Stacked and cross-connected recirculating fans in a semiconductor manufacturing cleanroom

• US 5,069,113 A
• Filed: 06/04/1990
• Issued: 12/03/1991
• Est. Priority Date: 06/04/1990
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Mattson, Brian J., Edwards, Chester N.
• Primary Examiner(s): Wayner, William E.
• Application Number:
  US07/533,195
• Time in Patent Office: 547 Days
• Field of Search: 98/33.1, 98/39.1, 98/34.6, 417/3, 417/423.5
• US Class Current: 454/252
• CPC Class Codes: F04D 25/166 using fans
• CPC Class Codes: F24F 3/167 Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed air distribution by perforated walls F24F7/10

Abstract

A pair of recirculating fans for semiconductor cleanroom use are stacked to allow each fan to service a smaller zone in the cleanroom than if the fans were placed side by side. Each fan controls the temperature, humidity, and particulate count for its own zone of the cleanroom, thereby allowing strict control of these parameters. The ductwork of the two fans are cross connected so that either fan can be maintained or repaired while the other fan services its own zone and the zone normally serviced by the off-line fan.

Claims

1. An apparatus for moving a gas comprising:

a) a first fan and a second fan;

b) a first fan chamber housing the first fan and a second fan chamber housing the second fan, the fan chambers being stacked vertically;

c) an intake and an outlet connected to the first fan chamber and an intake and an outlet connected to the second fan chamber;

d) means for preventing the backflow of the gas back through the first and second fan outlets; and

e) means for controlling the flow of gas between the first and second fan outlets such that the gas moving apparatus can be set to any of the three following conditions as desired;

     1) the gas flows from the first fan outlet to the second fan outlet, thereby allowing the first fan to supply the gas to both the first fan outlet and the second fan outlet;

     2) the gas flows from the second fan outlet to the first fan outlet, thereby allowing the second fan to supply the gas to both the second fan outlet and the first fan outlet;

     3) gas flow between the first fan outlet and the second fan outlet is prevented.

wherein the apparatus, when in an operation in which one fan is supplying the gas normally supplied by the other fan, has means for allowing the fan supplying the gas normally supplied by the other fan to output a total quantity of gas approximately equal to that which would be output when the gas moving apparatus is in an operational mode in which both fans are supplying gas.

2. An apparatus according to claim 1 wherein:

the means for allowing the operational fan to supply a quantity of gas approximately equal to that which would be supplied when the gas moving apparatus is in an operation mode where each fan is supplying gas comprises a circular wedge-shaped disk, a mount for the disk such that when the disk rests against the mount an essentially airtight seal is achieved and as the distance from the disk to the mount increases the more gas is able to pass between the disk and the mount, and means for increasing and decreasing the distance between the disk and the mount; and

the means for increasing and decreasing the distance between the disk and the mount permits control of the amount of gas allowed to pass between the disk and the mount, and further permits the stoppage of the flow of gas passing between the disk and the mount.

3. An apparatus according to claim 2 wherein:

the means for increasing and decreasing the distance between the disk and the mount includes a spindle whereon the disk is solidly mounted and means for moving the spindle such that when the spindle is moved the disk also moves.

4. An apparatus according to claim 2 wherein:

the means for increasing and decreasing the distance between the disk and the mount includes a spindle and means for attaching the disk to the spindle such that the disk can slide back and forth along the spindle such that when the disk is moved along the spindle, the distance between the disk and the mount changes.

5. An apparatus according to claim 1 wherein:

the means for allowing the operational fan to supply a quantity of gas approximately equal to that which would be supplied when the gas moving apparatus is in an operation mode where each fan is supplying gas comprises means for increasing the speed of the operating fan thereby approximately doubling the amount of gas output.

6. An apparatus according to claim 1 further comprising:

means for independently conditioning the gas moved by each fan with respect to the temperature, with respect to the humidity, with respect to the particulate count, or with respect to any combination of temperature, humidity, or particulate count between the point where the gas first enters the fan chamber and the point that the gas leaves the outlet.

7. Air handler for supplying air to an environment in which positive exchange on a substantially continuous basis is required, and in which plural air supply fan are provided for supplying air to plural areas within the environment, wherein the air handler includes:

a) a first fan and a second fan;

b) a first fan chamber housing the first fan and a second fan chamber housing the second fan, the fan chambers being stacked vertically;

c) an intake and an outlet connected to the first fan chamber and an intake and an outlet connected to the second fan chamber;

d) means for preventing the backflow of the air back through the first and second fan outlets; and

e) means for controlling the flow of air between the first fan outlet and the second fan outlet such that the air handler can be set to any of the three following conditions as desired;

     1) the air flows from the first fan outlet to the second fan outlet, thereby allowing the first fan to supply the air to both the first fan outlet and the second fan outlet;

     2) the air flows from the second fan outlet to the first fan outlet, thereby allowing the second fan to supply the air to both the second fan outlet and the first fan outlet;

     3) air flow between the first fan outlet and the second fan outlet is prevented,

wherein the apparatus, when in an operation in which one fan is supplying the air normally supplied by the other fan, has means for allowing the fan supplying the air normally supplied by the other fan to output a total quantity of air approximately equal to that which would be output when the air moving apparatus is in an operational mode in which both fans are supplying air.

8. An apparatus according to claim 7 including:

the means for allowing the operational fan to supply a quantity of air approximately equal to that which would be supplied when the air handler is in an operation mode where each fan is supplying air comprises a circular wedge-shaped disk, a mount for the disk such that when the disk rests against the mount an essentially airtight seal is achieved and as the distance from the disk to the mount increases the more air is able to pass between the disk and the mount, and means for increasing and decreasing the distance between the disk and the mount; and

the means for increasing and decreasing the distance between the disk and the mount permits control of the amount of air allowed to pass between the disk and the mount, and further permits the stoppage of the flow of air passing between the disk and the mount.

9. An apparatus according to claim 8 wherein:

the means for increasing and decreasing the distance between the disk and the mount includes a spindle whereon the disk is solidly mounted and means for moving the spindle such that when the spindle is moved the disk also moves.

10. An apparatus according to claim 8 wherein:

the means for increasing and decreasing the distance between the disk and the mount includes a spindle and means for attaching the disk to the spindle such that the disk can slide back and forth along the spindle such that when the disk is moved along the spindle, the distance between the disk and the mount changes.

11. An apparatus according to claim 7 wherein:

the means for allowing the operational fan to supply a quantity of air approximately equal to that which would be supplied when the air moving apparatus is in an operation mode where each fan is supplying air comprises means for increasing the speed of the operating fan thereby approximately doubling the amount of air output.

12. An apparatus according to claim 7 further including:

means for independently conditioning the air moved by each fan with respect to the temperature, with respect to the humidity, with respect to the particulate count, or with respect to any combination of temperature, humidity, or particulate count between the point where the air first enters the fan chamber and the point that the air leaves the outlet.

13. Classroom air handler for supplying air on a substantially continuous basis is required, wherein the air handler includes:

a) a first fan and a second fan;

b) a first fan chamber housing the first fan and a second fan chamber housing the second fan, the fan chambers being stacked vertically;

c) an intake and an outlet connected to the first fan chamber and an intake and an outlet connected to the second fan chamber;

d) means for preventing the backflow of the air back through the first fan outlet, and means for preventing the backflow of the air back through the second fan outlet; and

e) means for controlling the flow of air between the first fan outlet and the second fan outlet such that the air handler can be set to any of the three following conditions as desired;

     1) the air flows from the first fan outlet to the second fan outlet, thereby allowing the first fan to supply the air to both the first fan outlet and the second fan outlet;

     2) the air flows from the second fan outlet to the first fan outlet, thereby allowing the second fan to supply the air to both the second fan outlet and the first fan outlet;

     3) air flow between the first fan outlet and the second fan outlet is prevented.

wherein the apparatus, when in an operation in which one fan is supplying the air normally supplied by the other fan, has means for allowing the fan supplying the air normally supplied by the other fan to output a total quantity of air approximately equal to that which would be output when the air moving apparatus is in an operational mode in which both fans are supplying air.

14. An apparatus according to claim 13 wherein:

the means for allowing the operational fan to supply a quantity of air approximately equal to that which would be supplied when the air handler is in an operation mode where each fan is supplying air comprises a circular wedge-shaped disk, a mount for the disk such that when the disk rests against the mount an essentially airtight seal is achieved and as the distance from the disk to the mount increases the more air is able to pass between the disk and the mount, and means for increasing and decreasing the distance between the disk and the mount; and

the means for increasing and decreasing the distance between the disk and the mount permits control of the amount of air allowed to pass between the disk and the mount, and further permits the stoppage of the flow of air passing between the disk and the mount.

15. An apparatus according to claim 14 wherein:

the means for increasing and decreasing the distance between the disk and the mount includes a spindle whereon the disk is solidly mounted and means for moving the spindle such that when the spindle is moved the disk also moves.

16. An apparatus according to claim 14 wherein:

the means for increasing and decreasing the distance between the disk and the mount includes a spindle and means for attaching the disk to the spindle such that the disk can slide back and forth along the spindle such that when the disk is moved along the spindle, the distance between the disk and the mount changes.

17. An apparatus according to claim 13 wherein:

the means for allowing the operational fan to supply a quantity of air approximately equal to that which would be supplied when the air moving apparatus is in an operation mode where each fan is supplying air comprises means for increasing the speed of the operating fan thereby approximately doubling the amount of air output.

18. An apparatus according to claim 13 further including:

means for independently conditioning the air moved by each fan with respect to the temperature, with respect to the humidity, with respect to the particulate count, or with respect to any combination of temperature, humidity, or particulate count between the point where the air first enters the fan chamber and the point that the air leaves the outlet.