Dielectric ceramics for electrostatic chucks and method of making them

• US 5,104,834 A
• Filed: 04/26/1989
• Issued: 04/14/1992
• Est. Priority Date: 04/26/1988
• Status: Expired due to Term

• Current Assignee: Toto Limited
• Original Assignee: TOT Limited
• Inventors: Watanabe, Toshiya, Kitabayashi, Tetsuo, Nakayama, Chiaki
• Primary Examiner(s): Dixon, Jr., William R.
• Assistant Examiner(s): KOSLOW, CAROL M
• Application Number:
  US07/343,805
• Time in Patent Office: 1,084 Days
• Field of Search: 501/127, 501/135, 501/153, 264/65
• US Class Current: 501/127
• CPC Class Codes: C04B 35/111 Fine ceramics
• CPC Class Codes: C04B 35/64 Burning or sintering processes C04B33/32 takes precedence ; powder metallurgy B22F
• CPC Class Codes: H01L 21/6831 using electrostatic chucks
• CPC Class Codes: H01L 21/6833 Details of electrostatic chucks
• CPC Class Codes: Y10T 279/23 with magnetic or electrostatic means

Abstract

A dielectric ceramic for use in an electrostatic chuck, formed by firing in a reducing atmosphere a ceramic material mainly comprised of alumina, wherein said ceramic material comprises an alkaline earth metal in an amount of from 1.0 to 6.0% by weight in terms of oxide and a transition metal in an amount of from 0.5 to 6.0% by weight in terms of oxide, while controlling the dew point of atmosphere gas to be not more than 45° C.

Also disclosed is a method of making a dielectric ceramic for use in an electrostatic chuck, comprising firing a ceramic material mainly comprised of alumina and containing from 1.0 to 6.0% by weight of an alkaline earth metal in terms of oxide and from 0.5 to 6.0% by weight of a transition metal in terms of oxide, in a reducing atmosphere while controlling the dew point of atmosphere gas.

Claims

1. A dielectric ceramic material for use in an electrostatic chuck, formed by firing in a reducing atmosphere, while controlling the dew point of atmosphere gas, said dielectric ceramic material comprising alumina, an alkaline earth metal in an amount of from 1.0 to 6.0% by weight in terms of oxide, and a transition metal in an amount of from 0.5 to 6.0% by weight in terms of oxide, wherein said dielectric ceramic material has an insulation resistance of not more than 10¹² Ω

cm.

2. The dielectric ceramic material for use in an electrostatic chuck according to claim 1, wherein said transition metal comprises titanium.

3. The dielectric ceramic material for use in an electrostatic chuck according to claim 1, wherein said alkaline earth metal is at least one of Ca, Mg, Sr and Ba.

4. A dielectric ceramic material for an electrostatic chuck, formed by firing in a reducing atmosphere while controlling the dew point of the atmosphere gas, said dielectric ceramic material comprising a sintering aid, alumina, an alkaline earth metal in an amount of from 1.0 to 6.0% by weight in terms of oxide and a transition metal in an amount of from 0.5 to 6.0% by weight in terms of oxide, wherein said dielectric ceramic material has an insulation resistance of not more than 10¹² Ω

cm.

5. The dielectric ceramic material for an electrostatic chuck according to claim 4, wherein said transition metal comprises titanium.

6. The dielectric ceramic material in an electrostatic chuck according to claim 4, wherein said alkaline earth metal is at least one of Ca, Mg, Sr and Ba.