Conversion process for passivating short circuit current paths in electronic devices having a metallic electrode

• US 5,084,400 A
• Filed: 10/23/1990
• Issued: 01/28/1992
• Est. Priority Date: 09/12/1988
• Status: Expired due to Term

• Current Assignee: United Solar Systems Corp.
• Original Assignee: Energy Conversion Devices
• Inventors: Nath, Prem, Vogeli, Craig N.
• Primary Examiner(s): Chaudhuri, Olik
• Assistant Examiner(s): FOURSON III, GEORGE R
• Application Number:
  US07/602,905
• Time in Patent Office: 462 Days
• Field of Search: 437/4, 437/170, 437/923, 136/258, 136/290, 204/130, 204/140
• US Class Current: 438/88
• CPC Class Codes: H01L 21/28 Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268 etching for patterning the electrodes H01L21/311, H01L21/3213; multistep manufacturing processes for data storage electrodes H01L29/4011
• CPC Class Codes: H01L 31/206 Particular processes or apparatus for continuous treatment of the devices, e.g. roll-to roll processes, multi-chamber deposition
• CPC Class Codes: H01L 31/208 Particular post-treatment of the devices, e.g. annealing, short-circuit elimination
• CPC Class Codes: Y02E 10/50 Photovoltaic [PV] energy
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product
• CPC Class Codes: Y10S 136/29 Testing, calibrating, treating, e.g. aging

Abstract

An electronic device of the type including a thin film body having a superposed metallic electrode has short circuit defects therein passivated by a conversion process in which the electrical resistivity of the metallic electrode material is increased proximate the defect regions. Conversion is accomplished by exposing the metallic electrode material to a conversion reagent and activating the reagent proximate the defect regions. The process may be utilized for a variety of differently configured devices, and may be readily adapted for use in a roll-to-roll device fabrication process.

Claims

1. A method of passivating short circuit defects in a thin film large area photovoltaic module comprising a substrate electrode, an intermediate body including a plurality of continuous layers disposed atop said substrate and selected from the group consisting of dielectrics, semiconductors, and combinations thereof, and an electrode disposed atop said intermediate body, said electrode comprising a layer of electrically conductive metallic material, said method comprising the steps of:

providing a solution of an oxidizing conversion reagent, including therein an acid, selected from the group consisting of H₂ SO₄, H₃ PO₄, H₃ BO₃, H₂ CrO₄ and combinations thereof, in contact with at least those portions of said metallic electrode proximate said defects, said oxidizing conversion reagent capable of converting the metallic electrode material to a material of higher electrical resistivity; and

disposing a counter-electrode in electrical communication with said solution of said conversion reagent;

providing a power supply in electrical communication with both said counter-electrode and said substrate electrode of said photovoltaic module for applying a potential between said substrate electrode and said counter-electrode;

energizing said power supply to apply a potential difference between said substrate electrode and said counter-electrode for activating said oxidizing conversion reagent proximate said defects so as to facilitate conversion of the metallic electrode material to said higher resistivity form, whereby said defects regions are substantially electrically isolated from the remainder of said metallic electrode material.

2. A method as in claim 1, wherein the step of activating the conversion reagent to facilitate conversion of the metallic material includes exposing said metallic material to oxidizing conditions.

3. A method as in claim 1, wherein the step of activating the conversion reagent includes the further step of passing an electrical current through at least the defect regions of the thin film device and into the superposed metallic electrode so as to activate the conversion reagent proximate at least areas of said metallic electrode adjacent said defect regions.

4. A method as in claim 3, including the further steps of providing a counter-electrode disposed in electrical communication with the conversion reagent and the metallic electrode of the thin film device;

and, providing a source of electrical current in electrical communication with the intermediate body.

5. A method as in claim 1, wherein the step of activating the oxidizing conversion reagent includes the step of heating the reagent proximate said defects.

6. A method as in claim 1, wherein the step of activating the oxidizing conversion reagent includes the step of illuminating the conversion reagent proximate said defects.

7. A method as in claim 1, wherein the preferred oxidizing conversion reagent is sulfuric acid (H₂ SO₄).

8. A method as in claim 7, wherein the step of providing a conversion reagent comprises providing an aqueous conversion reagent.

9. A method as in claim 8, wherein the step of providing a conversion reagent comprises providing a 10% solution of sulfuric acid in water.

10. A method as in claim 1, wherein the step of providing a conversion reagent comprises providing a reagent including a non-aqueous solvent therein.

11. A method as in claim 1, wherein the electronic device includes at least one latent defect therein, said method including the further step of:

activating said at least one latent defect so as to convert it to a short circuit defect.

12. A method as in claim 11, wherein the step of activating latent defects includes passing an electrical current through said defects.

13. A method as in claim 12 wherein said latent defects are activated prior to the activation of said conversion reagent.

14. A method as in claim 12, wherein said latent defects are activated concommitant with the activation of said conversion reagent.