Method of forming a thin copper film by low temperture CVD

• US 5,091,209 A
• Filed: 10/11/1990
• Issued: 02/25/1992
• Est. Priority Date: 10/12/1989
• Status: Expired due to Fees

• Current Assignee: L'Air Liquide Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Georges Claude (L'Air Liquide SA)
• Original Assignee: L'Air Liquide Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Georges Claude (L'Air Liquide SA)
• Inventors: Arai, Juichi, Kimura, Masao, Claverie, Pierre, Jalby, Pierre
• Primary Examiner(s): NOT, DEFINED
• Assistant Examiner(s): Burke, Margaret
• Application Number:
  US07/596,001
• Time in Patent Office: 502 Days
• Field of Search: 427/38, 427/39, 427/252, 427/253, 427/250, 427/255.1, 204/192.31
• US Class Current: 427/576
• CPC Class Codes: C23C 16/08 from metal halides
• CPC Class Codes: C23C 16/14 Deposition of only one other metal element
• CPC Class Codes: C23C 16/4488 by in situ generation of reactive gas by chemical or electrochemical reaction
• CPC Class Codes: C23C 16/452 by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species

Abstract

A thin copper film is formed by CVD, by (a) forming a gas stream containing a copper halide, followed by introducing said gas stream into a CVD reaction chamber having a heated catalytic metal filament arranged herein, (b) introducing hydrogen gas into the CVD reaction chamber for activation of said hydrogen gas by the heated catalytic metal filament, and (c) carrying out the reaction between the copper halide contained in the gas stream introduced in step (a) and the hydrogen activated in step (b) near the surface of a substrate arranged within the CVD reaction chamber so as to deposit a thin copper film of copper on the substrate surface.

Claims

1. A method of forming a thin copper film by CVD, said method consisting essentially of the steps of:

(a) forming a gas stream containing a copper halide, followed by introducing said gas stream into a CVD reaction chamber having a heated catalytic metal filament arranged therein;

(b) introducing hydrogen gas into said CVD reaction chamber for activation of said hydrogen gas by said heated catalytic metal filament; and

(c) carrying out a reaction between said copper halide contained in said gas stream introduced in step (a) and said hydrogen activated in step (b) near a surface of a substrate arranged within said CVD reaction chamber so as to deposit a thin film of copper on said substrate surface;

wherein said substrate is maintained at a temperature of about 250°

C. to about 300°

C.

2. The method according to claim 1, wherein the substrate is selected from the group consisting of a ceramic substrate, a metal substrate, a glass substrate and a resin substrate.

3. The method according to claim 1, wherein the catalytic metal filament is formed of a metal selected from the group consisting of W, Ta, Mo and W alloy.

4. The method according to claim 1, wherein said gas stream containing a copper halide is prepared by continuously supplying a halogen gas or a hydrogen halide gas to a heated copper tube.

5. The method according to claim 4, wherein said gas stream containing a copper halide is prepared by continuously supplying hydrogen chloride gas to said heated copper tube.

6. The method according to claim 3, wherein said catalytic metal filament is heated to about 800°

C. to about 2000°

C.

7. The method according to claim 6, wherein said catalytic metal filament is heated to 1000°

C. or more.

8. The method according to claim 1, wherein said CVD reaction chamber is maintained at a pressure of 0.1 to 10.0 Torr.

9. The method according to claim 8, wherein said pressure is 0.1 to 4.0 Torr.

10. The method according to claim 9, wherein said pressure is 0.1 to 1.0 Torr.

11. The method according to claim 2, wherein said ceramic substrate is alumina or aluminum nitride.

12. The method according to claim 2, wherein said metal substrate is stainless steel.

13. The method according to claim 2, wherein said resin substrate is a thermoset resin.