detecting a current which is generated by irradiating the surface of the sample with the probe beam or by detecting a sound wave which is generated by irradiating the surface of the sample with the probe beam.

14. A method of analyzing a surface as claimed in claim 6, wherein the surface of the sample is scanned probe beam by moving the sample.

15. A method of analyzing a surface as claimed in claim 6, wherein the surface of the sample is scanned with the probe beam by deflecting the probe beam.

16. A method of analyzing a surface as claimed in claim 6, wherein the surface of the sample is scanned with the probe beam by changing a position where the probe beam is generated.

17. A method of analyzing a surface as claimed in claim 6, wherein the probe beam is directed to the surface of the sample so that grazing incidence is realized.

18. An apparatus for analyzing a surface, comprising:

means for generating a probe beam;

means for irradiating the surface of a sample with the probe beam;

means for measuring the intensity profile of the probe beam at the surface of the sample;

means for scanning the surface of the sample with the probe beam;

means for detecting a signal caused by irradiating the surface of the sample with the probe beam, and for measuring the distribution of the signal along the surface of the sample; and

means for carrying out mathematical transformation for each of the measured intensity profile and the measured signal distribution.

19. An apparatus for analyzing a surface as claimed in claim 18, wherein the probe beam is an electron beam.

20. An apparatus for analyzing a surface as claimed in claim 18, wherein the probe beam is an ion beam.

21. An apparatus for analyzing a surface as claimed in claim 18, wherein the probe beam is a neutral particle beam.

22. An apparatus for analyzing a surface as claimed in claim 18, wherein the probe beam is a light beam.

23. An apparatus for analyzing a surface as claimed in claim 18, further comprising means for focusing the probe beam on the surface of the sample.

24. An apparatus for analyzing a surface as claimed in claim 23, wherein the signal detection means detects electrons which are generated by irradiating the surface of the sample with the probe beam.

25. An apparatus for analyzing a surface as claimed in claim 23, wherein the signal detection means detects ions which are generated by irradiating the surface of the sample with the probe beam.

26. An apparatus for analyzing a surface as claimed in claim 23, wherein the signal detection means detects neutral particles which are generated by irradiating the surface of the sample with the probe beam.

27. An apparatus for analyzing a surface as claimed in claim 23, wherein the signal detection means detects light which is generated by irradiating the surface of the sample with the probe beam.

28. An apparatus for analyzing a surface as claimed in claim 23, wherein the signal detection means detects the probe beam which has passed through the sample.

29. An apparatus for analyzing a surface as claimed in claim 23, wherein the signal detection means detects the probe beam which has been reflected or scattered from the surface of the sample.

30. An apparatus for analyzing a surface as claimed in claim 23, wherein the signal detection means detects a current which is generated by irradiating the surface of the sample with the probe beam or detects a sound wave which is generated by irradiating the surface of the sample with the probe beam.

31. An apparatus for analyzing a surface as claimed in claim 23, wherein the surface of the sample is scanned with the probe beam by moving the sample.

32. An apparatus for analyzing a surface as claimed in claim 23, wherein the surface of the sample is scanned with the probe beam by deflecting the probe beam.

33. An apparatus for analyzing a surface as claimed in claim 23, wherein the surface of the sample is scanned with the probe beam by changing a position where the probe beam is generated.

34. An apparatus for analyzing a surface as claimed in claim 23, further comprising means for changing an angle, at which the probe beam is incident on the surface of the sample.