Waveguides, interferometers, and methods of their formation

• US 5,064,684 A
• Filed: 08/02/1989
• Issued: 11/12/1991
• Est. Priority Date: 08/02/1989
• Status: Expired due to Term

• Current Assignee: Eastman Kodak Company
• Original Assignee: Eastman Kodak Company
• Inventors: Agostinelli, John A., Mir, Jose M.
• Primary Examiner(s): Bell, Janyce
• Application Number:
  US07/388,450
• Time in Patent Office: 832 Days
• Field of Search: 427/53.1, 427/162, 427/273, 427/283, 427/75, 427/240, 427/380, 427/12, 427/48.1, 427/370, 427/287, 427/100, 427/126.6, 427/126.3, 427/271, 427/384, 427/343 , 427/419.1, 427/419.2
• US Class Current: 427/555
• CPC Class Codes: C03C 17/25 by deposition from the liquid phase
• CPC Class Codes: C03C 2217/23 Mixtures
• CPC Class Codes: C03C 2218/113 by sol-gel processes
• CPC Class Codes: C03C 2218/32 After-treatment
• CPC Class Codes: C04B 41/5025 with ceramic materials copper oxide or solid solutions thereof C04B41/5074
• CPC Class Codes: C04B 41/5041 Titanium oxide or titanates
• CPC Class Codes: C04B 41/52 Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
• CPC Class Codes: C04B 41/87 Ceramics
• CPC Class Codes: C04B 41/89 for obtaining at least two superposed coatings having different compositions
• CPC Class Codes: C23C 18/06 Coating on selected surface areas, e.g. using masks
• CPC Class Codes: C23C 18/1208 Oxides, e.g. ceramics
• CPC Class Codes: C23C 18/1295 with after-treatment of the deposited inorganic material
• CPC Class Codes: C23C 18/143 Radiation by light, e.g. photolysis or pyrolysis
• CPC Class Codes: G02F 1/0553 specially adapted for gating or modulating in optical waveguides
• CPC Class Codes: G02F 1/212 Mach-Zehnder type

Abstract

The invention generally is accomplished by a casting of a liquid metallo-organic ceramic precursor solution to form a layer on a substrate. This layer is then heated to a low temperature to create an amorphous layer. Then a selected area is heated to a high temperature by localized heating to create a patterned area of polycrystalline ceramic having electro-optic properties.

Claims

1. A method of forming a crystalline ceramic comprising casting a layer of metallo-organic ceramic precursor of electro-optic, ferroelectric or piezoelectric material onto a base and performing a localized heating of a portion of said layer with a heated imprinting tool to create a patterned area of crystalline ceramic.

2. The method of claim 1 wherein said layer is heated to create an amorphous substantially inorganic ceramic prior to said localized heating.

3. The method of claim 2 wherein said localized heating changes said portion of said amorphous ceramic to polycrystalline ceramic.

4. The method of claim 2 wherein said heating to create said amorphous ceramic is in a pattern.

5. The method of claim 6 wherein the layer portion not in the pattern of amorphous ceramic is removed and the said pattern of amorphous ceramic is subjected to heating to create said electro-optic polycrystalline ceramic.

6. The method of claim 7 wherein the removed non-pattern portion is removed by a solvent solution.

7. The method of claim 3 wherein prior to said heating of a portion a material which can reactively in-diffuse a lead specie to form a crystalline electro-optic material is coated onto said layer.

8. The method of claim 7 wherein during said heating of a portion, said electro-optic in-diffusion material combines with said layer to form electro-optic material.

9. The method of claim 2 wherein said amorphous ceramic forms an optical waveguide.

10. The method of claim 3 wherein said heating of a portion forms an electro-optic waveguide in a pattern.

11. The method of claim 1 wherein said polycrystalline ceramic consists essentially of one or a mixture of lanthanum modified lead zirconate titanate, lead zirconate titanate, lead lanthanum titanate, barium lanthanum titanium niobate, barium titanate, lithium niobate, or lithium tantalate.

12. The method of claim 1 wherein said base material is selected from the group consisting essentially of fused quartz, sapphire, magnesium oxide, and strontium titanate.

13. The method of claim 1 wherein said metallo-organic materials comprise metal carboxylates dissolved in a solvent.

14. The method of claim 1 wherein said casting comprises spin-coating.

15. The method of claim 1 wherein prior to casting of the layer of metallo-organic ceramic precursor a dielectric layer is formed on said base.

16. The method of claim 15 wherein said dielectric layer comprises silicon nitride.

17. The method of claim 15 wherein the material forming said dielectric layer is selected from the group consisting essentially of Si₃ N₄, SiO₂, Ta₂ O₃, ZrO₂, and mixtures thereof.

18. The method of claim 15 wherein said polycrystalline ceramic comprises lead zirconium titanate.

19. The method of claim 15 wherein said base comprises silicon or gallium arsenide.

20. The method of claim 15 wherein said base comprises a material selected from the group consisting of fused quartz, sapphire, magnesium oxide, and strontium titanate.

21. A method of forming a crystalline ceramic comprising casting a layer of metallo-organic ceramic precursor of electro-optic, ferroelectric or piezoelectric material onto a base, heating said layer of precursor to decompose said precursor to form an amorphous ceramic layer, partially overcoating the amorphous ceramic layer with a barrier layer thereby forming a diffusion mask and treating in a gaseous atmosphere of reactive lead containing vapor in-diffusion agent to create crystalline ceramic in areas not overcoated with said diffusion mask.

22. The method of claim 21 wherein said in-diffusion agent changes at least a portion of said amorphous ceramic to crystalline ceramic.

23. The method of claim 21 wherein said partial overcoating is in a pattern.

24. The method of claim 21 wherein the layer portion not coated with said barrier layer is removed after said treating in a gaseous atmosphere.

25. The method of claim 24 wherein the removed non-pattern portion is removed by a solvent solution.

26. The method of claim 22 wherein prior to said treating in a gaseous atmosphere a material which can reactively in-diffuse a lead specie to form a crystalline electro-optic material is coated onto said layer.

27. The method of claim 26 wherein during said treating in a gaseous atmosphere said in-diffusion material combines with said layer to form electro-optic material.

28. The method of claim 21 wherein said amorphous ceramic forms an optical waveguide.

29. The method of claim 22 wherein the vapor treatment of portion forms an electro-optic waveguide in a pattern.

30. The method of claim 21 wherein said crystalline ceramic consists essentially of one or a mixture of lanthanum modified lead zirconate titanate, lead zirconate titanate, lead lanthanum titanate, barium lanthanum titanium niobate, barium titanate, lithium niobate, or lithium tantalate.

31. The method of claim 21 wherein said base material is selected from the group consisting essentially of fused quartz, sapphire, magnesium oxide, and strontium titanate.

32. The method of claim 21 wherein said metallic-organo materials comprise metal carboxylates dissolved in a solvent.

33. The method of claim 21 wherein said casting comprises spin-coating.

34. The method of claim 21 wherein prior to casting of the layer of metallo-organic ceramic precursor a dielectric layer is formed on said base.

35. The method of claim 34 wherein said dielectric layer comprises silicon nitride.

36. The method of claim 34 wherein the material forming said dielectric layer is selected from the group consisting essentially of Si₃ N₄, SiO₂, Ta₂ O₃, ZrO₂, and mixtures thereof.

37. The method of claim 34 wherein said polycrystalline ceramic comprises lead zirconium titanate.

38. The method of claim 34 wherein said base comprises silicon or gallium arsenide.

39. A method of forming a crystalline ceramic comprising casting a layer of metallo-organic ceramic precursor of electro-optic, ferroelectric or piezoelectric material onto a base, heating said layer to create an amorphous substantially inorganic ceramic, depositing a pattern of areas of indiffusion material, and heating said amorphous layer and indiffusion material to create areas of electro-optic, ferroelectric, or piezoelectric crystalline ceramic in the pattern of said indiffusion materials.

40. The method of claim 39 wherein the removed non-pattern portion is removed by a solvent solution.

41. The method of claim 39 wherein said metallo-organic materials comprise metal carboxylates dissolved in a solvent.

42. The method of claim 39 wherein said casting comprises spin-coating.

43. The method of claim 39 wherein said crystalline ceramic consists essentially of one or a mixture of lanthanum modified lead zirconate titanate, lead zirconate titanate, lead lanthanum titanate, barium lanthanum titanium niobate, barium titanate, lithium niobate, or lithium tantalate.

44. The method of claim 39 wherein said base material is selected from the group consisting essentially of fused quartz, sapphire, magnesium oxide, and strontium titanate.

45. A method of forming a ceramic comprising casting a layer of metallo-organic ceramic precursor of electro-optic, ferroelectric or piezoelectric material onto a base, heating the precursor layer to form an amorphous layer, and then performing a localized patterned heating of a portion of said amorphous layer to create a patterned area of electro-optic waveguide or ferroelectric ceramic.

46. The method of claim 45 wherein said localized heating is accomplished with a laser.

47. The method of claim 45 wherein the localized heating is in a pattern.

48. The method of claim 45 wherein said crystalline ceramic consists essentially of one or a mixture of lanthanum modified lead zirconate titanate, lead zirconate titanate, lead lanthanum titanate, barium lanthanum titanium niobate, barium titanate, lithium niobate, or lithium tantalate.

49. The method of claim 48 wherein said base material is selected from the group consisting essentially of fused quartz, sapphire, magnesium oxide, and strontium titanate.

50. The method of claim 45 wherein said metallo-organic materials comprise metal carboxylates dissolved in a solvent.

51. The method of claim 45 wherein said casting comprises spin-coating.