Optical grating with interpolator having multiplying means to produce quadrature signals

• US 5,063,291 A
• Filed: 06/22/1990
• Issued: 11/05/1991
• Est. Priority Date: 06/23/1989
• Status: Expired due to Fees

• Current Assignee: Taylor Hobson Limited (Ametek Incorporated)
• Original Assignee: Rank Taylor Hobson Limited
• Inventors: Buehring, Ian K.
• Primary Examiner(s): Nelms, David C.
• Assistant Examiner(s): LE, QUE TAN
• Application Number:
  US07/542,707
• Time in Patent Office: 501 Days
• Field of Search: 250/231.16, 250/231.14, 250/237 G, 356/375, 356/374, 33/707
• US Class Current: 250/231.16
• CPC Class Codes: G01D 5/24404 Interpolation using high frequency signals

Abstract

An interpolator, particularly for use with an optical grating for detecting position in a metrological apparatus, receives input signals in quadrature. One of the input signals is squared and the two signals are multiplied together to provide further signals in quadrature at twice the frequency of the input signals. One of the further signals is also squared and the further signals are multiplied together to provide output signals at four times the frequency of the input signals. Filtering is provided to remove DC components, such as due to drift. In the illustrated metrological apparatus, the zero crossing points of the output signals are detected to effect sampling, with high resolution, of a surface sensor output. Interpolation noise occurs at a high frequency and is removed by low pass filtering of the sample signal from the surface sensor.

Claims

1. An interpolator for receiving quadrature input signals at a first frequency and producing quadrature output signals at a second frequency which is a multiple of the first frequency, comprising means for producing first and second signals at double said first frequency and substantially in quadrature if the input signals are in quadrature, said producing means comprising squaring means for squaring one only of said input signals to provide said first signal and multiplying means for multiplying said input signals together to provide the second signal.

2. An interpolator according to claim 1 wherein said squaring means uses the trigonometric identity sin² A=1/2-(cos 2A)/2.

3. An interpolator according to claim 1 wherein said squaring means uses the trigonometric identity cos² A=1/2+(cos 2A)/2.

4. An interpolator according to claim 1 wherein said multiplying means uses the trigonometric identity sinAcosA=(sin2A)/2.

5. An interpolator according to claim 1 comprising high pass filtering means for removing DC drift components.

6. An interpolator according to claim 5, wherein said high pass filtering means is arranged to filter said input signals prior to said squaring and said multiplication.

7. An interpolator according to claim 1 comprising further squaring means for squaring one of said first and further signals and second multiplying means for multiplying said first and second signals together, to provide output signals in quadrature at four times said first frequency.

8. An interpolator according to claim 7, comprising filtering means for high pass filtering said first and second signals, to remove DC components therefrom.

9. An interpolator according to claim 7 comprising means for amplifying said first and second signals, prior to said squaring and said multiplication applied to said first and second signals, to compensate for loss of gain relative to said input signals.

10. An interpolator according to claim 7, comprising means for high pass filtering said output signals to remove DC components therefrom.

11. An interpolator according to claim 1 comprising automatic gain control means for controlling the gain of said input signals.

12. An interpolator according to claim 1 in association with a zero-crossing detector which receives the signals output by the interpolator.

13. A movement detector comprising an optical grating, light sensor means for producing quadrature signals in response to relative movement between said grating and said light sensor means, and an interpolator for producing quadrature output signals at a frequency which is a multiple of the frequency of the signals produced by the light sensor means, said interpolator receiving quadrature input signals in accordance with the signals produced by the light sensor means and comprising means for producing first and second signals at double the frequency of said quadrature input signals and substantially in quadrature if the input signals are in quadrature, said producing means comprising squaring means for squaring one only of said input signals to provide said first signal and multiplying means for multiplying said input signals together to provide the second signal.

14. Metrological apparatus comprising a surface sensor, means for causing said sensor to traverse the surface of a workpiece, and sampling means for sampling the output of said surface sensor during said traversing, said sampling means comprising a position detector for producing first quadrature signals in response to said traversing, an interpolator for producing further quadrature signals at a frequency which is a multiple of the frequency of the first quadrature signals, and means to effect said sampling in response to a predetermined condition in each of said further quadrature signals, said interpolator receiving quadrature input signals in accordance with said first quadrature signals produced by said position detector, and comprising means for producing first and second signals at double the frequency of said quadrature input signals and substantially in quadrature if the input signals are in quadrature, said producing means comprising squaring means for squaring one only of said input signals to provide said first signal and multiplying means for multiplying said input signals together to provide the second signal.

15. Apparatus according to claim 14, wherein said position detector comprises an optical grating and light sensor means.

16. Apparatus according to claim 14 including means for low pass filtering signals derived from the sensor for removing interpolation noise.