Electrostatically actuatable light modulating device
First Claim
1. An electrostatically actuatable light modulating device comprising:
- a substrate plate patterned with an array of light passing apertures; and
,a co-located array of shuttering cells to spatially control light transmission through the aperture array, each of the cells comprising;
a mechanically positionable shutter means;
an electrostatic field actuator means to forcibly move the shutter means;
a position dependent mechanical restoring force means acting on said shutter means and in opposition to said electrostatic field actuator means; and
,an electrical switch element means which is uniquely addressable within the array, to provide electrical energy to said electrostatic field actuator means.
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Abstract
The electrostatically actuatable light modulator utilizes an opaque substrate plate patterned with an array of aperture cells, the cells comprised of physically positionable dielectric shutters and electrostatic actuators. With incorporation of a light source and a viewing screen, a projection display system is effected. Inclusion of a color filter array aligned with the aperture cells accomplishes a color display. The system is realized in terms of a silicon based manufacturing technology allowing fabrication of a high resolution capability in a physically small device which with the utilization of included magnification optics allows both large and small projection displays.
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Citations
16 Claims
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1. An electrostatically actuatable light modulating device comprising:
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a substrate plate patterned with an array of light passing apertures; and
,a co-located array of shuttering cells to spatially control light transmission through the aperture array, each of the cells comprising; a mechanically positionable shutter means; an electrostatic field actuator means to forcibly move the shutter means; a position dependent mechanical restoring force means acting on said shutter means and in opposition to said electrostatic field actuator means; and
,an electrical switch element means which is uniquely addressable within the array, to provide electrical energy to said electrostatic field actuator means. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification