Handling apparatus for transferring carriers and a method of transferring carriers

• US 5,064,337 A
• Filed: 07/12/1990
• Issued: 11/12/1991
• Est. Priority Date: 07/19/1988
• Status: Expired due to Fees

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Ohsawa, Tetsu, Asakawa, Teruo
• Primary Examiner(s): Bucci, David A.
• Application Number:
  US07/552,852
• Time in Patent Office: 488 Days
• Field of Search: 414/742, 414/331, 414/787, 414/785, 414/223, 414/225, 414/274-277, 414/279, 414/786, 414/281-283, 414/641, 414/639, 901/17, 901/35, 901/47, 901/49
• US Class Current: 414/639
• CPC Class Codes: H01L 21/67769 Storage means
• CPC Class Codes: Y10S 414/14 Wafer cassette transporting

Abstract

A handling apparatus, used for handling a carrier of semiconductor wafers, comprises a first mechanism for transferring a carrier between a loader/unloader table and a storage compartment, and a second mechanism, for moving the first mechanism in both vertical and horizontal directions. The first mechanism includes an arm, a loading portion for loading the carrier, and an arm-rocking mechanism. The second mechanism moves the first mechanism to the loader/unloader table, picks up the carrier, and then moves the first mechanism to the storage compartment, where the arm is rocked, so as to discharge the object from the loading portion.

Claims

1. A handling apparatus operable in a clean room, comprising:

transferring means for transferring a box-like carrier between a storage compartment and a loading/unloading stage in said clean room, said transferring means including an arm member which has a prongshaped loading portion by means of which said arm member picks up the box-like carrier and a main arm portion curved like a boomerang;

rocking means, provided in a portion which is lower than said prongshaped loading portion, for rocking said arm member; and

moving means for moving said transferring means to the loading/unloading stage, picking up the box-like carrier placed on the loading/unloading stage, moving the carrier so as to be overhead of the rocking means via said arm member, and moving said transferring means to the storage compartment where the arm member is rocked so as to discharge the carrier from the loading portion.

2. The handling apparatus according to claim 1, wherein said means for moving said means for transferring said carrier includes vertical and horizontal moving means.

3. The handling apparatus according to claim 1, wherein a contact preventive sensor and a sensor for confirming the presence of an object are attached to the loading portion.

4. The handling apparatus according to claim 1, wherein said loading portion is configured such that the arm member has a finger extending at right angles therefrom and said loading portion is capable of holding a picked-up object without allowing it to fall, even when the held position of the picked-up object is changed.

5. The handling apparatus according to claim 1, wherein said arm member is contoured so as to have a smooth aerofoil shape.

6. The handling apparatus according to claim 2, wherein said vertical moving means and said rocking means are contoured so as to have a streamlined shape.

7. The handling apparatus according to claim 1, wherein a direct driving mechanism is used as means for rocking said arm member.

8. The handling apparatus according to claim 1, wherein a wrapping connector driving mechanism is used as means for rocking said arm member.

9. The handling apparatus according to claim 2, wherein a ball screw and a nut are used as vertical moving means.

10. The handling apparatus according to claim 2, wherein a gear driving mechanism is used as horizontal driving means.

11. The handling apparatus according to claim 2, wherein a gear driving mechanism is used as vertical moving means.

12. The handling apparatus according to claim 2, wherein a linear guide mechanism is provided for the vertical moving means.

13. The handling apparatus according to claim 2, wherein a linear guide mechanism is provided for the horizontal moving means.

14. The handling apparatus according to claim 2, wherein a wrapping connector driving mechanism is provided for the horizontal moving means.

15. The handling apparatus according to claim 1, wherein said transferring means is mounted on a carriage.

16. The handling apparatus according to claim 1, wherein the transferring means is mounted on a carriage and said carriage is guided along a rail.

17. The apparatus according to claim 1, which comprises vertical movement means wherein said arm member comprises a pair of parallel arms connected at one end to said vertical movement means.

18. A method for transferring box-like carriers by use of a handling apparatus in a clean room, comprising:

means for transferring a box-like carrier between a storage compartment and a loading/unloading stage in said clean room, said means for transferring said carrier including an arm member which has a prongshaped loading portion by means of which said arm member picks up the box-like carrier and a main arm portion curved like a boomerang;

rocking means, provided in a portion which is lower than said prongshaped loading portion, for rocking said arm member; and

moving means for moving said transferring means to the loading/unloading stage, picking up the box-like carrier placed in the loading/unloading stage, moving the carrier so as to be overhead of the rocking means via said arm member, and moving said transferring means to the storage compartment where the arm member is rocked so as to discharge the carrier from the loading portion,

said method comprising the steps of;

picking up at least one of a plurality of box-like carriers placed on the loading/unloading stage and loading the picked-up carrier onto the loading portion of the means for transferring said carrier, bu use of the means for moving said means for transferring said carrier and rocking means;

moving the carrier from the loading/unloading stage to the storage compartment, bu use of the means for moving said means for transferring said carrier, while making the rocking means unswayable; and

discharging the picked-up carrier from the loading portion in the stage compartment, bu use of said means for moving said means for transferring said carrier and said rocking means.

19. The method of transferring carriers according to claim 18, wherein a single handling apparatus transfers two or more carriers at the same time.

20. The method according to claim 18, wherein while the box-like carrier is transferred by said means for transferring said carrier, an inclination of the carrier is changed in accordance with a direction of flow of clean air, so as to decrease air resistance to the carrier during the transfer thereof.