Multidimensional force sensor
First Claim
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1. A multidimensional force sensor, comprising:
- a substantially planar main body having first, second and third apertures and a center of rotation about which said main body is adapted to rotate;
a wide and thin first beam having opposing wide sides attached at a first end to said main body and projecting into said first aperture in a first direction substantially parallel to said main body and substantially outward from said center of rotation, with a normal of the wide sides of said first beam oriented substantially perpendicular to said main body;
a wide and thin second beam having opposing wide sides attached at a first end to said main body and projecting into said second aperture in a second direction substantially parallel to said main body, substantially perpendicular to said first direction and substantially outward from said center of rotation, with a normal of the wide sides of said second beam oriented substantially perpendicular to said main body;
a wide and thin third beam having opposing wide sides attached at a first end to said main body and projecting into said third aperture in a third direction substantially parallel to said main body, substantially perpendicular to said second direction and substantially outward from said center of rotation, with a normal of the wide sides of said third beam oriented substantially parallel to said main body; and
sensing means for sensing displacement of each of said first, second and third beams, respectively, coupled to each of said first, second and third beams, respectively.
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Abstract
A multibeam structure measures displacement of one or more response elements to detect multiple components of applied force. The flexible beams are each coupled to a response element which may be displaced by a force arising from linear acceleration, angular acceleration, fluid flow, electric/magnetic/gravitational fields, and others sources. The displacement of the response element is detected with a variety of sensing methods including capacitive and piezoresistive sensing.
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Citations
60 Claims
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1. A multidimensional force sensor, comprising:
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a substantially planar main body having first, second and third apertures and a center of rotation about which said main body is adapted to rotate; a wide and thin first beam having opposing wide sides attached at a first end to said main body and projecting into said first aperture in a first direction substantially parallel to said main body and substantially outward from said center of rotation, with a normal of the wide sides of said first beam oriented substantially perpendicular to said main body; a wide and thin second beam having opposing wide sides attached at a first end to said main body and projecting into said second aperture in a second direction substantially parallel to said main body, substantially perpendicular to said first direction and substantially outward from said center of rotation, with a normal of the wide sides of said second beam oriented substantially perpendicular to said main body; a wide and thin third beam having opposing wide sides attached at a first end to said main body and projecting into said third aperture in a third direction substantially parallel to said main body, substantially perpendicular to said second direction and substantially outward from said center of rotation, with a normal of the wide sides of said third beam oriented substantially parallel to said main body; and sensing means for sensing displacement of each of said first, second and third beams, respectively, coupled to each of said first, second and third beams, respectively. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 39, 40, 41)
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17. A multidimensional force sensor, comprising:
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a substantially planar main body having first, second, third, fourth and fifth apertures; a first beam attached to said main body at a first end and projecting into said first aperture in a first direction substantially parallel to said main body; a first sensor element for sensing displacement of said first beam, coupled to said first beam; a second sensor element for sensing displacement of said first beam, coupled to said first beam, that responds differently from said first sensor element to displacement of said first beam in one direction; a second beam attached to said main body at a first end and projecting into said second aperture in a second direction substantially parallel to said main body and substantially perpendicular to said first direction; a third sensor element for sensing displacement of said second beam, coupled to said second beam, that responds differently from said third sensor element to displacement of said second beam in one direction; a third beam attached to said main body at a first end and projecting into said third aperture in a third direction substantially parallel to said main body and substantially perpendicular to said second direction; a fifth sensor element for sensing displacement of said third beam, coupled to said third beam; a sixth sensor element for sensing displacement of said third beam, coupled to said third beam, that responds differently from said fifth sensor element to displacement of said third beam in one direction; a fourth beam attached to said main body at a first end and projecting into said fourth aperture in a fourth direction substantially parallel to said main body and substantially perpendicular to said third direction; a seventh sensor element for sensing displacement of said fourth beam, coupled to said fourth beam; an eighth sensor element for sensing displacement of said fourth beam, coupled to said fourth beam, that responds differently from said seventh sensor element to displacement of said fourth beam in one direction; a fifth beam attached to said main body at a first end and projecting into said fifth aperture in a fifth direction substantially parallel to said main body and between said fourth direction and said first direction; and a ninth sensor element for sensing displacement of said fifth beam, coupled to said fifth beam. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60)
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28. A multidimensional force sensor, comprising:
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a substantially planar main body having an aperture; a first beam attached to said main body at a first end and projecting into said aperture in a first direction substantially parallel to said main body; a first sensor element for sensing displacement of said first beam, coupled to said first beam; a second sensor element for sensing displacement of said first beam, coupled to said first beam, that responds differently from said first sensor element to displacement of said first beam in one direction; a second beam attached to said main body at a first end and projecting into said aperture in a second direction substantially parallel to said main body and substantially perpendicular to said first direction; a third sensor element for sensing displacement of said second beam, coupled to said second beam; a fourth sensor element for sensing displacement of said second beam, coupled to said second beam, that responds differently from said third sensor element to displacement of said second beam in one direction; a third beam attached to said main body at a first end and projecting into said aperture in a third direction substantially parallel to said main body and substantially perpendicular to said second direction; a fifth sensor element for sensing displacement of said third beam, coupled to said third beam; a sixth sensor element for sensing displacement of said third beam, coupled to said third beam, that responds differently from said fifth sensor element to displacement of said third beam in one direction; a fourth beam attached to said main body at a first end and projecting into said aperture in a direction substantially parallel to said main body and substantially perpendicular to said third direction; a seventh sensor element for sensing displacement of said fourth beam, coupled to said fourth beam; an eighth sensor element for sensing displacement of said fourth beam, coupled to said fourth beam, that responds differently from said seventh sensor element to displacement of said fourth beam in one direction; a fifth beam attached to said main body at a first end and projecting into said aperture in a direction substantially parallel to said main body and between said fourth direction and said first; and a ninth sensor element for sensing displacement of said fifth beam, coupled to said fifth beam. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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Specification