Process for preparing an ink jet head
First Claim
1. A process for preparing an ink jet head having a support, an electrothermal transducer provided on the support and having a heat-generating resistor and a pair of electrodes electrically connected to the heat-generating resistor, a first upper layer provided on the electrothermal transducer, a second upper layer provided on the first upper layer and a liquid path communicated with a discharge opening for discharging liquid and formed on the support so as to correspond to the heat-generating resistor portion of the electrothermal transducer formed between the pair of electrodes, wherein the method comprises the steps of:
- forming the first upper layer using a bias sputtering method, wherein the absolute value of the bias voltage is 50 V or less and greater than 0 V; and
forming the second upper layer using the bias sputtering method, wherein the absolute value of the bias voltage is higher than 50 V.
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Accused Products
Abstract
A process for preparing an ink jet head having a support, an electrothermal transducer provided on the support and having a heat-generating resistor and a pair of electrodes electrically connected to the heat-generating resistor, a first upper layer provided. on the electrothermal transducer, a second upper layer provided on the first upper layer and a liquid path communicated with a discharge opening for discharging liquid and formed on the support so as to correspond to the heat-generating portion of the electrothermal transducer formed between the pair of electrodes comprises the steps of:
forming the first upper layer by the bias sputtering method at the absolute value of the bias voltage of 50 V or less and
forming the second upper layer by the bias sputtering method at the absolute value of the bias voltage higher than 50 V.
The upper layers may be made of a protective material. Suitable materials are metal oxides such as SiO2, TiO2, WO3 and Ta2 O5, and nitrides such as Si3 N4 and AlN.
28 Citations
16 Claims
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1. A process for preparing an ink jet head having a support, an electrothermal transducer provided on the support and having a heat-generating resistor and a pair of electrodes electrically connected to the heat-generating resistor, a first upper layer provided on the electrothermal transducer, a second upper layer provided on the first upper layer and a liquid path communicated with a discharge opening for discharging liquid and formed on the support so as to correspond to the heat-generating resistor portion of the electrothermal transducer formed between the pair of electrodes, wherein the method comprises the steps of:
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forming the first upper layer using a bias sputtering method, wherein the absolute value of the bias voltage is 50 V or less and greater than 0 V; and forming the second upper layer using the bias sputtering method, wherein the absolute value of the bias voltage is higher than 50 V. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A process for preparing a substrate for an ink jet head having a support, an electrothermal transducer provided on the support and having a heat-generating resistor and a pair of electrodes electrically connected to the heat-generating resistor, a first upper layer provided on the electrothermal transducer and a second upper layer provided on the first upper layer, wherein the method comprises the steps of:
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forming the first upper layer using a bias sputtering method, wherein the absolute value of the bias voltage is 50 V or less and greater than 0 V; and forming the second upper layer using the bias sputtering method, wherein the absolute value of the bias voltage is higher than 50 V. - View Dependent Claims (12, 13, 14, 15, 16)
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Specification