Piezoelectric vibratory rate sensor
First Claim
1. In a rotation rate sensor of the type that includes a generally planar and H-shaped sensor frame of piezoelectric material, said frame including an upper pair of tines and a lower pair of tines, said tines being joined to an intermediate cross-piece and further including a first array of drive electrodes fixed to said upper tines for transmitting electrical signals for driving said upper tines in-plane and a second array of pickoff electrodes fixed to said lower tines for transmitting electrical signals generated in said lower tines in response to Coriolis-induced out-of-plane bending thereof, the improvement comprising:
- a) a third array of control electrodes for transmitting electrical signals for counteracting Coriolis-induced out-of-plane bending of said upper tines; and
b) said control electrodes are fixed to said upper tines adjacent said cross-piece.
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Accused Products
Abstract
A vibrating rotation rate sensor of the type that includes a generally-planar, H-shaped frame of piezoelectric material such as quartz. A first set of drive electrodes is fixed to a pair of upper tines and a second set of pickoff electrodes is fixed to a pair of lower tines. An array of control electrodes is fixed to the upper tine pair adjacent the cross-piece of the H-shaped frame. The control electrodes permit the application of control signals for nulling Coriolis-induced out-of-plane vibration of the upper tines allowing use of a resonant frame.
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Citations
22 Claims
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1. In a rotation rate sensor of the type that includes a generally planar and H-shaped sensor frame of piezoelectric material, said frame including an upper pair of tines and a lower pair of tines, said tines being joined to an intermediate cross-piece and further including a first array of drive electrodes fixed to said upper tines for transmitting electrical signals for driving said upper tines in-plane and a second array of pickoff electrodes fixed to said lower tines for transmitting electrical signals generated in said lower tines in response to Coriolis-induced out-of-plane bending thereof, the improvement comprising:
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a) a third array of control electrodes for transmitting electrical signals for counteracting Coriolis-induced out-of-plane bending of said upper tines; and b) said control electrodes are fixed to said upper tines adjacent said cross-piece. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A sensor comprising:
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a) a generally planar and H-shaped sensor frame of piezoelectric material, said frame including an upper pair of tines and a lower pair of tines joined to an intermediate cross-piece; b) at least one pickoff electrode fixed to said lower tines, said at least one electrode being arranged to transmit electrical signals generated within said frame of piezoelectric material in response to an inertial input; c) at least one control electrode fixed to said frame, said at least one electrode being arranged to transmit electrical signals to said frame of piezoelectric material for counteracting the effect of said inertial input upon said frame; and d) a feedback control circuit for accepting said signal from said at least one pickoff electrode and for generating and providing said counteracting signal to said at least one control electrode.
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Specification