×

High resolution position sensitive detector

  • US 5,099,128 A
  • Filed: 03/17/1989
  • Issued: 03/24/1992
  • Est. Priority Date: 03/17/1989
  • Status: Expired due to Term
First Claim
Patent Images

1. A position sensitive high resolution detector, said detector comprising as layersa scintillator,a microchannel plate amplifier array optically coupled to said scintillator and comprising a plurality of microchannels, each microchannel having a diameter substantially less than the resolution of said detector, and comprising a photocathode and a surface adapted to emit secondary electrons when bombarded with primary electrons,a layer comprising one or more sensor chips each adapted to receive electrons from said microchannel plate amplifier and comprisinga substrate, anda sensor array of anodes on said substrate, each anode adapted to change state in response to the emission of electrons from adjoining channels of said microchannel plate amplifier,said detector further comprising sensor electronics adapted to read out data indicative of the location of the anodes whose state has changed.

View all claims
  • 3 Assignments
Timeline View
Assignment View
    ×
    ×