Microfabricated pump
First Claim
1. A micro machined micro pump comprising:
- a body of a chemically etchable material;
an inlet and an outlet channel through said body from first and second faces terminating in a substantially planar face;
a membrane over said substantially planar face;
means for forcing said membrane into shapes which selectively conveys fluid from said inlet passage along said substantially planar face to said outlet passage.
1 Assignment
0 Petitions
Accused Products
Abstract
A micro machined micro pump capable of flow rates on the level of microliters per minute formed by micro machining of a semiconductor material such as silicon with a set of channels or passages and having a semiconductor membrane interacting with the pattern of channels and passages and under selective control of activating means to induce traveling wave type motion of said membrane that creates pump action between inlet and outlet ones of the passages. To induce the pump action motion of the membrane electrical conductors can be applied to the membrane in a pattern which, when selectively activated interact with an electric or magnetic field to produce such motion. Alternatively piezolelectric or other electrostrictive mechanisms may be employed to induce the appropriate membrane motion.
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Citations
18 Claims
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1. A micro machined micro pump comprising:
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a body of a chemically etchable material; an inlet and an outlet channel through said body from first and second faces terminating in a substantially planar face; a membrane over said substantially planar face; means for forcing said membrane into shapes which selectively conveys fluid from said inlet passage along said substantially planar face to said outlet passage. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification