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Toroidal electron cyclotron resonance reactor

  • US 5,061,838 A
  • Filed: 06/23/1989
  • Issued: 10/29/1991
  • Est. Priority Date: 06/23/1989
  • Status: Expired due to Fees
First Claim
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1. A reactor comprising:

  • (a) a plasma generating chamber in which a plasma, comprised of electrical particles, is formed in a plasma source region;

    (b) magnet means for generating a poloidal magnetic field having a cylindrical axis of symmetry extending through the chamber;

    (c) microwave generating means for generating microwave fields in said plasma generating chamber;

    (d) a source of gaseous reactants for supplying gaseous reactants to said plasma generating chamber;

    (e) a specimen chamber adjacent said plasma generating chamber with a holding member adapted to hold specimens for processing and structure between the specimen and the plasma generating chamber for blocking the line-of-sight so that the specimen, when so held, is not in line-of-sight with the plasma source region;

    (f) a passageway between said specimen chamber and said plasma generating chamber through which said plasma is introduced into said specimen chamber;

    (g) pump means for controlling the flow of gaseous reactants into and out of the chamber;

    (h) the interaction between said magnetic field and microwave field with said reactants producing said plasma, said magnetic field extending from said source region to said electrode for guiding particles in the plasma until they encounter the specimen.

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