Semiconductor pressure pulse wave sensor
First Claim
1. A semiconductor sensor for detecting a pressure pulse wave produced from an arterial vessel of a subject, comprising:
- a semiconductor substrate including a thin portion obtained by locally forming a recess in one of opposite surfaces of the semiconductor substrate;
at least one semiconductor pressure sensing element supported by said thin portion of said semiconductor substrate, for converting a pressure pulse wave transmitted from said arterial vessel to said thin portion, into an electric signal; and
at least one semiconductor active element supported by said semiconductor substrate, for converting said electric signal into a different electric signal, said at least one active element including a portion of said semiconductor substrate.
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Accused Products
Abstract
A semiconductor sensor for detecting a pressure pulse wave produced from an arterial vessel of a subject, including a semiconductor substrate including a thin portion obtained by locally forming a recess in one of opposite surfaces of the semiconductor substrate, at least one semiconductor pressure sensing element supported by the thin portion of the semiconductor substrate, for converting a pressure pulse wave transmitted from the arterial vessel to the thin portion, into an electric signal, and at least one semiconductor active element supported by the semiconductor substrate, for converting the electric signal into a different electric signal, the at least one active element including a portion of the semiconductor substrate.
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Citations
22 Claims
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1. A semiconductor sensor for detecting a pressure pulse wave produced from an arterial vessel of a subject, comprising:
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a semiconductor substrate including a thin portion obtained by locally forming a recess in one of opposite surfaces of the semiconductor substrate; at least one semiconductor pressure sensing element supported by said thin portion of said semiconductor substrate, for converting a pressure pulse wave transmitted from said arterial vessel to said thin portion, into an electric signal; and at least one semiconductor active element supported by said semiconductor substrate, for converting said electric signal into a different electric signal, said at least one active element including a portion of said semiconductor substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A semiconductor sensor for detecting a pressure pulse wave produced from an arterial vessel of a subject, comprising:
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a semiconductor substrate including at lest one thin portion obtained by locally forming at least one recess in one of opposite surfaces of the semiconductor substrate; a plurality of semiconductor pressure sensing elements supported by said at least one thin portion of said semiconductor substrate, each of said pressure sensing elements converting said pressure pulse wave transmitted from said arterial vessel to said at least one thin portion, into an electric signal; and at least one semiconductor active element supported by said semiconductor substrate, for converting said electric signal into a different signal, said at least one active element including a portion of said semiconductor substrate which portion is different from said at least one thin portion, said at least one active element comprising a first and a second multiplexer each of which is connected to each of said pressure sensing elements and has a single output terminal. - View Dependent Claims (20)
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21. A semiconductor sensor for detecting a pressure pulse wave produced from an arterial vessel of a subject, comprising:
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a semiconductor substrate including a thin portion obtained by locally forming a recess in one of opposite surfaces of the semiconductor substrate; four semiconductor pressure sensing elements supported by said thin portion of said semiconductor substrate, for converting said pressure pulse wave transmitted from said arterial vessel to said thin portion, into an electric signal; and at least one semiconductor active element supported by said semiconductor substrate, for converting said electric signal into a different signal, said at least one active element including a portion of said semiconductor substrate, said at least one active element comprising a first and a second multiplexer each of which is connected to each of said four pressure sensing elements and has a single output terminal, said each of said first and second multiplexers including four analog switches which are connected between a corresponding pressure sensing element, respectively, and the corresponding single output terminal, said each multiplexer further including four AND gates connected to an input of the corresponding analog switches, respectively, and two inverters each of which is connected to an input of each of two of said four AND gates, said four AND gates and said two inverters cooperating with each other to successively actuate said four analog switches so that a multiplexed signal is generated from the single output terminal of said each multiplexer.
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22. A semiconductor sensor for detecting a pressure pulse wave produced from an arterial vessel of a subject, comprising:
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a semiconductor substrate including a thin portion obtained by locally forming a recess in one of opposite surfaces of the semiconductor substrate, wherein said semiconductor substrate is formed of single crystal silicon; a back-up plate formed of single crystal silicon, said semiconductor substrate being attached to said back-up plate with a silicone rubber adhesive; at least one semiconductor pressure sensing element supported by said thin portion of said semiconductor substrate, for converting said pressure pulse wave transmitted from said arterial vessel to said thin portion, into an electric signal; and at least one semiconductor active element supported by said semiconductor substrate, for converting said electric signal into a different signal, said at least one active element including a portion of said semiconductor substrate.
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Specification