Diffusion plasma-assisted chemical treatment apparatus
First Claim
1. Diffusion plasma-assisted chemical treatment apparatus incorporating a tight treatment enclosure (12) having an axis of symmetry (18), axial production means (20, 22) for a plasma of a carrier gas in the enclosure, at least one continuous solid plate (30) serving as an obstacle to the plasma and positioned perpendicular to the axis (18) and downstream of the production means, plasma diffusion means (40) located downstream of the plate (30) in the enclosure, several non-ionized vector gas supply tubes (50) issuing axially into the enclosure, beneath the diffusion means (40), the ends (52) of said tubes issuing into the enclosure being in the same plane around the enclosure axis and being arranged to provide a delocalized distribution of vector gas, at least one substrate carrier (56) located in the enclosure downstream of the supply tubes and perpendicular to the enclosure axis and annular, axial pumping means (16, 64, 66) for the gaseous medium contained in the enclosure and positioned downstream of the substrate carrier.
1 Assignment
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Accused Products
Abstract
The apparatus comprises a tight treatment enclosure (10), means (20,22) for the axial production of a carrier gas plasma, a solid plate (30) serving as an obstacle to the plasma and located perpendicular to the enclosure axis and downstream of the plasma production means, plasma diffusion means (40) located downstream of the obstacle plate, several non-ionized vector gas supply tubes (50) issuing axially into the enclosure beneath the diffusion means and all located in the same plane around the enclosure axis, a substrate carrier (56) positioned downstream of the vector gas supply tubes and perpendicular to the axis and annular pumping means (66,16) for the gaseous medium contained in the enclosure and positioned downstream of the substrate carrier.
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Citations
12 Claims
- 1. Diffusion plasma-assisted chemical treatment apparatus incorporating a tight treatment enclosure (12) having an axis of symmetry (18), axial production means (20, 22) for a plasma of a carrier gas in the enclosure, at least one continuous solid plate (30) serving as an obstacle to the plasma and positioned perpendicular to the axis (18) and downstream of the production means, plasma diffusion means (40) located downstream of the plate (30) in the enclosure, several non-ionized vector gas supply tubes (50) issuing axially into the enclosure, beneath the diffusion means (40), the ends (52) of said tubes issuing into the enclosure being in the same plane around the enclosure axis and being arranged to provide a delocalized distribution of vector gas, at least one substrate carrier (56) located in the enclosure downstream of the supply tubes and perpendicular to the enclosure axis and annular, axial pumping means (16, 64, 66) for the gaseous medium contained in the enclosure and positioned downstream of the substrate carrier.
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12. Diffusion plasma-assisted chemical treatment apparatus incorporating a tight treatment enclosure (12) having an axis of symmetry (18), axial production means (20,22) for a plasma of a carrier gas in the enclosure, at least one continuous solid plate (30) serving as an obstacle to the plasma and positioned perpendicular to the axis (18) and downstream of the production means, plasma diffusion means (40) located downstream of the plate (30) in the enclosure, several non-ionized vector gas supply tubes (50) issuing axially into the enclosure, beneath the diffusion means (40), the ends (52) of said tubes issuing into the enclosure being in the same plane around the enclosure axis and being arranged in concentric circles centered on the enclosure axis, at least one substrate carrier (56) located in the enclosure downstream of the supply tubes and perpendicular to the enclosure axis and annular, axial pumping means (16, 64, 66) for the gaseous medium contained in the enclosure and positioned downstream of the substrate carrier.
Specification