Trimming resistor element for microelectronic circuit
First Claim
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1. A trimming resistor element comprising:
- a substrate having an electrically insulative main surface;
a high-resistance film of a first resistivity formed on the main surface of said substrate; and
a low-resistance region formed in said high-resistance film and having a second resistivity, lower than the first resistivity, which is cut off in order to trim the resistance of said trimming resistor element.
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Abstract
A trimming resistor element includes a high-resistance film of high resistivity formed on an insulation film on the main surface of a substrate, and a low-resistance region which is formed by selectively subjecting the high-resistance film to a predetermined process so as to lower the resistivity thereof. A resultant resistance of the low-resistance region and the high-resistance film can be adjusted by selectively cutting off part of the low-resistance region.
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Citations
13 Claims
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1. A trimming resistor element comprising:
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a substrate having an electrically insulative main surface; a high-resistance film of a first resistivity formed on the main surface of said substrate; and a low-resistance region formed in said high-resistance film and having a second resistivity, lower than the first resistivity, which is cut off in order to trim the resistance of said trimming resistor element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A trimming resistor element comprising:
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a substrate; a high-resistance film formed on an insulation film on a main surface of said substrate; and a low-resistance region including two opposed portions formed in said high-resistance film, and having at least one resistor bridge element which is provided between the two opposed portions which is cut to trim the resistance of the trimming resistor element.
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Specification