Superconducting ceramic circuits and manufacturing method for the same

• US 5,079,222 A
• Filed: 08/26/1988
• Issued: 01/07/1992
• Est. Priority Date: 08/31/1987
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Company Limited HASE 983 Atsugi-Shi Kanagawa-Ken Japan
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei
• Primary Examiner(s): Ryan, Patrick J.
• Application Number:
  US07/236,925
• Time in Patent Office: 1,229 Days
• Field of Search: 505/1, 505/701.4, 428/209, 428/210, 428/426, 428/432, 428/433, 428/688, 428/901, 428/930, 174/68.5, 361/397
• US Class Current: 505/211
• CPC Class Codes: H01F 41/048 Superconductive coils
• CPC Class Codes: H01F 6/06 Coils, e.g. winding, insulating, terminating or casing arrangements therefor
• CPC Class Codes: H10N 60/203 comprising high-Tc ceramic materials
• CPC Class Codes: Y10S 428/901 Printed circuit
• CPC Class Codes: Y10S 428/93 Electric superconducting
• CPC Class Codes: Y10S 505/701 Coated or thin film device, i.e. active or passive
• CPC Class Codes: Y10S 505/702 Josephson junction present
• CPC Class Codes: Y10S 505/703 Microelectronic device with superconducting conduction line
• CPC Class Codes: Y10S 505/704 Wire, fiber, or cable
• CPC Class Codes: Y10T 428/24917 including metal layer
• CPC Class Codes: Y10T 428/24926 including ceramic, glass, porcelain or quartz layer

Abstract

A superconducting pattern formed from a superconducting ceramic film is illustrated. The pattern is made in the form of a coil which is embeded in an insulating ceramic film. The insulating film is made of a ceramic material whose termal expansion coefficient is approximately equal to that of the coil.

Claims

1. A multilayered circuit comprising:

a lower superconducting pattern made of a superconducting ceramic material formed on a substrate;

an intervening insulating ceramic film for electrical isolation formed on said lower superconducting pattern; and

an upper superconducting pattern made of a superconducting ceramic material electrically isolated from said lower superconducting pattern by said insulating ceramic film wherein the thermal expansion coefficient of the substrate is ±

50% that of the superconducting ceramic materials of the lower and upper superconducting patterns.

2. The circuit of claim 1 wherein said lower and upper superconducting patterns are interconnected through an opening formed in said insulating ceramic film.

3. The circuit of claim 1 wherein said lower and/or upper superconducting pattern is a coil.

4. The circuit of claim 3 wherein said lower and upper patterns are coils which are respectively coupled to form a multilayered coil wherein the lower coil turns in a first turning direction from a first end thereof to a second end and the upper coil turns in a second turning direction from a first end thereof to a second end, and wherein said first and second turning directions are opposite one another.

5. The circuit of claim 1 wherein said lower pattern is formed on an insulating ceramic substrate.

6. The circuit of claim 1 wherein said patterns are spirals formed on a disk.

7. The circuit of claim 1 wherein said patterns are helices on a cylindrical surface.

8. The circuit of claim 1 wherein said insulating ceramic film is made of an oxide ceramic material conforming to the stoichiometric formula [(A'"'"'_p A"_1-p)_1-x (B'"'"'_q B"_1-q)_X ]_y (Cu_r X_1-r)_Z O_W, where A'"'"' is one or more elements of Group IIIa of the Priodic Table, e.g., the rare earth elements or lantanoides, B'"'"' is one or more alkaline earth metals, i.e. Ba, Sr and Ca, A", B" and X are selected from a group consisting of Mg, Be, Al, Fe, Co, Ni, Cr, Ti, Mn and Zr, and X=0-1;

Y=2.0-4.0;

Z=1.0-4.0; and

W=4.0-10.0, and the numbers p, q and r are chosen so that the total proportion of A", B" and X is 1-20 vol %, and

wherein said superconducting ceramic pattern is made of materials conforming to the stoichiometric formula, (A_1-X B_X)_Y Cu_Z O_W, where A is one or more elements of Group IIIa of the Priodic Table, e.g., the rare earth elements or lantanoides, B is one or more alkaline earth metals, i.e. Ba, Sr and Ca, and X=0-1;

Y=2.0-4.0;

Z=1.0-4.0; and

W=4.0-10.0.

10. The multilayered circuit of claim 1, wherein superconducting ceramic materials for the upper and lower superconducting patterns comprise materials represented by the formula (A_1-x B_x)_y Cu_z O_w, wherein A is one or more elements of Group IIIa of the Periodic Table, B is one or more alkaline earth metals, x=0-1, y=2.0-4.0 z=1.0-4.0 and w=4.0-10.0.

11. The multilayered circuit of claim 10, wherein z=1.5-3.5, y=2.5-3.5 and w=6.0-8.0, and wherein B comprises at least one of Ba, Sr and Ca.

12. The multilayered circuit of claim 1, wherein superconducting ceramic materials for the upper and lower superconducting patterns comprises materials represented by the formula (A_1-x B_x)_y Cu_z O_w, wherein A is one or more elements of Group Vb of the Periodic Table, B is one or more elements of Group IIa of the Periodic Table, x=0.3-1, y=2.0-4.0 z=1.0-4.0 and w=4.0-10.0.

13. The multilayered circuit of claim 12, wherein A comprises at least one of B, Sb and As, z=1.5-3.5 y=2.5-3.5, and w=6.0-8.0.

14. The multilayered circuit of claim 1, wherein superconducting materials for the upper and lower superconducting patterns comprise at least one of BiSrCaCu₂ O_x, Bi₄ Sr₃ Ca₃ Cu₄ O_x, Bi₄ Sr₄ Ca₂ Cu₄ Ox and Bi₂ Sr₃ Ca₂ Cu₂ O_x.

9. A multi-layered coil where each layer comprises a copper-oxide superconducting ceramic and where each layer is electrically isolated from adjacent layers by a copper-oxide non-superconducting ceramic layer interposed between said adjacent layers.

15. The multilayered coil of claim 9, wherein the copper-oxide superconducting ceramic comprises materials represented by the formula (A_1-x B_x)_y Cu_z O_w, wherein A is one or more elements of Group IIIa of the Periodic Table, B is one or more alkaline earth metals, x=0-1, y=2.0-4.0 z=1.0-4.0 and w=4.0-10.0.

16. The multilayered coil of claim 9, wherein the copper-oxide superconducting ceramic comprises materials represented by the formula (A_1-x B_x)_y Cu_z O_w, wherein A is one or more elements of Group Vb of the Periodic Table, B is one or more elements of Group IIa, x=0.3-1, y=2.0-4.0, z=1.0-4.0 and w=4.0-10.0.