Vacuum chuck rotary seal

• US 5,062,384 A
• Filed: 11/13/1989
• Issued: 11/05/1991
• Est. Priority Date: 11/13/1989
• Status: Expired due to Fees

• Current Assignee: MFM Technology, LLC
• Original Assignee: MFM Technology, Inc. (Parker-Hannifin Corporation)
• Inventors: Foley, Thomas P., Mosciatti, Roger
• Primary Examiner(s): Bradley, Paula A.
• Assistant Examiner(s): Schultz, Robert
• Application Number:
  US07/435,259
• Time in Patent Office: 722 Days
• Field of Search: 279/3, 279/1 Q, 269/21, 51/235, 408/76, 409/225, 118/500.52, 118/503, 901/40, 901/28, 414/737, 414/752
• US Class Current: 118/500
• CPC Class Codes: B25B 11/005 Vacuum work holders
• CPC Class Codes: H01L 21/6838 with gripping and holding devices using a vacuum; Bernoulli devices
• CPC Class Codes: Y10T 279/11 Vacuum

Abstract

A vacuum chuck apparatus includes a vacuum chuck mounted on one end of a hollow shaft whose other end is connected through a rotary seal to a vacuum source. The seal includes a first member having a cap portion cemented to the shaft end and an axially bored frustoconical projection on its end wall and a second member having a frustoconical socket complementing the projection which partially nests in the socket. The second member has a radial pin loosely engaging a longitudinal slot in a stationary bracket to restrict its rotation and permit its axial movement. A spring loaded pressure plate bears on the outer end face of the seal second member.

Claims

1. A rotary device comprising a motor having an axially bored drive shaft, a vacuum chuck mounted on one end of said shaft;

a first seal member mounted on the other end of said shaft opposite said chuck end;

a floating second seal member of restricted rotation;

means mounting said second seal member coaxial with said first seal member and longitudinally movable relative thereto and for restricting its rotation;

one of said seal members having formed therein an axial socket with a first conical face terminating in a base at its inner end and having a bore communicating with said socket and the other seal member having an axial projection with a second conical face nesting in said socket and superimposed on and slidably engaging said first conical face and provided with an axially extending bore, the apex of said projection being axially spaced from said base of said socket;

means connecting one of said bores to a vacuum source and means for axially resiliently biasing said seal members toward each other to urge said first and second faces into mutual engagement.

2. The device of claim 1 wherein said second conical face of said projection and said socket are of frustoconical configuration.

3. The device of claim 1 wherein said mounting means comprises a bracket mounted on said housing and having a bore with an inner face confronting said second seal member, said member and said means for restricting the rotation of said second seal member including a longitudinally extending recess and a follower engaging said recess located on the confronting faces of said second seal member and bracket.

4. The device of claim 3 wherein said biasing means comprise a transverse pressure plate bearing on an end face of said second seal member opposite said first seal member and tension springs extending longitudinally between said pressure plate and said bracket to urge said pressure plate toward said second seal member.

5. A rotary vacuum chuck apparatus comprising a motor housing;

a longitudinally axially bored hollow motor drive shaft extending through and projecting beyond said housing;

a vacuum chuck member mounted on one end of said shaft;

a first vacuum seal member mounted on and rotatable with the other end of said shaft proximate a first end face of said housing and said first vacuum seal member including a conical projection coaxial with said shaft and having an axial bore;

a floating second seal member of restricted rotation and having a conically shaped axial socket spaced proximate said first seal member and an axial bore communicating with said socket, said first seal member conical projection nesting in said socket and having an apex spaced from the base of said socket;

spring-loaded means axially biasing said second seal member toward said first seal member;

means limiting the rotation of said second seal member; and

means providing communication between said socket and a vacuum source.

6. The apparatus of claim 5 wherein said biasing means includes a pressure plate bearing on an outer end face of said second seal member remote from said cavity and a plurality of peripherally spaced longitudinal tension springs, having opposite ends anchored to said housing and pressure plate respectively.

7. The apparatus of claim 5 wherein said means restricting rotation comprises a bracket mounted on said housing and extending longitudinally, and a follower projecting radially from said second seal member and slidably engaging a longitudinal recess in said bracket.

8. The apparatus of claim 5 wherein said communication means comprises a bracket mounted on said housing, a longitudinal first pipe engaging said second seal member bore, a second longitudinal pipe supported by said bracket, a flexible tube extending between said pipes and tube coupling means supported by said bracket communicating with said second pipe.

9. The apparatus of claim 5 wherein said first seal member comprises a cap section including a cylindrical peripheral wall engaging and secured to said other end of said shaft and a circular end wall integrally formed with said projection.

10. The apparatus of claim 5 wherein the maximum diameter of said projection is less than the outside diameter of said shaft.