Near-field scanning optical microscope using a fluorescent probe
First Claim
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1. In a near-field scanning optical microscope, apparatus comprising:
- a probe, the probe having a tip capable of emitting light at least at a given wavelength;
means for detecting at least a portion of the light emitted by the probe tip;
means for positioning the probe adjacent a sample such that the distance between the probe tip and the sample is smaller than about five times the given wavelength; and
means for displacing the probe tip relative to the sample,CHARACTERIZED IN THATthe probe tip comprises fluorescent material capable of emitting light at least at the given wavelength when the fluorescent material is appropriately excited; and
the apparatus further comprises means for exciting the fluorescent material.
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Abstract
A novel probe, useful for near-field optical scanning microscopy, is provided. The probe has a fine tip which includes fluorescent material. In one embodiment, the invention is an apparatus which includes such a probe, means for exciting and detecting fluorescence in the probe tip, means for positioning the probe tip near the surface of a sample, and means for displacing the probe tip relative to the sample. In a second embodiment, the invention is a manufacturing method in which the novel probe is used to measure a characteristic dimension of a patterned workpiece.
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Citations
11 Claims
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1. In a near-field scanning optical microscope, apparatus comprising:
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a probe, the probe having a tip capable of emitting light at least at a given wavelength; means for detecting at least a portion of the light emitted by the probe tip; means for positioning the probe adjacent a sample such that the distance between the probe tip and the sample is smaller than about five times the given wavelength; and means for displacing the probe tip relative to the sample, CHARACTERIZED IN THAT the probe tip comprises fluorescent material capable of emitting light at least at the given wavelength when the fluorescent material is appropriately excited; and the apparatus further comprises means for exciting the fluorescent material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. Method for manufacturing an article, comprising the steps of:
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a) providing a multiplicity of semiconductor wafers, each wafer having a surface to be patterned by means of a patterning process; b) setting at least one parameter of the patterning process; c) processing at least a first wafer according to the process parameter, such that a pattern is formed on the surface of the wafer, the pattern having a characteristic dimension; d) measuring the characteristic dimension in at least one of the multiplicity of semiconductor wafers; e) comparing the characteristic dimension to a predetermined range of values; f) if the characteristic dimension lies outside the predetermined range of values, changing the process parameter to bring the characteristic dimension within the predetermined range of values; g) after (f), processing at least a second wafer according to the process parameter; and h) performing, on at least the second wafer, at least one additional step toward completion of the article, CHARACTERIZED IN THAT the measuring step comprises; i) providing a probe having a tip, the probe tip comprising fluorescent material capable of emitting light at least at a given wavelength when the fluorescent material is appropriately excited; j) positioning the probe relative to the wafer such that the distance between the probe tip and at least a portion of the pattern is smaller than the given wavelength; k) displacing the probe tip relative to the wafer; l) during the displacing step, exciting fluorescence in the probe tip; and m) detecting fluorescent light emitted by the probe tip.
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Specification