Reference electrode, ion sensor and method of manufacturing the same
First Claim
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1. A reference electrode comprising:
- an electrically conductive substrate;
a first film made up of at least two layers provided on a surface of said substrate and including a silver halide layer and a hydrophobic resin layer; and
a second film made up of at least two layers provided on a surface of said first film and including a hydrophobic resin layer and a salt layer.
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Abstract
A reference electrode for generating a reference potential on an ion sensor is disclosed. The reference electrode has a lamination film covering a surface of an electrically conductive substrate and formed by alternately laminating silver halide thin films and hydrophobic resin thin films.
29 Citations
18 Claims
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1. A reference electrode comprising:
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an electrically conductive substrate; a first film made up of at least two layers provided on a surface of said substrate and including a silver halide layer and a hydrophobic resin layer; and a second film made up of at least two layers provided on a surface of said first film and including a hydrophobic resin layer and a salt layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 11, 12)
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8. A reference electrode comprising:
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an electrically conductive substrate; a lamination layer provided on a surface of the substrate and formed by alternately laminating silver halide layers and hydrophobic resin layers; and a mixture film provided on a surface of said lamination layer and consisting of a mixture of silver halide, a halide salt and a hydrophobic resin.
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- 9. A reference electrode comprising an electrically conductive substrate and a lamination film provided on a surface of said substrate and formed by alternately laminating halide salt layers containing an oxidizer and hydrophobic resin layers.
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13. A reference electrode comprising an electrically insulating substrate and a lamination film including a silver halide layer formed by a deposition process on said substrate and a hydrophobic resin layer formed by a neutral beam sputtering process on said silver halide layer.
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14. A reference electrode comprising a gate insulation film of a field-effect transistor and a lamination film including a silver halide layer formed by a neutral beam sputtering process on a surface of said gate insulation film and a hydrophobic resin layer formed by a neutral beam sputtering process on said silver halide layer.
- 15. A method of manufacturing a reference electrode comprising a step of forming targets of silver halide and a hydrophobic resin on a predetermined substrate surface and a step of sputtering said targets by projecting a neutral beam onto said halide and hydrophobic resin alternately, thereby forming a lamination film consisting of a silver halide layer and a hydrophobic resin layer on the substrate surface.
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17. A reference electrode comprising:
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an electrically conductive substrate; a first film made up of at least two layers provided on a surface of a gate insulation film of a field-effect transistor and including a silver halide layer and a hydrophobic resin layer; and a second film made up of at least two layers provided on a surface of said first layer and including a hydrophobic resin layer and a salt layer.
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18. A reference electrode comprising:
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an electrically conductive substrate; a first film made up of at least two layers formed via a film layer of silver on a surface of a gate insulation film of a field-effect transistor and including a silver halide layer and a hydrophobic resin layer; and a second film provided on a surface of said first film and including a hydrophobic resin layer and a salt layer.
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Specification