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Self-testable micro-accelerometer and method

  • US 5,103,667 A
  • Filed: 06/22/1989
  • Issued: 04/14/1992
  • Est. Priority Date: 06/22/1989
  • Status: Expired due to Fees
First Claim
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1. A self-testable accelerometer comprisinga housing;

  • a diaphragm mounted in said housing movable relative to said housing in response to an applied force, said diaphragm including a conductive mass formed on said diaphragm;

    at least one capacitive plate attached to said housing and disposed such that a potential difference between said capacitive plate and said mass causes a movement of said mass;

    means for producing a potential difference between said mass and said capacitive plate; and

    at least one piezoresistive element for sensing movement of said mass relative to said housing.

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