Particle-free storage for articles

• US 5,059,079 A
• Filed: 02/15/1990
• Issued: 10/22/1991
• Est. Priority Date: 05/16/1989
• Status: Expired due to Term

• Current Assignee: Asyst Technologies Incorporated (Azenta, Inc.)
• Original Assignee: Proconics International, Inc.
• Inventors: Keohane, Richard J., Foulke, Richard F.
• Primary Examiner(s): Bucci, David A.
• Application Number:
  US07/481,749
• Time in Patent Office: 614 Days
• Field of Search: 414/217, 414/277, 414/280, 414/287, 414/273-275, 414/787, 414/331, 414/263, 414/283, 98/115.3, 312/236, 211/41, 211/194, 901/35, 901/47, 294/67.33, 294/907, 414/786
• US Class Current: 414/275
• CPC Class Codes: H01L 21/67769 Storage means
• CPC Class Codes: H01L 21/681 using optical controlling means
• CPC Class Codes: Y10S 294/907 Sensor controlled device
• CPC Class Codes: Y10S 414/14 Wafer cassette transporting

Abstract

Apparatus for storing articles including walls defining a bin enclosure having an opening for transporting articles therethrough, a support for supporting articles in an article storage region in the enclosure, and a source of pressurized particle-free air to the region to provide a higher pressure in the article storage region than outside of the enclosure. Also disclosed are an energy beam vision system that is carried by a transport system and interfaces with the walls and a controller that controls the transport mechanism in order to properly align the relative positions of the transport mechanism and the enclosure.

Claims

1. Apparatus for storing articles comprising

walls defining a bin enclosure having an opening for transporting articles therethrough,

a support for supporting articles in an article storage region in said enclosure,

a transport mechanism for transporting said articles into and out of said storage region, said transport mechanism having two arms that can engage said articles between them and are movable along an axis into and out of said storage region,

an energy beam vision system carried by said transport mechanism that directs an energy beam along a path that is close to but spaced from an outer boundary of a properly located and oriented article in said article storage region, and

means for determining if said beam is blocked by said article.

2. The apparatus of claim 1 wherein said vision system includes a light beam source and detector that are carried by said transport mechanism, and further comprising a reflector supported by a said wall.

3. The apparatus of claim 2 wherein said transport mechanism includes two arms for engaging an article-carrying carriers at its sides.

4. The apparatus of claim 3 wherein each said transport arm carries a said vision system, and there are two reflectors supported by a said wall.

5. The apparatus of claim 1 further comprising a source of particle-free air to said region to provide a higher pressure in said article storage region than outside of said enclosure.

6. The apparatus of claim 3 further comprising a plurality of said walls, supports, and sources of air to provide a plurality of said enclosures.

7. The apparatus of claim 6 wherein each said source of air includes a separate supply tube for each said enclosure.

8. The apparatus of claim 7 wherein said supply tubes are gently curving so as to avoid dead spaces.

9. Apparatus for storing articles comprising

walls defining a bin enclosure having an opening for transporting articles therethrough,

a support for supporting articles in an article storage region in said enclosure,

a transport mechanism for transporting said articles into and out of said storage region, said transport mechanism having two arms that can engage said articles between them and are movable along an axis into and out of said storage region,

a transverse vision system that is carried by said arms and passes an energy beam between the arms along a path that is transverse to said axis to detect the presence of objects between the arms, and

means for sensing blocking of said beam as a function of position of said arms as said arms are removed from said storage region to determine if said article has been dragged after it has been dropped off.

10. A method of placing an article at a desired location and in a desired orientation on a support in an article storage region comprising

engaging said article with a transport mechanism that has two arms that are spaced from each other and engage said article in the space between said arms, said arms carrying a transverse vision system that passes an energy beam along a path between the arms to detect the presence of objects between the arms,

moving said transport mechanism and engaged article along an axis that is transverse to said path into a position over said desired location,

disengaging said article so as to place it on said support, and

retracting said transport mechanism along said path and simultaneously sensing blocking of said beam as a function of position of said arms to determine if said article has been dragged after it has been dropped off.

11. A method of placing an article at a desired location and in a desired orientation on a support in an article storage region comprising

engaging said article with a transport mechanism that carries an energy beam vision system,

moving said transport mechanism and engaged article into a position over said desired location,

disengaging said article so as to place it on said support,

retracting said transport mechanism,

directing a beam of said energy beam vision system along a path that is close to but spaced from an outer boundary of a properly located and oriented article in said article storage region, and

detecting whether said beam is intersected by said article, thereby indicating improper placement or orientation.