Pattern recognition device

• US 5,073,952 A
• Filed: 09/07/1988
• Issued: 12/17/1991
• Est. Priority Date: 09/07/1988
• Status: Expired due to Fees

• Current Assignee: Sigmax KK (EXEO Group, Inc.)
• Original Assignee: Sigmax KK (EXEO Group, Inc.)
• Inventors: Watanabe, Masaharu
• Primary Examiner(s): Razavi, Michael
• Assistant Examiner(s): COUSO, YON JUNG
• Application Number:
  US07/241,177
• Time in Patent Office: 1,196 Days
• Field of Search: 382/8, 382/34, 382/30, 382/33, 358/106
• US Class Current: 382/152
• CPC Class Codes: G01N 2021/95615 with stored comparision signal
• CPC Class Codes: G01N 21/88 Investigating the presence of flaws or contamination
• CPC Class Codes: G01N 21/95607 using a comparative method
• CPC Class Codes: G06T 2207/30141 Printed circuit board [PCB]
• CPC Class Codes: G06T 7/001 using an image reference approach

Abstract

Data which represents a border line of a region of a video image to be observed and which contains a large luminance difference compared with that of a defect to be detected is excluded in judgement when it belongs to a predetermined region so that it is possible to detect a minute defect or defects reliably even when a position of a workpiece is displaced from that of a master or when the border line of the workpiece is not coincident with that of the master due to a difference in size therebetween.

Claims

1. A defect recognition device for a video image region of a workpiece, comprising:

means for obtaining first video image data corresponding to said video image region of said workpiece;

means for obtaining second video image data of a master which corresponds to said video image region;

means for comparing said first video image data with said second video image data, including;

means for shifting an original video image represented by the second video image data in predetermined directions by a predetermined distance to produce a plurality of shifted images,

means for forming overlap image data representing an overlap image formed by overlapping said original image with said shifted images, and

means for forming difference image data by computing the difference between said overlap image data and said original image data;

means for excluding from the output of said comparing means image data portions of said first and said second video image data corresponding to border regions of said first and second video image data, said excluding means comprising means for producing image data including data corresponding to a region to be excluded and a region to be observed by comparing said difference image data with a predetermined threshold value, said excluding means excluding portions of said first and second image data corresponding to said data of said region to be excluded from an output of said producing means; and

judging means responsive to an output of said excluding means for judging whether said workpiece includes one or more defects.

2. The defect recognition device as claimed in claim 1, wherein said border regions between said video image monitor region and said region outside of said video image monitor region correspond to edges of said workpiece.

3. The defect recognition device as claimed in claim 1, wherein said judging means judges a coincidence of said first video image data with said second video image data when luminances of respective pixels of said first and said second video image data are equal to each other and said pixels are not within said region to be excluded but are within said region to be observed.

4. The defect recognition device as claimed in claim 3, wherein said border regions between said video image monitor region and said region outside of said video image monitor region correspond to edges of said workpiece.