Solar cell

• US 5,100,478 A
• Filed: 11/27/1990
• Issued: 03/31/1992
• Est. Priority Date: 12/01/1989
• Status: Expired due to Term

• Current Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Original Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Inventors: Kawabata, Kiyoshi
• Primary Examiner(s): Weisstuch, Aaron
• Application Number:
  US07/618,415
• Time in Patent Office: 490 Days
• Field of Search: 136/249 TJ, 136/255, 136/256, 136/258 PC, 136/259, 437/2-5, 437/175, 357/15, 357/20, 357/30 J
• US Class Current: 136/249
• CPC Class Codes: H01L 31/061 the potential barriers being of the point-contact type H01L31/07 takes precedence
• CPC Class Codes: H01L 31/0682 back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
• CPC Class Codes: H01L 31/1804 comprising only elements of Group IV of the Periodic Table
• CPC Class Codes: Y02E 10/547 Monocrystalline silicon PV cells
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

A solar cell includes a semiconductor substrate having a plurality of recesses at one surface leaving a plurality of mutually isolated areas of the substrate exposed at that surface, an electrically insulating material filling the recesses, a semiconductor film disposed on the substrate and the electrically insulating material forming a plurality of mutually isolated rectifying junctions with the substrate, one electrode in electrical contact with the semiconductor film at a light incident surface of the solar cell and another electrode in electrical contact with the substrate. The solar cell is made by forming the plurality of recesses, depositing an electrically insulating material on the substrate and in the recesses, removing a portion of the electrically insulating material to expose the substrate at a plurality of mutually isolated locations, depositing the semiconductor film on the electrically insulating material and the substrate, and depositing the electrodes.

Claims

1. A solar cell comprising:

a semiconductor substrate of a first conductivity type having opposed first and second surfaces and including a plurality of recesses disposed in the substrate at the first surface leaving a plurality of mutually isolated area of the substrate exposed at the first surface;

an electrically insulating material filling the recesses;

a first semiconductor film of a second conductivity type, opposite from the first conductivity type, disposed on the substrate and the electrically insulating material at the first surface and forming a plurality of mutually isolated rectifying junctions with the substrate;

second and third semiconductor films of opposite conductivity types forming a rectifying junction and disposed on the first semiconductor film; and

a first electrode in electrical contact with the third semiconductor film at a light incident surface of the solar cell and a second electrode disposed on the second surface of the substrate in electrical contact with the substrate.

2. The solar cell of claim 1 including an electrically conducting, transparent anti-reflection film disposed on the third semiconductor film.

3. The solar cell of claim 2 wherein the anti-reflection film is chosen from the group consisting of indium tin oxide, tin oxide, and tantalum pentoxide.

4. The solar cell of claim 1 wherein the electrically insulating material is chosen from the group consisting of silicon nitride, silicon dioxide, and SiON.

5. The solar cell of claim 1 wherein combinations of the semiconductor substrate and first semiconductor layer are chosen from the groups consisting of silicon and silicon, gallium arsenide and gallium arsenide, indium phosphide and indium phosphide, cadmium sulfide and cadmium telluride, and indium gallium arsenide phosphide and gallium arsenide.

6. A solar cell comprising:

a semiconductor substrate of a first conductivity type having opposed first and second surfaces and including a plurality of recesses disposed in the substrate at the first surface, leaving a plurality of mutually isolated areas of the substrate exposed at the first surface, the substrate including at the first surface mutually isolated, spaced apart regions of a second conductivity type, opposite from the first conductivity type;

an electrically insulating material filling the recesses;

an electrically conducting, transparent, anti-reflection film on the first surface of the substrate and on the electrically insulating material in electrical contact with the second conductivity type regions; and

a first electrode in electrical contact with the electrically conducting, transparent, anti-reflection transparent film at a light incident surface of the solar cell and a second electrode disposed on the second surface of the substrate in electrical contact with the substrate.

7. The solar cell of claim 6 wherein the electrically conducting, transparent, anti-reflection transparent film is chosen from the group consisting of indium tin oxide, tin oxide, and tantalum pentoxide.

8. A solar cell comprising:

an electrically conducting semiconductor substrate having opposed first and second surfaces and including a plurality of recesses disposed in the substrate at the first surface, leaving a plurality of mutually isolated areas of the substrate exposed at the first surface;

an electrically insulating material filling the recesses;

a first semiconductor film of a first conductivity type disposed on the electrically insulating material and the semiconductor substrate at the first surface;

a second semiconductor film of a second conductivity type, opposite from the first conductivity type, disposed on the first semiconductor film forming a rectifying junction with the first semiconductor film; and

a first electrode in electrical contact with the second semiconductor film at a light incident surface of the solar cell and a second electrode disposed on the second surface of the substrate in electrical contact with the substrate.

9. The solar cell of claim 8 including an electrically conducting, transparent, anti-reflection film disposed on the second semiconductor film.

10. The solar cell of claim 9 wherein the electrically conducting, transparent, anti-reflection film is chosen from the group consisting of indium tin oxide, tin oxide, and tantalum pentoxide.

11. The solar cell of claim 8 wherein the electrically insulating material is chosen from the group consisting of silicon nitride, silicon dioxide, and SiON.

12. The solar cell of claim 8 including third and fourth semiconductor layers of opposite conductivity types forming a rectifying junction and disposed on the first semiconductor film.

13. A solar cell comprising:

an electrically conducting semiconductor substrate having opposed first and second surfaces and including a plurality of recesses disposed in the substrate at the first surface, leaving a plurality of mutually isolated areas of the substrate exposed at the first surface;

an electrically insulating material filling the recesses;

a first semiconductor film disposed on the electrically insulating material and the semiconductor substrate at the first surface;

a relatively thin metal film disposed on the first semiconductor film; and

a first electrode in electrical contact with the thin metal film at a light incident surface of the solar cell and a second electrode disposed on the second surface of the substrate in electrical contact with the substrate.

14. The solar cell of claim 13 including an electrically insulating layer disposed between the first surface and the thin metal film.

15. A method of making a solar cell, comprising:

forming a plurality of recesses in a surface of a semiconductor substrate of a first conductivity type;

depositing an electrically insulating material on the substrate and in the recesses;

removing a portion of the electrically insulating material to expose a first surface of the substrate at a plurality of mutually isolated locations;

depositing a first semiconductor film of a second conductivity type, opposite from the first conductivity type, on the electrically insulating material and the first surface of the substrate to form a plurality of rectifying junctions between the first semiconductor film and the substrate; and

depositing first and second electrodes in electrical contact with the first semiconductor film and substrate, respectively.

16. The method of claim 15 including forming the recesses by chemically etching the substrate.

17. The method of claim 15 including depositing one of silicon nitride, silicon dioxide, and SiON as the electrically insulating material.

18. The method of claim 15 including depositing an electrically conducting, transparent, anti-reflection film on the first semiconductor film.

19. The method of claim 15 including removing a portion of the electrically insulating material to expose the first surface of the substrate by mechanical polishing.

20. A method of making a solar cell, comprising:

forming a plurality of recesses in a surface of a semiconductor substrate of a first conductivity type;

depositing an electrically insulating material on the substrate and in the recesses;

removing a portion of the electrically insulating material to expose a first surface of the substrate at a plurality of mutually isolated locations;

depositing a thin metal film on the electrically insulating material and the first surface of the substrate to form a plurality of rectifying junctions with the substrate; and

depositing first and second electrodes in electrical contact with the thin metal film and substrate, respectively.

21. The method of claim 20 including, after removing a portion of the electrically insulating material, depositing an electrically insulating film on the first surface before depositing the thin metal film.

22. A method of making a solar cell, comprising:

forming a plurality of recesses in a surface of a semiconductor substrate of a first conductivity type;

depositing an electrically insulating material on the substrate and in the recesses;

removing a portion of the electrically insulating material to expose a first surface of the substrate at a plurality of mutually isolated locations;

diffusing a dopant impurity producing the second conductivity type into the first surface of the semiconductor substrate to form mutually isolated pn junctions at respective mutually isolated locations on the first surface of the substrate;

depositing an electrically conducting, transparent, anti-reflection film on the electrically insulating material and the first surface of the substrate; and

depositing first and second electrodes in electrical contact with the electrically conducting, transparent, anti-reflection film and substrate, respectively.

23. A method of making a solar cell, comprising:

forming a plurality of recesses in a surface of an electrically conductive semiconductor substrate;

depositing an electrically insulating material on the substrate and in the recesses;

removing a portion of the electrically insulating material to expose a first surface of the substrate at a plurality of mutually isolated locations;

depositing a first semiconductor film of a first conductivity type on the electrically insulating material and the first surface of the substrate in electrical contact with the substrate at the plurality of mutually isolated locations on the substrate;

depositing a second semiconductor film of a second conductivity type, opposite the first conductivity type, on the first semiconductor film to form a rectifying junction with the first semiconductor film; and

depositing first and second electrodes in electrical contact with the second semiconductor film and substrate, respectively.

24. The method of claim 23 including forming the recesses by mechanically scribing the substrate.

25. The method of claim 23 including depositing an electrically conducting, transparent, anti-reflection film on the second semiconductor film.

26. The method of claim 23 including forming the recesses in the substrate by molding during formation of the substrate.

27. The method of claim 23 including removing a portion of the electrically insulating material by mechanical polishing.

28. A method of making a solar cell, comprising:

forming a plurality of recesses in a surface of an electrically conductive semiconductor substrate;

depositing an electrically insulating material on the substrate and in the recesses;

removing a portion of the electrically insulating material to expose a first surface of the substrate at a plurality of mutually isolated locations;

depositing a first semiconductor film on the electrically insulating material on the first surface of the substrate;

depositing a thin metal film on the first semiconductor film to form a plurality of rectifying junctions with the first semiconductor film; and

depositing first and second electrodes in electrical contact with the thin metal film and substrate, respectively.

29. The method of claim 28 including, after removing a portion of the electrically insulating material, depositing an electrically insulating film on the first semiconductor film before depositing the thin metal film.