Method of three-dimensional atomic imaging
First Claim
1. In a method for three-dimensional imaging of the atomic environment of a sample, including the steps of directing a beam against said surface to form a localized source electron diffraction interference pattern, detecting the intensity distribution of said pattern, calculating numerical image intensity data corresponding to said intensity distribution, and reconstructing the interference data to form a pattern indicating the location of a scatterer atom on said surface relative to an associated emitter atom on said surface, the improvement which comprises:
- phase shift-correcting the data using a function Pi (k) dependent on the polar angle between the emitter atom and a scatterer atom i.
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Abstract
A method of three-dimensional imaging of the atomic environment of atoms near the surface of the sample involves forming a localized source electron diffraction pattern, detecting the intensity of the distribution of the pattern, and generating data corresponding to the intensity distribution. The intensity data is normalized and corrected for a phase shift error to produce data corresponding to a hologram. The process may be repeated at a several predetermined emitted electron energies, and the data at each energy is combined to yield a composite image intensity having improved resolution. The method of the invention can provide a lenseless electron microscope having a resolution better than one angstrom and which overcomes distortions caused by multiple scattering.
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Citations
14 Claims
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1. In a method for three-dimensional imaging of the atomic environment of a sample, including the steps of directing a beam against said surface to form a localized source electron diffraction interference pattern, detecting the intensity distribution of said pattern, calculating numerical image intensity data corresponding to said intensity distribution, and reconstructing the interference data to form a pattern indicating the location of a scatterer atom on said surface relative to an associated emitter atom on said surface, the improvement which comprises:
phase shift-correcting the data using a function Pi (k) dependent on the polar angle between the emitter atom and a scatterer atom i.
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2. A method for three-dimensional imaging of the atomic environment of a sample, comprising the steps of:
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(a) directing a beam against said surface to form a localized source electron diffraction interference pattern; (b) detecting the intensity distribution of said pattern; (c) calculating numerical image intensity data corresponding to said intensity distribution; (d) normalizing the intensity data; (e) phase shift-correcting the normalized data; and (f) reconstructing the corrected interference data to form an image indicating the location of a scatterer atom on said surface relative to an associated emitter atom on said surface. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An apparatus for three-dimensional imaging of the atomic environment of a sample, comprising:
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means for directing a beam against said surface to form a localized source electron diffraction interference pattern; means for detecting the intensity distribution of said pattern; means for calculating numerical image intensity data corresponding to said intensity distribution; means for normalizing the intensity data; means for phase shift-correcting the normalized data; and means for reconstructing the corrected interference data to form an image indicating the location of a scatterer atom on said surface relative to an associated emitter atom on said surface. - View Dependent Claims (13, 14)
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Specification