Electric probing-test machine having a cooling system
First Claim
1. An electric probing-test machine comprising:
- probe means having a plurality of probes contacted with an object and serving to apply test signal to a tester which judges whether circuits on the object are correct or deficient;
chuck means, having a chuck top contacted directly with the object, for holding the object;
cooling means for cooling the chuck means, andcontrol means for controlling the cooling means wherein said chuck means includes;
a heat exchange jacket arranged to conduct heat exchange relative to the chuck top;
a cooling plate arranged between said chuck top and said heat exchange jacket;
Peltier elements arranged between said chuck top and said heat exchange jacket;
temperature detecting means for detecting the temperature of the chuck top; and
coolant supply means, being included in said cooling means, for supplying a coolant from a coolant reservoir to the heat exchange jacket;
wherein current applied to said Peltier elements and the amount of the coolant supplied from the coolant supply means to the heat exchange jacket is controlled by the control means responsive to temperature information detected by the temperature detecting means to thereby control the temperature of the chuck top.
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Accused Products
Abstract
An electric probing-test machine comprises a probe card having a plurality of probes contacted with chips of a semiconductor wafer and serving to apply test signal to a tester which judges whether circuits on the chips of the wafer are correct or deficient, a main chuck for holding the wafer at a test temperature, a system for cooling the main chuck, and a controller for controlling the cooling system. The main chuck includes a chuck top contacted directly with the wafer, a jacket arranged to conduct heat exchange relative to the chuck top, and a temperature sensor for detecting the temperature of the chuck top. The cooling system has a pump for supplying a coolant from a reservoir to the jacket. Responsive to temperature information detected by the temperature sensor, the amount of the coolant supplied from the reservoir to the jacket is controlled by the controller to thereby control the temperature of the chuck top.
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Citations
16 Claims
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1. An electric probing-test machine comprising:
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probe means having a plurality of probes contacted with an object and serving to apply test signal to a tester which judges whether circuits on the object are correct or deficient; chuck means, having a chuck top contacted directly with the object, for holding the object; cooling means for cooling the chuck means, and control means for controlling the cooling means wherein said chuck means includes; a heat exchange jacket arranged to conduct heat exchange relative to the chuck top; a cooling plate arranged between said chuck top and said heat exchange jacket; Peltier elements arranged between said chuck top and said heat exchange jacket; temperature detecting means for detecting the temperature of the chuck top; and coolant supply means, being included in said cooling means, for supplying a coolant from a coolant reservoir to the heat exchange jacket; wherein current applied to said Peltier elements and the amount of the coolant supplied from the coolant supply means to the heat exchange jacket is controlled by the control means responsive to temperature information detected by the temperature detecting means to thereby control the temperature of the chuck top. - View Dependent Claims (2, 3, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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4. The electric probing-test machine comprising:
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probe means having a plurality of probes contacted with an object and serving to apply test signal to a tester which judges whether circuits on the object are correct or deficient; chuck means, having a chuck top contacted directly with the object, for holding the object; cooling means for cooling the chuck means, and control means for controlling the cooling means wherein said chuck means includes; a heat exchange jacket arranged to conduct heat exchange relative to the chuck top; a cooling plate arranged between the chuck top and the heat exchange jacket, the cooling plate having a diameter larger than that of the chuck top; temperature detecting means for detecting the temperature of the chuck top; and cooling supply means included in said cooling means for supplying a coolant from a coolant reservoir to the heat exchange jacket, wherein the amount of the coolant supplied from the coolant supply means to the heat exchange jacket is controlled by the control means responsive to temperature information detected by the temperature detecting means to thereby control the temperature of the chuck top.
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Specification