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Apparatus for measuring impurity concentrations in a liquid

  • US 5,098,657 A
  • Filed: 08/07/1989
  • Issued: 03/24/1992
  • Est. Priority Date: 08/07/1989
  • Status: Expired due to Term
First Claim
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1. An apparatus for measuring residue particles in a fluid, comprising:

  • (a) an atomizer for atomizing a fluid;

    (b) means cooperatively connected to said atomizer for drying atomized fluid to produce residue particles;

    (c) delivery means, cooperatively connected to said atomizer, for placing the fluid in fluid communication with said atomizer at a constant flowrate, said delivery means including a first orifice, a second orifice, a pressure sensor and control valve means, wherein said sensor is constructed and arranged so as to measure the fluid pressure between said first orifice and said control valve means and generate a first signal indicative thereof, and wherein said control valve means is positioned and arranged so as to respond to said generated signal and maintain the liquid pressure at a predetermined value to said second orifice, and(d) means for counting the residue particles connected in flow communication with said drying means.

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