Beam scanner

• US 5,097,354 A
• Filed: 07/27/1990
• Issued: 03/17/1992
• Est. Priority Date: 07/27/1989
• Status: Expired due to Term

• Current Assignee: Omron Corporation
• Original Assignee: Omron Corporation
• Inventors: Goto, Hiroshi
• Primary Examiner(s): Ben, Loha
• Application Number:
  US07/558,425
• Time in Patent Office: 599 Days
• Field of Search: 350/6.5, 350/6.6, 350/6.1, 350/6.3, 350/486, 350/487, 350/452, 350/632, 350/355, 250/347, 250/348
• US Class Current: 359/212.1
• CPC Class Codes: G02B 26/0816 by means of one or more reflecting elements
• CPC Class Codes: G02B 26/0875 by means of one or more refracting elements
• CPC Class Codes: G02B 3/08 with discontinuous faces, e.g. Fresnel lens diffractive Fresnel lenses G02B5/1876
• CPC Class Codes: G02B 7/1821 for rotating or oscillating mirrors
• CPC Class Codes: G06K 2207/1016 Motor control or optical moving unit control
• CPC Class Codes: G06K 7/10831 Arrangement of optical elements, e.g. lenses, mirrors, prisms optical elements per se G02B

Abstract

The invention provides a beam scanner comprising a light-emitting element, a lens disposed forwardly of the light-emitting element in such a manner that its optical axis is parallel to the optical axis of the light-emitting element, and a rocking reflective mirror which is rotated by Coulomb force acting between static electrodes. There also is provided a beam scanner comprising a light-emitting element, a lens disposed forwardly of the light-emitting element in such a manner that its optical axis is parallel to the optical axis of the light-emitting element, and a displacement mechanism for reciprocal displacement of either the light-emitting element or the lens in a direction generally perpendicular to the optical axis thereof. The beam scanner of the invention is compact and permits reciprocal scanning.

Claims

1. A beam scanner, comprising:

a light-emitting element;

a lens disposed forwardly of said light emitting element;

a rocking reflective mirror disposed forwardly of said lens;

a displacement mechanism for said mirror comprising a dielectric electrode base, a plurality of electrode pairs with one electrode of each electrode pair being located on said dielectric electrode base and the other electrode of each electrode pair being located on the rocking reflective mirror such that each electrode of an electrode pair faces another electrode of the same electrode pair, and a plurality of torsion bars flexibly fixing said mirror in position relative to said dielectric electrode base; and

means for applying a voltage to selected ones of said electrode pairs to produce static fields across said selected ones of said electrode pairs and a displacement of said mirror.

2. The beam scanner of claim 1, further comprising an insulating stem having three pedestals respectively carrying said light-emitting element, said lens and said rocking reflective mirror.

3. The beam scanner of claim 2, wherein said mirror includes a mirror body having four corners and wherein the displacement mechanism further comprises a rectangular frame shaped mirror base with said torsion bars extending inwardly from the four inner corners thereof and connected to the four corners of said mirror body, said mirror base and said dielectric electrode base being connected with each other in such a manner tat said mirror, mirror base, and dielectric electrode base are in a parallel relation when no voltage is applied by said voltage applying means to any of said electrode pairs.

4. The beam scanner of claim 3, wherein the electrodes on one of said mirror body and electrode base for each electrode pair are grounded and said voltage applying means comprises a voltage controller connected to the electrodes on the other of said mirror body and electrode base of each electrode pairs through respective analog switches, and a switching controller for controlling said analog switches.

5. The beam scanner of claim 4, wherein the electrodes on said mirror body are grounded and the electrodes on said electrode base are connected to said voltage controller through said respective analog switches.

6. The beam scanner of claim 1, wherein said mirror includes a mirror body having four corners and wherein the displacement mechanism comprises a rectangular frame shaped mirror base with said torsion bars extending inwardly from the four inner corners thereof and connected to the four corners of said mirror body, said mirror base and said dielectric electrode base being integrally connected with each other in such a manner that said mirror, mirror base, and dielectric electrode base are in a parallel relation when no voltage is applied by said voltage applying means to any of said plurality of electrode pairs.

7. The beam scanner of claim 6, wherein the electrodes on one of said mirror body and electrode base for each electrode pair are grounded and said voltage applying means comprises:

a voltage controller connected to the electrodes on the other of said mirror body and electrode base of each electrode pair through respective analog switches, and switching controller for controlling said analog switches.

8. The beam scanner of claim 7, wherein the electrodes on said mirror body are grounded and the electrodes on said electrode base are connected to said voltage controller through said respective analog switches.