Thin-film spectroscopic sensor
First Claim
1. An integrated spectrometer for chemical analysis by evanescent electromagnetic radiation absorption in a reaction volume, comprising:
- a noninteractive sample waveguide having a uniform thickness and having a first surface and a second surface, and having an electromagnetic radiation entrance end and exit end, wherein the first surface communicates with the reaction volume along the region between the entrance end and exit end of the sample waveguide;
a substrate having a top surface and a bottom surface and comprising a material characterized by allowing for the transmission of electromagnetic radiation, an entrance grating and an exit grating etched or deposited on the top surface of the substrate, such that the entrance grating communicates with the entrance end and the second surface of the waveguide and couples electromagnetic radiation into the waveguide, and the exit grating communicates with the exit end and the second surface of the waveguide and couples electromagnetic radiation out of the waveguide, wherein the gratings comprise parallel spacings and wherein the refractive index of the substrate is different from the refractive index of the waveguide;
an electromagnetic radiation source directed toward the entrance grating; and
an electromagnetic radiation sensing device directed toward the exit grating.
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Abstract
There is disclosed an integrated spectrometer for chemical analysis by evanescent electromagnetic radiation absorption in a reaction volume. The spectrometer comprises a noninteractive waveguide, a substrate, an entrance grating and an exit grating, an electromagnetic radiation source, and an electromagnetic radiation sensing device. There is further disclosed a chemical sensor to determine the pressure and concentration of a chemical species in a mixture comprising an interactive waveguide, a substrate, an entrance grating and an exit grating, an electromagnetic radiation source, and an electromagnetic radiation sensing device.
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Citations
27 Claims
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1. An integrated spectrometer for chemical analysis by evanescent electromagnetic radiation absorption in a reaction volume, comprising:
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a noninteractive sample waveguide having a uniform thickness and having a first surface and a second surface, and having an electromagnetic radiation entrance end and exit end, wherein the first surface communicates with the reaction volume along the region between the entrance end and exit end of the sample waveguide; a substrate having a top surface and a bottom surface and comprising a material characterized by allowing for the transmission of electromagnetic radiation, an entrance grating and an exit grating etched or deposited on the top surface of the substrate, such that the entrance grating communicates with the entrance end and the second surface of the waveguide and couples electromagnetic radiation into the waveguide, and the exit grating communicates with the exit end and the second surface of the waveguide and couples electromagnetic radiation out of the waveguide, wherein the gratings comprise parallel spacings and wherein the refractive index of the substrate is different from the refractive index of the waveguide; an electromagnetic radiation source directed toward the entrance grating; and an electromagnetic radiation sensing device directed toward the exit grating. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method for continuously measuring the concentration of an analyte or analytes in a reaction volume, comprising:
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contacting a first surface of a noninteractive waveguide having a uniform thickness with the reaction volume, wherein the waveguide further comprises a second surface communicating with an analysis device, wherein the analysis device comprises a) a substrate having a top surface communicating with the second surface of the waveguide and a bottom surface and further comprising a material that allows for the transmission of electromagnetic radiation, b) entrance and exit gratings etched or deposited on the top surface of the substrate such that the entrance grating couples electromagnetic radiation into the waveguide and the exit grating couples electromagnetic radiation out of the waveguide, c) an electromagnetic radiation source directed toward the entrance grating, and d) an electromagnetic radiation sensing device directed toward the exit grating; directing electromagnetic radiation to propagate through the waveguide such that the interaction of the analyte or analytes along the first surface of the waveguide in the region between the entrance and exit gratings modulates an evanescent wave; and detecting the characteristics of electromagnetic radiation by the electromagnetic radiation sensing device.
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17. A chemical sensor to determine the presence and concentration of a particular chemical species in a chemical composition, comprising:
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an interactive waveguide having a uniform thickness, a first surface, a second surface, and an electromagnetic radiation entrance end and exit end, wherein the first surface communicates with the chemical composition and wherein the waveguide is capable of a physical change in the refractive index or thickness, or both, of the waveguide when the first surface communicates with the chemical composition containing the particular chemical species along the region between the entrance end and exit end of the waveguide; a substrate having a top surface and a bottom surface and comprising a material of a different refractive index of the waveguide and allowing for the transmission of the appropriate wavelength of electromagnetic radiation, wherein the top surface of the substrate supports the second surface of the waveguide and communicates with the waveguide; an entrance grating and an exit grating, wherein the entrance grating couples electromagnetic radiation into the entrance end of the waveguide and the exit grating couples electromagnetic radiation out of the exit end of the waveguide; an electromagnetic radiation source directed toward the entrance grating; and an electromagnetic radiation sensing device directed toward the exit grating. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25)
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26. A method for monitoring for the presence and concentration of a particular chemical species in a chemical mixture contained in a reaction volume, comprising:
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contacting a first surface of an interactive waveguide having a uniform thickness with the reaction volume, wherein the waveguide further comprises a second surface communicating with an analysis device, wherein the analysis device comprises a) a substrate having a top surface communicating with the second surface of the waveguide and a bottom surface and further comprising a material that allows for the transmission of electromagnetic radiation, b) entrance and exit gratings etched or deposited on the top surface of the substrate such that the entrance grating couples electromagnetic radiation into the waveguide and the exit grating couples electromagnetic radiation out of the waveguide, c) an electromagnetic radiation source directed toward the entrance grating, and d) an electromagnetic radiation sensing device directed toward the exit grating; directing electromagnetic radiation to propagate through the waveguide such that the interaction of the chemical species with the interactive waveguide in the region between the entrance and exit gratings will change the physical character of the waveguide to affect the electromagnetic radiation propagation through the waveguide; and detecting electromagnetic radiation leaving the exit grating by the electromagnetic radiation sensing device. - View Dependent Claims (27)
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Specification