Method of forming vertical FET device with low gate to source overlap capacitance

• US 5,087,581 A
• Filed: 10/31/1990
• Issued: 02/11/1992
• Est. Priority Date: 10/31/1990
• Status: Expired due to Fees

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Rodder, Mark S.
• Primary Examiner(s): Hearn, Brian E.
• Assistant Examiner(s): NGUYEN, TUAN H
• Application Number:
  US07/606,674
• Time in Patent Office: 468 Days
• Field of Search: 437/44, 437/45, 437/915, 437/49, 437/40, 437/41, 437/913, 357/23.4
• US Class Current: 438/268
• CPC Class Codes: H01L 29/1033 with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with channel and gate aligned in the lengthwise direction H01L29/42376; with buried channel H01L29/7838
• CPC Class Codes: H01L 29/4236 within a trench, e.g. trench gate electrode, groove gate electrode
• CPC Class Codes: H01L 29/66666 Vertical transistors H01L29/66712, H01L29/66742 take precedence
• CPC Class Codes: H01L 29/7827 Vertical transistors H01L29/7802, H01L29/78642 take precedence

Abstract

This is a vertical MOSFET device with low gate to source overlap capacitance. It can comprise a semiconductor substrate 22 of the first conductivity type, a source region 24, 26 of a second conductivity type formed in the upper surface of the substrate 22; a vertical pillar with a channel region 28 of the first conductivity type, a lightly doped drain region 30 of the second conductivity type and a highly doped drain contact region 32 of the second conductivity type; a gate insulator 34, a gate electrode 36 surrounding the vertical pillar, and an insulating spacer 38 between the source 24, 26 and a portion of the gate 36 regions. This is also a method of forming a vertical MOSFET device on a single crystal semiconductor substrate, with the device having a pillar on the substrate, with the pillar having a channel region in a lower portion and with the channel region having a top and a highly doped first source/drain region in an upper portion of the pillar, with the substrate having a highly doped second source/drain region and with a gate insulator on the substrate and on the pillar. The method comprises: isotropically forming a first gate electrode material layer on the pillar and the substrate; anisotropically etching the first gate electrode material leaving a vertical portion of gate electrode material on the pillar; anisotropically depositing an insulating spacer; and conformally depositing a second gate electrode material layer.

Claims

1. A method of forming a vertical MOSFET device on a semiconductor substrate, the device having a pillar on the substrate, with the pillar having a channel region in a lower portion and with the channel region having a top and a highly doped first source/drain region in an upper portion of the pillar, and with the substrate having a highly doped second source/drain region and with a gate insulator on the substrate and on the pillar;

said method comprising;

a. isotropically forming a first gate electrode material layer on said pillar and said substrate;

b. anisotropically etching said first gate electrode material leaving a vertical portion of said first gate electrode material on sidewalls of said pillar;

c. anisotropically depositing an insulating spacer adjacent to a portion of said first gate electrode material; and

d. conformally depositing a second gate electrode material layer at least a portion of which is over at least a portion of said insulating spacer.

2. The method of claim 1, wherein said device has a lightly doped source region.

3. The method of claim 1, wherein said pillar is above said lightly doped source region but not above said highly doped source region.

4. The method of claim 1, wherein said substrate is silicon.

5. The method of claim 1, wherein said insulating spacer is oxide.

6. The method of claim 1, wherein said first gate electrode material and said second gate electrode material is polysilicon.

10. The method of claim 4, wherein said substrate is silicon.

7. A method of forming a vertical FET device, said method comprising:

a. forming a highly doped source region in a semiconductor substrate;

b. forming a pillar, over a portion of said substrate, having a highly doped drain contact region over a lightly doped drain region which is in turn over a channel region;

c. isotropically forming a gate insulator layer at least adjacent to a portion of said pillar;

d. isotropically depositing a first gate electrode material layer adjacent to at least a portion of said gate insulator layer;

e. anisotropically etching said first gate electrode material having a vertical portion of said first gate electrode material on sidewalls of said pillar;

f. anisotropically depositing an insulating spacer adjacent to a portion of said first gate electrode material;

g. isotropically depositing and patterning a second gate electrode material layer at least a portion of which is over at least a portion of said insulating spacer;

h. anisotropically depositing a gate height determining insulator material over at least a portion of said second gate electrode material; and

i. isotropically etching said first and second gate electrode materials to produce a top level of gate electrode material below the highly doped drain contact region but above said channel region, whereby the insulator spacer reduces gate to source capacitance and the gate not being adjacent the highly doped drain region reduces gate to drain capacitance.

8. The method of claim 7, wherein said device has a lightly doped source region.

9. The method of claim 8, wherein said pillar is above said lightly doped source region but not above said highly doped source region.

11. The method of claim 7, wherein said insulating spacer is oxide.

12. The method of claim 7, wherein said first gate electrode material and said second gate electrode material is polysilicon.