Organic thin film semiconductor device

• US 5,079,595 A
• Filed: 10/30/1989
• Issued: 01/07/1992
• Est. Priority Date: 11/02/1988
• Status: Expired due to Fees

• Current Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Original Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Inventors: Suzuki, Shoji, Saeki, Hideo
• Primary Examiner(s): Hille, Rolf
• Assistant Examiner(s): SAADAT, MAHSHID D
• Application Number:
  US07/428,552
• Time in Patent Office: 799 Days
• Field of Search: 437/1, 437/225, 357/25, 357/8, 350/357
• US Class Current: 257/40
• CPC Class Codes: B05D 1/202 Langmuir Blodgett films (LB films)
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C30B 29/54 Organic compounds
• CPC Class Codes: C30B 29/58 Macromolecular compounds
• CPC Class Codes: C30B 7/00 Single-crystal growth from solutions using solvents which are liquid at normal temperature, e.g. aqueous solutions from molten solvents C30B9/00; by normal or gradient freezing C30B11/00; under a protective fluid C30B27/00
• CPC Class Codes: G01N 27/126 comprising organic polymers
• CPC Class Codes: H10K 10/00 Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers integrated devices or assemblies of multiple devices H10K19/00
• CPC Class Codes: H10K 10/40 Organic transistors
• CPC Class Codes: H10K 10/46 Field-effect transistors, e.g. organic thin-film transistors [OTFT] H10K10/43 takes precedence
• CPC Class Codes: H10K 30/00 Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation integrated devices or assemblies of multiple devices H10K39/00, H10K65/00; electrolytic light-sensitive devices H01G9/20
• CPC Class Codes: H10K 71/10 Deposition of organic active material
• CPC Class Codes: H10K 85/311 Phthalocyanine
• CPC Class Codes: H10K 85/701 Langmuir Blodgett films
• CPC Class Codes: Y02E 10/549 Organic PV cells

Abstract

A method for manufacturing an organic semiconductor thin film (24) having an improved characteristic as a semiconductor is provided. A phthalocyanine compound having amino groups is mixed with stearic acid to form a bonded substance capable of being dissolved in an organic solvent. Then, an organic solution is made by dissolving this bonded substance in the organic solvent. By developing this organic solution on a water (20) surface, the thin layer (23) of this bonded substance is formed on the water (20) surface. Thereafter, this thin layer is moved onto a substrate (30) and accumulated to be deposited on the substrate (30). Next, the stearic acid is volatilized and removed from the above described thin film (23) deposited on the substrate (30) by baking the whole substrate. The thus structured organic semiconductor thin film (24) is used as a semiconductor material such as a photoelectric transfer device, a gas sensor, a transistor and the like.

Claims

1. A semiconductor device comprising an organic semiconductor thin film formed by a method including the steps of:

preparing an organic semiconductor compound including an amino group;

preparing a long chain hydrocarbon including a carboxyl group which can be bonded to said amino group;

bonding said organic semiconductor compound including said amino group to said long chain hydrocarbon including said carboxyl group for making said semiconductor compound to be dissolved in an organic solvent;

making an organic solution by dissolving said organic semiconductor compound combined with said long chain hydrocarbon in said organic solvent;

dropping said organic solution in an appropriate liquid for forming a layer of said organic solution on the surface of said liquid;

removing said organic solvent from said layer of said organic solution for forming a layer of the combination of said organic semiconductor compound and said long chain hydrocarbon on the surface of the liquid;

depositing said layer of the combination of said organic semiconductor compound and said long chain hydrocarbon on the surface of a substrate; and

removing said long chain hydrocarbon from the layer of said combination for forming an organic semiconductor thin film consisting of said organic semiconductor compound including the amino group on the surface of said substrate.

2. A semiconductor device in accordance with claim 1 having a photoelectric transfer function.

3. A semiconductor device in accordance with claim 1 having the function of detecting a gas.

4. A semiconductor device in accordance with claim 1 having a switching function.

5. A semiconductor device comprising a semiconductor thin film formed by a method including the steps of:

preparing an organic semiconductor compound having a carboxyl group;

preparing a long chain hydrocarbon compound having an amino group which can be bonded to said carboxyl group;

bonding said long chain hydrocarbon compound having said amino group to said organic semiconductor compound having said carboxyl group for making said organic semiconductor compound to be dissolved in an organic solvent;

making an organic solution by dissolving said organic semiconductor compound combined with said long chain hydrocarbon in said organic solvent;

dropping said organic solution in an appropriate liquid for forming a layer of the organic solution on the surface of the liquid;

removing said organic solvent from said layer of said organic solution for forming a layer of the combination of said organic semiconductor compound and said long chain hydrocarbon on the surface of said liquid;

depositing said layer of the combination of said organic semiconductor compound and said long chain hydrocarbon on a substrate; and

removing said long chain hydrocarbon from said layer of said combination for forming an organic semiconductor film consisting of said organic semiconductor compound including the carboxyl group on the surface of said substrate.

6. A semiconductor device comprising a semiconductor thin film formed by a method including the steps of:

preparing an organic semiconductor compound including a carboxyl group;

preparing a long chain hydrocarbon compound having a hydroxyl group which can be bonded to said carboxyl group by a dehydration reaction;

bonding said organic semiconductor compound to said long chain hydrocarbon compound by esterification, for making said organic semiconductor compound to be dissolved in an organic solvent;

making an organic solution by dissolving the ester of said long chain hydrocarbon compound and said organic semiconductor compound in said organic solvent;

dropping said organic solution in an appropriate liquid for forming a layer of said organic solution on the surface of the liquid;

removing said organic solvent from said organic solution for forming a layer of the ester of said organic semiconductor compound and said long chain hydrocarbon on the surface of said liquid;

depositing the layer of the ester of said organic semiconductor compound and said long chain hydrocarbon compound on a substrate; and

removing said long chain hydrocarbon from the layer of said ester for forming an organic semiconductor thin film consisting of said organic semiconductor compound including said carboxyl group on said substrate.

7. A semiconductor device comprising an organic semiconductor thin film formed of an organic semiconductor compound selected from the group consisting of a phthalocyanine compound having an amino group, a porphyrin compound having an amino group, a cyanine dye compound having an amino group, a triphenylmethane compound having an amino group, a spiropyran compound having an amino group;

a phthalocyanine compound having a carboxyl group, a porphyrin compound having a carboxyl group, a cyanine dye compound having a carboxyl group, a triphenylmethane compound having a carboxyl group and a spiropyran compound having a carboxyl group.