Capacitive humidity sensor construction and method for manufacturing the sensor

• US 5,075,816 A
• Filed: 07/18/1990
• Issued: 12/24/1991
• Est. Priority Date: 08/11/1989
• Status: Expired due to Term

• Current Assignee: Vaisala OY
• Original Assignee: Vaisala OY
• Inventors: Stormbom, Lars
• Primary Examiner(s): GRIFFIN, DONALD
• Application Number:
  US07/553,596
• Time in Patent Office: 524 Days
• Field of Search: 29/25.42, 427/79, 361/286, 73/336.5
• US Class Current: 361/286
• CPC Class Codes: G01N 27/225 by using hygroscopic materials
• CPC Class Codes: Y10T 29/435 Solid dielectric type

Abstract

The invention concerns a capacitive humidity sensor (6) capable of being connected to a measurement device of dielectric factor and a method for producing the sensor. The sensor comprises a dielectric layer (3), whose dielectric factor changes according to the moisture content absorbed in the layer, and at least two galvanically isolated conductive layers (2,1) enclosing the dielectric layer (3), where one of the conductive layers (2) of the capacitor construction is provided with a random pattern of clefts (7), which allow an immediate communication of ambient air with the dielectric layer (3). According to the invention, the dielectric layer (3) has a solid structure without cracks corresponding to the clefts (7) of the conductive layer (2). The construction according to the invention offers a reduction of the capillary effect and associated hysteresis up to a complete elimination of the effect in some embodiments of the invention.

Claims

1. A capacitive humidity sensor capable of being connected to a measurement device of dielectric factor, said sensor comprising:

a dielectric layer, whose dielectric factor changes in proportion to the moisture content absorbed in the layer; and

at least two galvanically isolated conductive layers enclosing the dielectric layer, whereby one of the conductive layers of the capacitor construction is provided with a random pattern of clefts, which allow immediate communication of ambient air with the dielectric layer,

the dielectric layer having a solid structure without cracks corresponding to the clefts of the conductive layer.

2. The humidity sensor in accordance with claim 1, wherein the conductive layer with the clefts is covered by a second and dielectric layer which is capable of allowing water vapour to diffuse into the first dielectric layer.

3. The humidity sensor in accordance with claim 2, wherein the second dielectric layer is firmly adhered both to the conductive electrode layer with the clefts and the first dielectric layer.

6. The method in accordance with claim 1, 2, 3, 4 or 5 wherein the dielectric layer is produced from a plastic material.

8. The method in accordance with claim 1, 2, 3, 4 or 5 wherein the dielectric layer is held in a plasticized state with the help of elevated temperature, whereby the sensor is kept at a temperature above the glass transition temperature T_g or the melting temperature, e.g., 180°

C. during the processing of the second conductive electrode.

4. A method for manufacturing a capacitive humidity sensor, comprising the steps of:

producing a first conductive electrode on an insulating substrate;

producing a dielectric layer on the first conductive electrode; and

forming a second conductive electrode on the dielectric layer from such material with a high resistance to wear that contracts under internal stresses when produced as a thin layer and forms clefts in the second conductive layer,

the second conductive electrode being produced on the dielectric layer while the dielectric layer is still in a plasticized state, whereby the clefts formed on the second conductive layer are prevented from extending into the dielectric layer.

5. The method in accordance with claim 4, wherein the second electrode with the clefts is produced by vacuum evaporation onto the plasticized dielectric layer.

7. The method in accordance with claim 4 or 5, wherein the dielectric layer is held in a plasticized state by means of a slowly evaporating solvent such as NMP for instance.