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Microfabricated pump

  • US 5,096,388 A
  • Filed: 03/22/1990
  • Issued: 03/17/1992
  • Est. Priority Date: 03/22/1990
  • Status: Expired due to Term
First Claim
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1. A micro machined micro pump comprising:

  • a body of a chemically etchable material;

    an inlet and an outlet channel through said body from first and second faces terminating in a substantially planar face;

    a membrane over said substantially planar face;

    means for forcing said membrane into shapes which selectively conveys fluid from said inlet passage along said substantially planar face to said outlet passage.

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