Method of making patterned metal oxide films comprising a sol-gel of metal oxide and a photoactive compound
First Claim
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1. A method of making patterned metal oxide films on microelectronic wafer substrates, comprising:
- (a) preparing a sol-gel of a metal oxide containing a small but effective amount of an ultraviolet light sensitive photo-active compound;
(b) applying the thin film of said sol-gel to a wafer substrate;
(c) drying the coated wafer;
(d) subjecting the wafer to a predetermined pattern of ultraviolet light to cause said photo-active compound to respond to said ultraviolet light;
(e) treating the wafer with aqueous alkali metal hydroxide to wash away those portions of the metal alkoxide film which has been exposed to ultraviolet light; and
thereafter(f) sintering the gel film to form a ceramic film.
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Abstract
A method of making patterned metal oxide films on microelectronic wafer substrates. They are prepared by making a sol-gel of a metal oxide in combination with an ultraviolet light sensitive photo-active compound. The sol-gel is applied to a silicon wafer substrate, and the wafer subjected to a predetermined pattern of ultraviolet light to cause the photo-active compound to respond to the ultraviolet light. The wafer is thereafter aqueous alkali metal hydroxide washed to wash away the portions of the metal alkoxide film which have been exposed to UV light.
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Citations
17 Claims
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1. A method of making patterned metal oxide films on microelectronic wafer substrates, comprising:
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(a) preparing a sol-gel of a metal oxide containing a small but effective amount of an ultraviolet light sensitive photo-active compound; (b) applying the thin film of said sol-gel to a wafer substrate; (c) drying the coated wafer; (d) subjecting the wafer to a predetermined pattern of ultraviolet light to cause said photo-active compound to respond to said ultraviolet light; (e) treating the wafer with aqueous alkali metal hydroxide to wash away those portions of the metal alkoxide film which has been exposed to ultraviolet light; and
thereafter(f) sintering the gel film to form a ceramic film. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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2. A method of making patterned metal oxide films on microelectronic wafer substrates, comprising:
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(a) preparing a sol-gel of a metal oxide containing a small but effective amount of the ultraviolet light sensitive photo-active compound, which is 1-naphthalenesulfonic acid, 6-diazo-5, 6-dihydro-5-oxo-4-benzoyl-1,2,3 benzene triyl ester, (b) applying the thin film of said sol-gel to a wafer substrate; (c) drying the coated wafer; (d) subjecting the wafer to a predetermined pattern of ultraviolet light to cause said photo-active compound to respond to said ultraviolet light; (e) treating the wafer with aqueous alkali metal hydroxide to wash away those portions of the metal alkoxide film which has been exposed to ultraviolet light; and
thereafter(f) sintering the gel film to form ceramic film.
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Specification