Solid state ion sensor with silicon membrane
First Claim
1. In an integrated circuit chemical sensor arrangement having an input electrode formed of a conductive material in the vicinity of a region formed of a silicon-based semiconductor material, a permselective membrane having a predetermined electrochemical property responsive to an ion through addition of an ionophore which is soluble in an organic solvent, and formed of a silicone-based compound arranged to be in adherence with said silicon-based semiconductor material and in electrical communication with said input electrode, for producing at said input electrode a voltage responsive to said electrochemical property.
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Abstract
A silicone matrix is employed to form a substance-sensitive membrane which is particularly suited for installation on a solid state sensor. The ionophore may be a potassium ionophore, an ammonium ionophore or any other ionophore. The membrane may be coupled to the molecule of interest through a bioactive agent, such as an enzyme, an immunochemical, bacteria, antibody, virus, or antigen. The resulting substance-sensitive membrane has electrochemical properties which compare favorably to those of conventional PVC membranes, and exhibit significantly greater adhesion to glasses and semiconductor substrate materials. The improved adhesion will prolong the life of the sensors and prevent the formation of electrolyte shunts which have been known to render solid state sensors inoperative.
30 Citations
13 Claims
- 1. In an integrated circuit chemical sensor arrangement having an input electrode formed of a conductive material in the vicinity of a region formed of a silicon-based semiconductor material, a permselective membrane having a predetermined electrochemical property responsive to an ion through addition of an ionophore which is soluble in an organic solvent, and formed of a silicone-based compound arranged to be in adherence with said silicon-based semiconductor material and in electrical communication with said input electrode, for producing at said input electrode a voltage responsive to said electrochemical property.
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7. In a process for forming a substance-sensitive membrane for a solid state sensor arrangement, the process comprising the steps of:
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first mixing an ionophore into polydimethylsiloxane; and second mixing CN-derivatized silicone rubber into said polydimethylsiloxane. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A process for forming a substance-sensitive membrane for a solid state sensor arrangement, the process comprising the steps of:
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first mixing into polydimethylsiloxane an ionophore in an amount of approximately 1 wt. %; and second mixing CN-derivatized silicone rubber into said dissolved polydimethylsiloxane in an amount of approximately 10 wt. %.
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Specification