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Solid state ion sensor with silicon membrane

  • US 5,102,526 A
  • Filed: 05/02/1990
  • Issued: 04/07/1992
  • Est. Priority Date: 05/02/1990
  • Status: Expired due to Term
First Claim
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1. In an integrated circuit chemical sensor arrangement having an input electrode formed of a conductive material in the vicinity of a region formed of a silicon-based semiconductor material, a permselective membrane having a predetermined electrochemical property responsive to an ion through addition of an ionophore which is soluble in an organic solvent, and formed of a silicone-based compound arranged to be in adherence with said silicon-based semiconductor material and in electrical communication with said input electrode, for producing at said input electrode a voltage responsive to said electrochemical property.

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