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Planar oxygen sensor

  • US 5,102,525 A
  • Filed: 12/10/1990
  • Issued: 04/07/1992
  • Est. Priority Date: 12/14/1989
  • Status: Expired due to Fees
First Claim
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1. A planar oxygen sensor comprising:

  • an insulating substrate;

    a frame formed so as to surround at least a part of a major surface of said insulating substrate;

    a cathode formed on said insulating substrate generally at the center of the part of the major surface surrounded by said frame;

    an anode formed on said insulating substrate between said frame and said cathode;

    a gas permeable membrane stretched over a portion of said insulating substrate to define an electrolyte chamber therebetween, said gas permeable membrane thereby covering said cathode and said anode within the electrolyte chamber and having a peripheral portion supported on said frame; and

    an electrolytic solution in said electrolyte chamber defined between said gas permeable membrane, said frame and said insulating substrate;

    wherein the peripheral portion of the gas permeable membrane is supported on said frame at a locus of support points, one said support point being displaced a minimum distance from said insulating substrate greater than or equal to the minimum such displacement of all other said support points, and wherein said cathode has a surface that is displaced from said insulating substrate a distance greater than that of said one support point in the same direction as said one support point displacement, said direction being toward a non-peripheral portion of said stretched gas permeable membrane.

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