Method of manufacturing a plurality of uniform microfabricated sensing devices having an immobilized ligand receptor
First Claim
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1. A method of manufacturing a plurality of uniform microfabricated sensing devices which comprises:
- (a) establishing a plurality of base sensors on a suitable substrate wafer;
(b) establishing a permselective layer, superimposed over at least a portion of each base sensor, having a thickness sufficient to exclude substantially molecules with a molecular weight of about 120 or more while allowing the free permeation of molecules with a molecular weight of about 50 or less;
(c) establishing a photoresist layer comprising a photoformable proteinaceous mixture, superimposed over a substantial portion of said permselective layer; and
(d) establishing a topmost layer comprising a sufficient amount of an immobilized ligand receptor.
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Abstract
A plurality of uniform microfabricated sensing devices are produced by establishing a plurality of base sensors on a substrate wafer, forming over at least a portion of each base sensor a permselective layer, superimposing a photoformable proteinaceous photoresist layer over a substantial portion of the permselective layer, and forming a topmost layer of an immobilized ligand receptor. The ligand receptor and corresponding ligand may be immunoreactive species.
827 Citations
31 Claims
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1. A method of manufacturing a plurality of uniform microfabricated sensing devices which comprises:
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(a) establishing a plurality of base sensors on a suitable substrate wafer; (b) establishing a permselective layer, superimposed over at least a portion of each base sensor, having a thickness sufficient to exclude substantially molecules with a molecular weight of about 120 or more while allowing the free permeation of molecules with a molecular weight of about 50 or less; (c) establishing a photoresist layer comprising a photoformable proteinaceous mixture, superimposed over a substantial portion of said permselective layer; and (d) establishing a topmost layer comprising a sufficient amount of an immobilized ligand receptor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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Specification