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Stacked and cross-connected recirculating fans in a semiconductor manufacturing cleanroom

  • US 5,069,113 A
  • Filed: 06/04/1990
  • Issued: 12/03/1991
  • Est. Priority Date: 06/04/1990
  • Status: Expired due to Term
First Claim
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1. An apparatus for moving a gas comprising:

  • a) a first fan and a second fan;

    b) a first fan chamber housing the first fan and a second fan chamber housing the second fan, the fan chambers being stacked vertically;

    c) an intake and an outlet connected to the first fan chamber and an intake and an outlet connected to the second fan chamber;

    d) means for preventing the backflow of the gas back through the first and second fan outlets; and

    e) means for controlling the flow of gas between the first and second fan outlets such that the gas moving apparatus can be set to any of the three following conditions as desired;

         1) the gas flows from the first fan outlet to the second fan outlet, thereby allowing the first fan to supply the gas to both the first fan outlet and the second fan outlet;

         2) the gas flows from the second fan outlet to the first fan outlet, thereby allowing the second fan to supply the gas to both the second fan outlet and the first fan outlet;

         3) gas flow between the first fan outlet and the second fan outlet is prevented.wherein the apparatus, when in an operation in which one fan is supplying the gas normally supplied by the other fan, has means for allowing the fan supplying the gas normally supplied by the other fan to output a total quantity of gas approximately equal to that which would be output when the gas moving apparatus is in an operational mode in which both fans are supplying gas.

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