Electrically-conductive, light-attenuating antireflection coating
First Claim
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1. A coating for an article, comprising:
- a group of three layers wherein two of said layers substantially include a transition metal nitride, each of said two layers having a thickness between about 5 nm and 40 nm, and a third layer between said two layers, said third layer including a material substantially transparent to visible light, and having an optical thickness less than or equal to about one-quarter wavelength at a wavelength between about 480 nm and 560 nm and a refractive index between about 1.35 and about 2.65 at a wavelength of about 510 nm; and
fourth layer adjoining said three layer group on the side thereof farthest from the article, said fourth layer including a material substantially transparent to visible light and having a refractive index between about 1.35 and 1.9 at a wavelength of 510 nm and an optical thickness of about one-quarter wavelength between about 480 nm and about 560 nm.
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Abstract
A coating for an article comprising layers of nitrides of certain transition metals to provide an electrically-conductive, light-attenuating, antireflection surface.
148 Citations
34 Claims
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1. A coating for an article, comprising:
a group of three layers wherein two of said layers substantially include a transition metal nitride, each of said two layers having a thickness between about 5 nm and 40 nm, and a third layer between said two layers, said third layer including a material substantially transparent to visible light, and having an optical thickness less than or equal to about one-quarter wavelength at a wavelength between about 480 nm and 560 nm and a refractive index between about 1.35 and about 2.65 at a wavelength of about 510 nm; and
fourth layer adjoining said three layer group on the side thereof farthest from the article, said fourth layer including a material substantially transparent to visible light and having a refractive index between about 1.35 and 1.9 at a wavelength of 510 nm and an optical thickness of about one-quarter wavelength between about 480 nm and about 560 nm.- View Dependent Claims (2, 3, 4, 5)
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6. An electrically conductive, reflection reducing coating for a substrate, comprising:
a group of five layers wherein three of said layers substantially include a transition metal nitride having a thickness between about 5 nanometer and 40 nanometer, and said three layers being arranged alternately with two other layers of said five layer group, said two other layers including a material substantially transparent to visible light and having an optical thickness less than or equal to about one-quarter wavelength at a wavelength in the range from about 480 nm to 560 nm and a refractive index between about 1.35 and 2.65 at a wavelength of about 510 nm; and
an additional layer adjoining said five layer group on the side thereof farthest from the substrate, said additional layer including a material substantially transparent to visible light, and having a refractive index between about 1.35 and 1.9 at a wavelength of about 510 nm and an optical thickness of about one-quarter wavelength between about 480 nm and 560 nanometers.- View Dependent Claims (7, 8, 9, 10)
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11. A coating for a substrate, comprising:
- a first layer substantially including a transition metal nitride and having a thickness between about 6 nm; and
9 nm, and a second layer adjacent to said first layer, said second layer including a material substantially transparent to visible light, having a refractive index between about 1.35 and 2.65 at a wavelength of about 510 nm, and a thickness between about 2 nm to 15 nm. - View Dependent Claims (12, 13)
- a first layer substantially including a transition metal nitride and having a thickness between about 6 nm; and
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14. An electrically conductive, reflection reducing coating for an article, comprising:
a group of three layers wherein two of said layers substantially include titanium nitride, each of said two layers having a thickness between about 5 nm and about 40 nm, and a third layer between said two layers, said third layer including a metal oxide having an optical thickness less than or equal to about one quarter wavelength at a wavelength between about 480 nm and 560 nm and a refractive index between about 1.35 and 2.65 at a wavelength of about 510 nm; and
a fourth layer adjoining said three layer group on the side thereof farthest from the article, said fourth layer including a metal oxide having a refractive index between about 1.35 and 1.9 at a wavelength of about 510 nm and an optical thickness of about one-quarter wavelength between about 480 nm to 560 nm.- View Dependent Claims (15, 16)
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17. An electrically conductive, reflection reducing coating for a substrate, comprising:
a group of five adjoining layers wherein three of said layers substantially include titanium nitride having a thickness between about 5 nm and 40 nm, said three layers being arranged alternately with two other layers of a metal oxide having an optical thickness less than or equal to about one-quarter wavelength at a wavelength between about 480 nm and 560 nm and a refractive index between about 1.35 and 2.65 at a wavelength of about 510 nm; and
a sixth layer adjoining said five layer group on the side thereof farthest from the substrate, said sixth layer including a metal oxide having a refractive index in the range from about 1.35 to about 1.9 at a wavelength of about 510 nm and an optical thickness of about one-quarter wavelength at a wavelength between about 480 nm to 560 nm.- View Dependent Claims (18, 19)
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20. A coating for an article, comprising:
a first layer comprising a material substantially transparent to visible light and having a refractive index between about 1.35 and 1.9, and an optical thickness of about one-quarter wavelength at a wavelength between about 480 nm and about 560 nm, said first layer being the outermost layer of said coating;
adjoining said first layer a second layer comprising substantially a transition metal nitride and having a thickness between about 5 nm and 40 nm;
a third layer adjoining said second layer and comprising a material substantially transparent to visible light and having a refractive index between about 1.35 and 2.65 and an optical thickness less than or equal to about one-quarter wavelength between about 480 nm and 560 nm; and
adjoining said third layer a fourth layer comprising substantially a transition metal nitride having a thickness between about 5 nm and 40 nm.- View Dependent Claims (21, 22, 23, 24)
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25. A reflection reducing light attenuating coating for an article, comprising:
a first layer including a material substantially transparent to visible light and having a refractive index between about 1.35 and 1.9 and an optical thickness of about one quarter wavelength a between about 480 nm and about 560 nm, said first layer being the outermost layer of said coating;
a second layer including substantially a transition metal nitride and having a thickness between about 5 nm and 40 nm;
a third layer including a material substantially transparent to visible light and having a refractive index between about 1.35 and about 2.65 and an optical thickness less than or equal to about one-quarter wavelength between about 480 nm and about 560 nm;
a fourth layer including substantially a transition metal nitride and having a thickness between about 5 nm and 40 nm;
a fifth layer including a material substantially transparent to visible light and having a refractive index between about 1.35 and about 2.65 and an optical thickness less than or equal to about one-quarter wavelength between about 480 nm and about 560 nm;
a sixth layer including substantially a transition metal nitride and having a thickness between about 5 nm and 40 nm.- View Dependent Claims (26, 27, 28)
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29. A coated article, comprising:
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a transparent substrate; and on one surface of said substrate, a coating including a first layer including a material substantially transparent to visible light and having a refractive index between about 1.35 and 1.9 and an optical thickness of about one-quarter wavelength at some wavelength between 480 nm and 560 nm, said first layer being the outermost layer of said coating, a second layer including substantially a transition metal nitride having a thickness between about 5 nm to 40 nm;
adjoining said second layer a third layer including a material substantially transparent to visible light and having a refractive index in the range from about 1.35 to about 2.65 and an optical thickness less than or equal to about one-quarter wavelength at a wavelength between about 480 nm to about 560 nm, a fourth layer including substantially a transition metal nitride and having a thickness in the range from about 5 nm to 40 nm. - View Dependent Claims (30, 31, 32, 33, 34)
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Specification