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Transparent anti-reflective coating

  • US 5,106,671 A
  • Filed: 12/10/1990
  • Issued: 04/21/1992
  • Est. Priority Date: 12/10/1990
  • Status: Expired due to Term
First Claim
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1. An anti-reflective coating comprising a silicon film and a silicon dioxide film over the silicon film, the anti-reflective coating being substantially transparent to visible light.

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