Method to produce a display screen with a matrix of transistors provided with an optical mask

• US 5,081,004 A
• Filed: 11/02/1989
• Issued: 01/14/1992
• Est. Priority Date: 11/08/1988
• Status: Expired due to Term

• Current Assignee: France Telecom Etablissement Autonome de Droit Public
• Original Assignee: L'Etat Francais Represente PAR Le Ministre Des Postes Des Telecommunications et de L'Espace (Centre National D'Etudes Des Telecommunications
• Inventors: Lebrun, Hugues, Vinouze, Bruno
• Primary Examiner(s): McCamish, Marion E.
• Assistant Examiner(s): ROSASCO, STEPHEN D
• Application Number:
  US07/430,890
• Time in Patent Office: 803 Days
• Field of Search: 430/20, 430/313, 430/317, 430/319
• US Class Current: 430/311
• CPC Class Codes: G02F 1/133512 Light shielding layers, e.g. black matrix G02F1/136209 takes precedence
• CPC Class Codes: G02F 1/136209 Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
• CPC Class Codes: G02F 2202/022 polymeric
• CPC Class Codes: G02F 2202/103 a-Si
• CPC Class Codes: H01L 27/1214 comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
• CPC Class Codes: H01L 27/1288 employing particular masking sequences or specially adapted masks, e.g. half-tone mask
• CPC Class Codes: H01L 29/78666 with normal-type structure, e.g. with top gate

Abstract

Method for producing a display screen with a matrix of transistors provided with an optical mask. This method consists of depositing on a substrate (100) a layer of black polyimide (102) absorbing the visible light and followed by a layer of photosensitive resin, of insolating the resin through a mask masking the channels of the transistors to be embodied, of eliminating the zones insolated with the resin and the sub-adjacent zones of the polyimide, of depositing an ITO layer (106) on the unit, of eliminating the rest of the resin and the ITO surmounting said resin so as to form the drains/sources of the transistors, of successively depositing a layer of hydrogenated amorphous silicon (110), a layer of silicon nitride (112) and a layer of aluminium (114), then of photoengraving the stack of these layers so as to form the grid of the transistors, and finally to render passive the unit with a layer of silicon (116).

Claims

1. Method to produce a display screen with an active matrix formed of display points each constituted by a thin film transistor and a capacitor and comprising conductive lines and columns for addressing the display points, said method consisting of:

a) depositing on an electric insulating substrate a layer of a polymerizable resin containing opaque dyes, said polymerizable resin being electrically insulating and absorbing the visible light and soluble in a developer of a positive photosensitive resin,

b) depositing on the absorbing polymerizable resin layer one layer of said photosensitive resin,

c) insolating the photosensitive resin through a negative mask masking the channels of the transistors, a first armature of the capacitors and the columns to be embodied, said negative mask being eliminated thereafter,

d) eliminating the insolated zones of the photosensitive resin and the sub-adjacent zones of the absorbing polymerizable resin layer in front of said insolated zones with said developer so as to form an optical mask in said insolating material on said channels and around the first armatures and columns to be embodied,

e) depositing at least one layer of a first conductive transparent material on the structure obtained in d),

f) eliminating the remainder of the photosensitive resin and the first conductive material covering said resin so as to form the sources and drains of the transistors, and the first armatures and columns in the first conductive material,

g) polymerizing the polymerizable resin,

h) depositing a layer of hydrogenated amorphous silicon on the structure obtained in g),

i) depositing a layer of a first electric insulating material on the silicon layer,

j) depositing a layer of a second conductive material on the first insulating material,

k) photoengraving the stack formed by the layers of the second conductive material, the second insulating material and the silicon so as to form the grid of the transistors and the lines, and

l) rendering passive the structure obtained in k) by depositing a layer of a second electric insulating material.

2. Method according to claim 1, wherein the polymerization of the polymerizable resin is obtained by an annealing.

3. Method according to claim 1, wherein the polymerizable resin is a polyimide.

4. Method according to claim 1, wherein the stage e consists of depositing two conductive layers, a first and a third conductive layers, whose thickness is such that the thickness of the first and third conductive material is equal to the thickness of the absorbing polymerizable resin.