Packaging and sealing for pressure transducer

• US 5,060,108 A
• Filed: 01/25/1990
• Issued: 10/22/1991
• Est. Priority Date: 01/25/1990
• Status: Expired due to Term

• Current Assignee: Sensata Technologies Incorporated (Sensata Technologies Holding Plc)
• Original Assignee: Texas Instruments, Inc.
• Inventors: Baker, Gary A., Berg, Peter G.
• Primary Examiner(s): Griffin, Donald A.
• Application Number:
  US07/477,361
• Time in Patent Office: 635 Days
• Field of Search: 361/283, 73/718, 73/724, 277/235 R
• US Class Current: 361/283.4
• CPC Class Codes: G01L 9/0072 using variations in capacitance
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Abstract

A pressure transducer having a capactive pressure sensing moudle disposed in a housing is biased against a sealing ring disposed in a chamber circumscribing a fluid pressure inlet by a retainer ring mounted in the housing. A selected back-up washer may be used to accommodate various size pressure sensing modules. The housing is sealed from the environs by means of a hermetic glass-to-metal header which mounts terminals to provide electrical coupling to electronics mounted in the housing.

Claims

1. A pressure transducer having an improved seal comprising a metallic cup shaped housing with a bottom wall and an integrally attached generally cylindrical side wall extending therefrom to a free distal end portion defining a chamber therein, the chamber having a first pressure sensing module receiving portion and a second electronics receiving portion, a pressure fluid inlet formed in the bottom wall, a pressure sensing module disposed in the first portion of the chamber in communication with the pressure fluid inlet, seal means disposed intermediate the pressure sensing module and the bottom wall circumscribing the fluid inlet, a groove formed in the internal surface of the cylindrical side wall, a retainer ring disposed in the groove placing a force on the pressure sensing module against the seal means, electronics board mounting means formed in the second portion of the chamber, an electronics board mounted on the mounting means, a metallic header received on the free distal end portion of the cylindrical wall and welded thereto, the header having terminal receiving apertures extending therethrough, a terminal extending through each aperture and electrically separated from the header by glass material, the terminals electrically coupled to the electronics board and electrical coupling means connecting the electronics board to the pressure sensing module.

2. A pressure transducer according to claim 1 further including a rigid annular element placed between the retainer ring and the pressure sensing module, the annular element having a height selected in accordance with the height of the pressure sensing module.

3. A pressure transducer according to claim 1 in which the electronics board mounting means comprises a ledge formed in the cylindrical side wall.

4. A pressure transducer according to claim 1 in which the seal means is an elastomeric o-ring.

5. A pressure transducer according to claim 1 in which the seal means is a metallic o-ring.

6. A pressure transducer according to claim 1 in which the seal means is a metal loaded elastomeric o-ring.

7. A pressure transducer which comprises a housing having a bottom wall with a fluid pressure inlet defined therethrough and a side wall extending from the bottom wall to form a chamber,

a groove formed in the side wall in communication with the chamber dividing the chamber into a first pressure sensing module receiving portion and a second electronics receiving portion,

a pressure sensing module having a rigid substrate and a pressure responsive diaphragm mounted on the substrate, the pressure sensing module disposed in the first portion of the chamber, sealing material disposed between the pressure sensing element and the bottom wall circumscribing the fluid inlet, and

a retainer ring disposed in the groove placing a force on the pressure sensing module against the sealing material, and

a rigid annular element placed between the retainer ring and the pressure sensing module, the annular element having a height selected in accordance with the height of the pressure sensing module.

8. A pressure transducer according to claim 7 in which the sealing material is configured as an o-ring and comprises an elastomeric material.

9. A pressure transducer according to claim 7 in which the sealing means is configured as an o-ring and comprises a metal loaded elastomeric material.

10. A pressure transducer according to claim 7 in which the sealing means is configured as an o-ring and comprises a metal material.

11. A pressure transducer having an improved seal comprising a cup shaped housing with a bottom wall and a side wall extending therefrom to a free distal end portion defining a chamber therein, the chamber having a pressure sensing module receiving portion, a pressure fluid inlet formed in the bottom wall, a pressure sensing module disposed in the portion of the chamber in communication with the pressure fluid inlet, seal means disposed intermediate the pressure sensing module and the bottom wall circumscribing the pressure fluid inlet, a groove formed in the internal surface of the side wall, a retainer element received in the groove and extending outwardly therefrom placing a force on the pressure sensing module against the seal means, a rigid spacer element placed between the retainer element and the pressure sensing module, the spacer element having a height selected in accordance with the height of the pressure sensing module, a header mounting electrical terminal means received at the distal end portion of the side wall closing the chamber and being sealed thereto, the electrical terminal means providing electrical power and signal conducting means for the transducer.

12. A pressure transducer according to claim 11 further including electronic means disposed in the chamber and electrically coupled to the pressure sensing module and the electrical terminals.

13. A pressure transducer according to claim 12 in which an annular groove is formed in the bottom wall in communication with the chamber and the seal means circumscribing the pressure fluid inlet is an elastomeric o-ring.

14. A pressure transducer according to claim 12 in which an annular groove is formed in the bottom wall in communication with the chamber and the seal means circumscribing the pressure fluid inlet is a metal loaded elastomeric o-ring.

15. A pressure transducer according to claim 12 in which an annular groove is formed in the bottom wall in communication with the chamber and the seal means circumscribing the pressure fluid inlet is a metal o-ring.

16. A pressure transducer which comprises a metallic housing having a bottom wall with a fluid pressure inlet defined therethrough and a side wall extending from the bottom wall to form a chamber, a capacitive pressure sensing module having a rigid substrate and a pressure responsive diaphragm mounted on the substrate, electrically conductive layers disposed respectively on facing surfaces of the substrate and the diaphragm, the module having an outer, pressure sensitive surface, an electrically conductive grounding layer disposed on the outer pressure sensitive surface, the module disposed in the chamber with the pressure sensitive surface in communication with the fluid pressure inlet, and electrically conductive sealing means disposed between the pressure sensitive surface and the bottom wall of the housing to complete an electrically conductive coupling between the outer pressure sensitive surface and the housing.

17. A pressure transducer according to claim 16 in which the sealing means comprises a metal-filled elastomer o-ring.

18. A pressure transducer according to claim 16 in which the sealing means comprises a metallic o-ring.